GB0203452D0 - Plasma processing apparatus - Google Patents
Plasma processing apparatusInfo
- Publication number
- GB0203452D0 GB0203452D0 GB0203452A GB0203452A GB0203452D0 GB 0203452 D0 GB0203452 D0 GB 0203452D0 GB 0203452 A GB0203452 A GB 0203452A GB 0203452 A GB0203452 A GB 0203452A GB 0203452 D0 GB0203452 D0 GB 0203452D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- processing apparatus
- plasma processing
- plasma
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0203452A GB0203452D0 (en) | 2002-02-14 | 2002-02-14 | Plasma processing apparatus |
GB0512227A GB2411904B (en) | 2002-02-14 | 2003-02-04 | Plasma processing apparatus |
GB0416549A GB2401375B (en) | 2002-02-14 | 2003-02-04 | Plasma processing apparatus |
DE10392235T DE10392235T5 (en) | 2002-02-14 | 2003-02-04 | Apparatus for plasma processing |
PCT/GB2003/000464 WO2003069013A2 (en) | 2002-02-14 | 2003-02-04 | Plasma processing apparatus |
JP2003568119A JP2005517809A (en) | 2002-02-14 | 2003-02-04 | Plasma processing equipment |
AU2003205849A AU2003205849A1 (en) | 2002-02-14 | 2003-02-04 | Plasma processing apparatus |
US10/364,343 US6709556B2 (en) | 2002-02-14 | 2003-02-12 | Plasma processing apparatus |
TW092103000A TWI282820B (en) | 2002-02-14 | 2003-02-13 | Plasma processing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0203452A GB0203452D0 (en) | 2002-02-14 | 2002-02-14 | Plasma processing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
GB0203452D0 true GB0203452D0 (en) | 2002-04-03 |
Family
ID=9931028
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0203452A Ceased GB0203452D0 (en) | 2002-02-14 | 2002-02-14 | Plasma processing apparatus |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB0203452D0 (en) |
-
2002
- 2002-02-14 GB GB0203452A patent/GB0203452D0/en not_active Ceased
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AT | Applications terminated before publication under section 16(1) |