GB0203452D0 - Plasma processing apparatus - Google Patents

Plasma processing apparatus

Info

Publication number
GB0203452D0
GB0203452D0 GB0203452A GB0203452A GB0203452D0 GB 0203452 D0 GB0203452 D0 GB 0203452D0 GB 0203452 A GB0203452 A GB 0203452A GB 0203452 A GB0203452 A GB 0203452A GB 0203452 D0 GB0203452 D0 GB 0203452D0
Authority
GB
United Kingdom
Prior art keywords
processing apparatus
plasma processing
plasma
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0203452A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Priority to GB0203452A priority Critical patent/GB0203452D0/en
Publication of GB0203452D0 publication Critical patent/GB0203452D0/en
Priority to GB0512227A priority patent/GB2411904B/en
Priority to GB0416549A priority patent/GB2401375B/en
Priority to DE10392235T priority patent/DE10392235T5/en
Priority to PCT/GB2003/000464 priority patent/WO2003069013A2/en
Priority to JP2003568119A priority patent/JP2005517809A/en
Priority to AU2003205849A priority patent/AU2003205849A1/en
Priority to US10/364,343 priority patent/US6709556B2/en
Priority to TW092103000A priority patent/TWI282820B/en
Ceased legal-status Critical Current

Links

GB0203452A 2002-02-14 2002-02-14 Plasma processing apparatus Ceased GB0203452D0 (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
GB0203452A GB0203452D0 (en) 2002-02-14 2002-02-14 Plasma processing apparatus
GB0512227A GB2411904B (en) 2002-02-14 2003-02-04 Plasma processing apparatus
GB0416549A GB2401375B (en) 2002-02-14 2003-02-04 Plasma processing apparatus
DE10392235T DE10392235T5 (en) 2002-02-14 2003-02-04 Apparatus for plasma processing
PCT/GB2003/000464 WO2003069013A2 (en) 2002-02-14 2003-02-04 Plasma processing apparatus
JP2003568119A JP2005517809A (en) 2002-02-14 2003-02-04 Plasma processing equipment
AU2003205849A AU2003205849A1 (en) 2002-02-14 2003-02-04 Plasma processing apparatus
US10/364,343 US6709556B2 (en) 2002-02-14 2003-02-12 Plasma processing apparatus
TW092103000A TWI282820B (en) 2002-02-14 2003-02-13 Plasma processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0203452A GB0203452D0 (en) 2002-02-14 2002-02-14 Plasma processing apparatus

Publications (1)

Publication Number Publication Date
GB0203452D0 true GB0203452D0 (en) 2002-04-03

Family

ID=9931028

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0203452A Ceased GB0203452D0 (en) 2002-02-14 2002-02-14 Plasma processing apparatus

Country Status (1)

Country Link
GB (1) GB0203452D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)