GB0125961D0 - Electron source and electron column - Google Patents

Electron source and electron column

Info

Publication number
GB0125961D0
GB0125961D0 GB0125961A GB0125961A GB0125961D0 GB 0125961 D0 GB0125961 D0 GB 0125961D0 GB 0125961 A GB0125961 A GB 0125961A GB 0125961 A GB0125961 A GB 0125961A GB 0125961 D0 GB0125961 D0 GB 0125961D0
Authority
GB
United Kingdom
Prior art keywords
electron
column
source
electron source
electron column
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0125961A
Other versions
GB2389450A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YORK ELECTRON OPTICS Ltd
Original Assignee
YORK ELECTRON OPTICS Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by YORK ELECTRON OPTICS Ltd filed Critical YORK ELECTRON OPTICS Ltd
Priority to GB0125961A priority Critical patent/GB2389450A/en
Publication of GB0125961D0 publication Critical patent/GB0125961D0/en
Publication of GB2389450A publication Critical patent/GB2389450A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/14—Solid thermionic cathodes characterised by the material
    • H01J1/148—Solid thermionic cathodes characterised by the material with compounds having metallic conductive properties, e.g. lanthanum boride, as an emissive material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H01J1/16—Cathodes heated directly by an electric current characterised by the shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
GB0125961A 2001-10-30 2001-10-30 Electron source Withdrawn GB2389450A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0125961A GB2389450A (en) 2001-10-30 2001-10-30 Electron source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0125961A GB2389450A (en) 2001-10-30 2001-10-30 Electron source

Publications (2)

Publication Number Publication Date
GB0125961D0 true GB0125961D0 (en) 2001-12-19
GB2389450A GB2389450A (en) 2003-12-10

Family

ID=9924739

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0125961A Withdrawn GB2389450A (en) 2001-10-30 2001-10-30 Electron source

Country Status (1)

Country Link
GB (1) GB2389450A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2264738B1 (en) 2009-06-18 2017-12-06 Carl Zeiss NTS Ltd. Electron gun used in a particle beam device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5760639A (en) * 1980-09-26 1982-04-12 Denki Kagaku Kogyo Kk Heat megative electrode consisting of single crystal of hexaboromide
JPS57134835A (en) * 1981-02-12 1982-08-20 Fujitsu Ltd Thermion emission cathode
JPS6269424A (en) * 1985-09-20 1987-03-30 Hitachi Ltd Lanthanum hexabromide hot cathode
JP2000011853A (en) * 1998-06-24 2000-01-14 Advantest Corp Electron gun, its service life extending method and electronic apparatus
JP3581254B2 (en) * 1998-07-02 2004-10-27 日本電子株式会社 Thermal field emission electron gun

Also Published As

Publication number Publication date
GB2389450A (en) 2003-12-10

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)