GB0014587D0 - X-ray reflectivity apparatus and method - Google Patents

X-ray reflectivity apparatus and method

Info

Publication number
GB0014587D0
GB0014587D0 GB0014587A GB0014587A GB0014587D0 GB 0014587 D0 GB0014587 D0 GB 0014587D0 GB 0014587 A GB0014587 A GB 0014587A GB 0014587 A GB0014587 A GB 0014587A GB 0014587 D0 GB0014587 D0 GB 0014587D0
Authority
GB
United Kingdom
Prior art keywords
ray reflectivity
reflectivity apparatus
ray
reflectivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0014587A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
European Economic Community
Original Assignee
European Economic Community
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by European Economic Community filed Critical European Economic Community
Priority to GB0014587A priority Critical patent/GB0014587D0/en
Publication of GB0014587D0 publication Critical patent/GB0014587D0/en
Priority to EP01934187A priority patent/EP1311835A2/en
Priority to CA002412634A priority patent/CA2412634A1/en
Priority to JP2002510921A priority patent/JP2004503771A/en
Priority to PCT/GB2001/002441 priority patent/WO2001096841A2/en
Priority to NO20025951A priority patent/NO20025951L/en
Ceased legal-status Critical Current

Links

GB0014587A 2000-06-14 2000-06-14 X-ray reflectivity apparatus and method Ceased GB0014587D0 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB0014587A GB0014587D0 (en) 2000-06-14 2000-06-14 X-ray reflectivity apparatus and method
EP01934187A EP1311835A2 (en) 2000-06-14 2001-06-01 X-ray reflectivity apparatus and method
CA002412634A CA2412634A1 (en) 2000-06-14 2001-06-01 X-ray reflectivity apparatus and method
JP2002510921A JP2004503771A (en) 2000-06-14 2001-06-01 X-ray reflectivity apparatus and method
PCT/GB2001/002441 WO2001096841A2 (en) 2000-06-14 2001-06-01 X-ray reflectivity apparatus and method
NO20025951A NO20025951L (en) 2000-06-14 2002-12-11 X-ray reflectivity apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0014587A GB0014587D0 (en) 2000-06-14 2000-06-14 X-ray reflectivity apparatus and method

Publications (1)

Publication Number Publication Date
GB0014587D0 true GB0014587D0 (en) 2000-08-09

Family

ID=9893678

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0014587A Ceased GB0014587D0 (en) 2000-06-14 2000-06-14 X-ray reflectivity apparatus and method

Country Status (6)

Country Link
EP (1) EP1311835A2 (en)
JP (1) JP2004503771A (en)
CA (1) CA2412634A1 (en)
GB (1) GB0014587D0 (en)
NO (1) NO20025951L (en)
WO (1) WO2001096841A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6718008B1 (en) * 2002-04-22 2004-04-06 Bruker Axs, Inc. X-ray diffraction screening system with retractable x-ray shield
JP3731207B2 (en) * 2003-09-17 2006-01-05 株式会社リガク X-ray analyzer
FR2866709A1 (en) * 2004-02-19 2005-08-26 Production Et De Rech S Appliq Specimen characteristics e.g. roughness, measuring device, has interception unit to intercept X-rays of beam height greater than selected value, in order to limit extension of measuring zone along direction of propagation of incident X-rays
US10151713B2 (en) 2015-05-21 2018-12-11 Industrial Technology Research Institute X-ray reflectometry apparatus for samples with a miniscule measurement area and a thickness in nanometers and method thereof

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4352017A (en) * 1980-09-22 1982-09-28 Rca Corporation Apparatus for determining the quality of a semiconductor surface
US4821301A (en) * 1986-02-28 1989-04-11 Duke University X-ray reflection method and apparatus for chemical analysis of thin surface layers
JPH0394104A (en) * 1989-09-06 1991-04-18 Toshiba Corp Film thickness measuring method and film thickness measuring device and film forming device using it
DE4137673C2 (en) * 1991-11-15 2001-08-02 Bruker Axs Analytical X Ray Sy X-ray reflectometer
US5619548A (en) * 1995-08-11 1997-04-08 Oryx Instruments And Materials Corp. X-ray thickness gauge
RU2199110C2 (en) * 1997-04-24 2003-02-20 Баранов Александр Михайлович Procedure testing parameters of film coats and surfaces in process of their change and device for is implementation
RU2194272C2 (en) * 1998-04-29 2002-12-10 Баранов Александр Михайлович Method and device for real-time inspection of film coatings and surfaces
US6754305B1 (en) * 1999-08-02 2004-06-22 Therma-Wave, Inc. Measurement of thin films and barrier layers on patterned wafers with X-ray reflectometry

Also Published As

Publication number Publication date
EP1311835A2 (en) 2003-05-21
NO20025951L (en) 2003-01-16
CA2412634A1 (en) 2001-12-20
JP2004503771A (en) 2004-02-05
NO20025951D0 (en) 2002-12-11
WO2001096841A3 (en) 2002-05-10
WO2001096841A2 (en) 2001-12-20

Similar Documents

Publication Publication Date Title
GB2380751B (en) Well reference apparatus and method
GB0014059D0 (en) Method and apparatus
GB0004354D0 (en) Apparatus and method
SG113388A1 (en) Exposure method and exposure apparatus
GB0009901D0 (en) Radiation delivery method and apparatus
SG83810A1 (en) Exposure method and exposure apparatus
GB0317099D0 (en) Method and apparatus
GB0005886D0 (en) Elector-plating apparatus and method
GB0014587D0 (en) X-ray reflectivity apparatus and method
GB0025284D0 (en) Method and apparatus
GB9916443D0 (en) Method and apparatus
GB9921524D0 (en) Method and apparatus
GB9921785D0 (en) Apparatus and method
GB0010008D0 (en) Method and apparatus
GB0030985D0 (en) Apparatus and method
GB0009325D0 (en) Apparatus and method
GB9924191D0 (en) Method and apparatus
GB9905441D0 (en) Method and apparatus
GB0025408D0 (en) Method and apparatus
GB0031409D0 (en) Method and apparatus
GB0021580D0 (en) Method and apparatus
GB0023260D0 (en) Method and apparatus
GB0000949D0 (en) Method and apparatus
GB0002165D0 (en) Method and apparatus
GB0027093D0 (en) Method and apparatus

Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)