FR817807A - Procédé pour la métallisation par pulvérisation cathodique au moyen de cathodes chauffées - Google Patents

Procédé pour la métallisation par pulvérisation cathodique au moyen de cathodes chauffées

Info

Publication number
FR817807A
FR817807A FR817807DA FR817807A FR 817807 A FR817807 A FR 817807A FR 817807D A FR817807D A FR 817807DA FR 817807 A FR817807 A FR 817807A
Authority
FR
France
Prior art keywords
metallization
sputtering
heated cathodes
cathodes
heated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Inventor
Bernhard Berghaus
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR817807A publication Critical patent/FR817807A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3421—Cathode assembly for sputtering apparatus, e.g. Target using heated targets
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Microwave Tubes (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
FR817807D 1936-02-21 1937-02-12 Procédé pour la métallisation par pulvérisation cathodique au moyen de cathodes chauffées Expired FR817807A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEB173069D DE737613C (de) 1936-02-21 1936-02-21 Verfahren zur Metallisierung durch Kathodenzerstaeubung mittels durch Stromdurchgang erhitzter gestreckter Kathoden
DE470614X 1936-03-10

Publications (1)

Publication Number Publication Date
FR817807A true FR817807A (fr) 1937-09-11

Family

ID=32327363

Family Applications (1)

Application Number Title Priority Date Filing Date
FR817807D Expired FR817807A (fr) 1936-02-21 1937-02-12 Procédé pour la métallisation par pulvérisation cathodique au moyen de cathodes chauffées

Country Status (4)

Country Link
BE (1) BE419966A (fr)
DE (1) DE737613C (fr)
FR (1) FR817807A (fr)
GB (1) GB470614A (fr)

Also Published As

Publication number Publication date
GB470614A (en) 1937-08-18
BE419966A (fr)
DE737613C (de) 1943-07-17

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