FR78659E - Nouvelle méthode de mesure des épaisseurs de dépôts métalliques au moyen d'une source de rayons beta - Google Patents

Nouvelle méthode de mesure des épaisseurs de dépôts métalliques au moyen d'une source de rayons beta

Info

Publication number
FR78659E
FR78659E FR838270A FR838270A FR78659E FR 78659 E FR78659 E FR 78659E FR 838270 A FR838270 A FR 838270A FR 838270 A FR838270 A FR 838270A FR 78659 E FR78659 E FR 78659E
Authority
FR
France
Prior art keywords
thicknesses
measuring
ray source
new method
metal deposits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR838270A
Other languages
English (en)
Inventor
Jean-Claude Tanguy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR838270A priority Critical patent/FR78659E/fr
Priority to LU40527D priority patent/LU40527A1/xx
Priority to BE607443A priority patent/BE607443A/fr
Priority to GB3230061A priority patent/GB945046A/en
Application granted granted Critical
Publication of FR78659E publication Critical patent/FR78659E/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • G01B15/025—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness by measuring absorption
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203—Measuring back scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electromagnetism (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR838270A 1955-04-12 1960-09-08 Nouvelle méthode de mesure des épaisseurs de dépôts métalliques au moyen d'une source de rayons beta Expired FR78659E (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR838270A FR78659E (fr) 1955-04-12 1960-09-08 Nouvelle méthode de mesure des épaisseurs de dépôts métalliques au moyen d'une source de rayons beta
LU40527D LU40527A1 (fr) 1960-09-08 1961-08-21
BE607443A BE607443A (fr) 1960-09-08 1961-08-23 Nouvelle méthode de mesure des épaisseurs de dépôts métalliques au moyen d'une source de rayons beta
GB3230061A GB945046A (en) 1960-09-08 1961-09-08 Improvements in or relating to a method of and means for measuring thicknesses of deposits

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1124631T 1955-04-12
FR838270A FR78659E (fr) 1955-04-12 1960-09-08 Nouvelle méthode de mesure des épaisseurs de dépôts métalliques au moyen d'une source de rayons beta

Publications (1)

Publication Number Publication Date
FR78659E true FR78659E (fr) 1962-08-24

Family

ID=27243510

Family Applications (4)

Application Number Title Priority Date Filing Date
FR1124631D Expired FR1124631A (fr) 1955-04-12 1955-04-12 Nouvelle méthode de mesure des épaisseurs de dépôts métalliques au moyen d'une source de rayons bêta
FR763985A Expired FR74057E (fr) 1955-04-12 1958-04-24 Nouvelle méthode de mesure des épaisseurs de dépôts métalliques au moyen d'une source de rayons beta
FR805142A Expired FR76325E (fr) 1955-04-12 1959-09-15 Nouvelle méthode de mesure des épaisseurs de dépôts métalliques au moyen d'une source de rayons beta
FR838270A Expired FR78659E (fr) 1955-04-12 1960-09-08 Nouvelle méthode de mesure des épaisseurs de dépôts métalliques au moyen d'une source de rayons beta

Family Applications Before (3)

Application Number Title Priority Date Filing Date
FR1124631D Expired FR1124631A (fr) 1955-04-12 1955-04-12 Nouvelle méthode de mesure des épaisseurs de dépôts métalliques au moyen d'une source de rayons bêta
FR763985A Expired FR74057E (fr) 1955-04-12 1958-04-24 Nouvelle méthode de mesure des épaisseurs de dépôts métalliques au moyen d'une source de rayons beta
FR805142A Expired FR76325E (fr) 1955-04-12 1959-09-15 Nouvelle méthode de mesure des épaisseurs de dépôts métalliques au moyen d'une source de rayons beta

Country Status (6)

Country Link
US (2) US2967934A (fr)
CH (2) CH331564A (fr)
DE (1) DE1005743B (fr)
FR (4) FR1124631A (fr)
GB (2) GB816062A (fr)
NL (1) NL238481A (fr)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3087061A (en) * 1960-04-14 1963-04-23 Industrial Nucleonics Corp Composition insensitive beta ray gauging system
US3130303A (en) * 1960-11-02 1964-04-21 American Can Co Apparatus for measuring coating amounts
NL285451A (fr) * 1961-11-20
BE628322A (fr) * 1962-02-12
US3115577A (en) * 1962-05-03 1963-12-24 Twin City Testing Corp Measuring table for use in coating thickness measuring
FR1389417A (fr) * 1963-04-01 1965-02-19 Commissariat Energie Atomique Procédé de dosage et dispositifs en faisant application
US3243589A (en) * 1963-07-09 1966-03-29 Kenneth F Sinclair Backscatter flaw detection system
US3424902A (en) * 1964-03-23 1969-01-28 Linus K Hahn Method and apparatus for measuring
US3333100A (en) * 1964-07-06 1967-07-25 United States Steel Corp Coating thickness measuring apparatus wherein a scanning electron beam produces characteristic x-rays detected by plural detectors
US3412249A (en) * 1964-08-04 1968-11-19 Industrial Nucleonics Corp Backscatter thickness measuring gauge utilizing different energy levels of bremsstrahlung and two ionization chambers
US3471694A (en) * 1965-03-01 1969-10-07 Philips Electronics & Pharm In Charge particle barrier consisting of magnetic means for removing electrons from an x-ray beam
US3399303A (en) * 1965-03-04 1968-08-27 Army Usa Radioactive metal corrosion evaluater and methods therefor
US3419718A (en) * 1965-12-15 1968-12-31 Gulf General Atomic Inc Apparatus for measuring the flow of electrically neutral particles
US3472997A (en) * 1966-08-26 1969-10-14 Us Navy Secondary electron collection system
FI40587B (fr) * 1967-04-01 1968-11-30 Valmet Oy
US3497691A (en) * 1967-06-30 1970-02-24 Ohmart Corp Dual mode fluorescence and backscatter coating thickness measuring gauge
US3614424A (en) * 1969-12-19 1971-10-19 Ass Elect Ind Collimator for an x-ray analyzer
US4172225A (en) * 1978-01-09 1979-10-23 Kevex Corporation Alpha particle x-ray energy analysis system
FR2674960B1 (fr) * 1991-04-05 1993-07-30 Lorraine Laminage Procede de mesure de la repartition du taux d'etain libre sur un substrat.
US20110315883A1 (en) * 2008-10-08 2011-12-29 Fusion Research Technologies, Llc Thin film measurement technique

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2521772A (en) * 1947-10-24 1950-09-12 Johnes & Laughlin Steel Corp Method of determining the thickness of a metal coating on a metal base
US2711480A (en) * 1948-06-29 1955-06-21 Friedman Herbert Method of measuring thickness of thin layers
US2642537A (en) * 1949-12-22 1953-06-16 United States Steel Corp Apparatus for determining coating thickness
US2675478A (en) * 1951-07-27 1954-04-13 Isotope Products Ltd Liquid level gauge
US2675479A (en) * 1952-06-27 1954-04-13 Isotope Products Ltd Method and apparatus for radiography
US2723351A (en) * 1952-12-04 1955-11-08 Jack W Garrison Thickness measurement
US2903590A (en) * 1953-09-17 1959-09-08 Gen Motors Corp Nuclear radiation measuring instrument
US2933606A (en) * 1954-06-07 1960-04-19 Industrial Nucleonics Corp Electromagnetic radiation device
US2897371A (en) * 1956-08-01 1959-07-28 Applied Res Lab Inc Spectroscopy

Also Published As

Publication number Publication date
CH352834A (fr) 1961-03-15
DE1005743B (de) 1957-04-04
GB859153A (en) 1961-01-18
GB816062A (en) 1959-07-08
FR1124631A (fr) 1956-10-15
NL238481A (fr)
FR76325E (fr) 1961-10-06
US3056027A (en) 1962-09-25
US2967934A (en) 1961-01-10
CH331564A (fr) 1958-07-31
FR74057E (fr) 1960-11-07

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