GB945046A - Improvements in or relating to a method of and means for measuring thicknesses of deposits - Google Patents

Improvements in or relating to a method of and means for measuring thicknesses of deposits

Info

Publication number
GB945046A
GB945046A GB3230061A GB3230061A GB945046A GB 945046 A GB945046 A GB 945046A GB 3230061 A GB3230061 A GB 3230061A GB 3230061 A GB3230061 A GB 3230061A GB 945046 A GB945046 A GB 945046A
Authority
GB
United Kingdom
Prior art keywords
chamber
sample
counter
tube
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3230061A
Inventor
Jean-Claude Tanguy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR838270A external-priority patent/FR78659E/en
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of GB945046A publication Critical patent/GB945046A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Electromagnetism (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

945,046. Measuring thickness using beta particles. COMMISSARIAT A L'ENERGIE ATOMIQUE. Sept. 8,1961 [Sept. 8, 1960], No. 32300/61. Heading G1A. Apparatus for measuring the thickness of metallic deposits, of the type wherein # particles from source 11 bombard a sample deposit 2 and the X-rays, characteristic of the metal tested, emitted by the sample are detected by proportional counter 10, and wherein the retrodiffused # particles from the sample are deviated from the counter by a magnetic field, is characterized by the provision of a direct connection between the sample and the proportional counter chamber, comprising a non-magnetic tube 8, passing the X-rays and subjected to the magnetic field by magnet 9. Irradiation chamber 3, tube 8 and counter chamber 10 are hermetically sealed by rings 7, 14, 15 and 16 and filled with an innert gas mixture 90% argon, 10% methane. To enable the sample deposit to be removed and changed the source holder 12 can slide down through chamber 10, by means of screw 17 and clamp 18 and hermetically seal the tube 8 and counter chamber 10 by means of the sealing ring 9, engaging a flange on the inner wall of the irradiation chamber 3. The Specification describes the variation in resistivity of the apparatus with the pressure of the enclosed gas.
GB3230061A 1960-09-08 1961-09-08 Improvements in or relating to a method of and means for measuring thicknesses of deposits Expired GB945046A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR838270A FR78659E (en) 1955-04-12 1960-09-08 New method of measuring the thicknesses of metal deposits using a beta ray source

Publications (1)

Publication Number Publication Date
GB945046A true GB945046A (en) 1963-12-18

Family

ID=8738796

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3230061A Expired GB945046A (en) 1960-09-08 1961-09-08 Improvements in or relating to a method of and means for measuring thicknesses of deposits

Country Status (3)

Country Link
BE (1) BE607443A (en)
GB (1) GB945046A (en)
LU (1) LU40527A1 (en)

Also Published As

Publication number Publication date
LU40527A1 (en) 1961-10-21
BE607443A (en) 1961-12-18

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