FR77276E - Pompe à vide électrique et méthode de pompage - Google Patents

Pompe à vide électrique et méthode de pompage

Info

Publication number
FR77276E
FR77276E FR820130A FR820130A FR77276E FR 77276 E FR77276 E FR 77276E FR 820130 A FR820130 A FR 820130A FR 820130 A FR820130 A FR 820130A FR 77276 E FR77276 E FR 77276E
Authority
FR
France
Prior art keywords
vacuum pump
electric vacuum
pumping method
pumping
electric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR820130A
Other languages
English (en)
French (fr)
Inventor
Zaphiropoulos Renn
William A Lloyd
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Application granted granted Critical
Publication of FR77276E publication Critical patent/FR77276E/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
FR820130A 1959-03-23 1960-03-02 Pompe à vide électrique et méthode de pompage Expired FR77276E (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US801186A US3088657A (en) 1959-03-23 1959-03-23 Glow discharge vacuum pump apparatus

Publications (1)

Publication Number Publication Date
FR77276E true FR77276E (fr) 1962-02-09

Family

ID=95398265

Family Applications (1)

Application Number Title Priority Date Filing Date
FR820130A Expired FR77276E (fr) 1959-03-23 1960-03-02 Pompe à vide électrique et méthode de pompage

Country Status (3)

Country Link
US (1) US3088657A (en:Method)
FR (1) FR77276E (en:Method)
SE (1) SE218784C1 (en:Method)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3368100A (en) * 1963-11-25 1968-02-06 Gen Electric Vacuum pump having a radially segmented, annular anode
US4687417A (en) * 1985-12-19 1987-08-18 Hughes Aircraft Company High voltage feedthrough for ion pump
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
CN108194314B (zh) * 2017-12-31 2024-02-20 中国电子科技集团公司第十二研究所 气体捕集型真空泵及其制作方法和使用方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2413653A (en) * 1943-11-15 1946-12-31 Gen Motors Corp Refrigerant compressor valve arrangement
US2755014A (en) * 1953-04-24 1956-07-17 Gen Electric Ionic vacuum pump device

Also Published As

Publication number Publication date
SE218784C1 (en:Method) 1968-02-13
US3088657A (en) 1963-05-07

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