FR3111890B1 - MATERIAL COMPRISING A ZINC-BASED FINE OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL - Google Patents

MATERIAL COMPRISING A ZINC-BASED FINE OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL Download PDF

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Publication number
FR3111890B1
FR3111890B1 FR2006609A FR2006609A FR3111890B1 FR 3111890 B1 FR3111890 B1 FR 3111890B1 FR 2006609 A FR2006609 A FR 2006609A FR 2006609 A FR2006609 A FR 2006609A FR 3111890 B1 FR3111890 B1 FR 3111890B1
Authority
FR
France
Prior art keywords
zinc
layer
contact
silicon
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2006609A
Other languages
French (fr)
Other versions
FR3111890A1 (en
Inventor
Thomas Barres
Denis Guimard
Matthieu ORVEN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Original Assignee
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Glass France SAS, Compagnie de Saint Gobain SA filed Critical Saint Gobain Glass France SAS
Priority to FR2006609A priority Critical patent/FR3111890B1/en
Priority to EP21740593.5A priority patent/EP4172123A1/en
Priority to PCT/FR2021/051082 priority patent/WO2021260296A1/en
Publication of FR3111890A1 publication Critical patent/FR3111890A1/en
Application granted granted Critical
Publication of FR3111890B1 publication Critical patent/FR3111890B1/en
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Anticipated expiration legal-status Critical

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366—Low-emissivity or solar control coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/90—Other aspects of coatings
    • C03C2217/94—Transparent conductive oxide layers [TCO] being part of a multilayer coating
    • C03C2217/944—Layers comprising zinc oxide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

L’invention concerne un matériau comprenant un substrat (30) revêtu sur une face (29) d’un empilement de couches minces (14) comportant au moins une couche fonctionnelle métallique (140) et comportant :- une sous-couche d’oxyde à base de zinc, ZnO (129) entre 0,3 et 5,0 nm ;- une sous-couche diélectrique de nitrure à base de silicium-zirconium SixNyZrZ (127) sous et au contact de ladite sous-couche d’oxyde à base de zinc ZnO (129), entre 5,0 et 50,0 nm ; - une sous-couche diélectrique primaire de nitrure à base de silicium Si3N4 (125) sous et au contact de ladite sous-couche de nitrure à base de silicium-zirconium SixNyZrZ (127), entre 5,0 et 30,0 nm ;- une couche de surblocage d’oxyde à base de titane TiOx située sur et au contact de ladite couche fonctionnelle (140). Figure de l’abrégé : Figure 1The invention relates to a material comprising a substrate (30) coated on one face (29) with a stack of thin layers (14) comprising at least one metallic functional layer (140) and comprising:- an underlayer of oxide based on zinc, ZnO (129) between 0.3 and 5.0 nm;- a dielectric sub-layer of silicon-zirconium nitride SixNyZrZ (127) under and in contact with said oxide sub-layer at zinc base ZnO (129), between 5.0 and 50.0 nm; - a primary dielectric sublayer of silicon nitride based on Si3N4 (125) under and in contact with said sublayer of silicon-zirconium nitride based on SixNyZrZ (127), between 5.0 and 30.0 nm;- a TiOx titanium based oxide overblocking layer located over and in contact with said functional layer (140). Abstract Figure: Figure 1

FR2006609A 2020-06-24 2020-06-24 MATERIAL COMPRISING A ZINC-BASED FINE OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL Active FR3111890B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR2006609A FR3111890B1 (en) 2020-06-24 2020-06-24 MATERIAL COMPRISING A ZINC-BASED FINE OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL
EP21740593.5A EP4172123A1 (en) 2020-06-24 2021-06-16 Material comprising a stack with a thin zinc-based oxide dielectric sublayer and method for applying said material
PCT/FR2021/051082 WO2021260296A1 (en) 2020-06-24 2021-06-16 Material comprising a stack with a thin zinc-based oxide dielectric sublayer and method for applying said material

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2006609A FR3111890B1 (en) 2020-06-24 2020-06-24 MATERIAL COMPRISING A ZINC-BASED FINE OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL
FR2006609 2020-06-24

Publications (2)

Publication Number Publication Date
FR3111890A1 FR3111890A1 (en) 2021-12-31
FR3111890B1 true FR3111890B1 (en) 2022-07-01

Family

ID=72644409

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2006609A Active FR3111890B1 (en) 2020-06-24 2020-06-24 MATERIAL COMPRISING A ZINC-BASED FINE OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL

Country Status (3)

Country Link
EP (1) EP4172123A1 (en)
FR (1) FR3111890B1 (en)
WO (1) WO2021260296A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2728559B1 (en) 1994-12-23 1997-01-31 Saint Gobain Vitrage GLASS SUBSTRATES COATED WITH A STACK OF THIN LAYERS WITH INFRARED REFLECTION PROPERTIES AND / OR IN THE FIELD OF SOLAR RADIATION
FR2946639B1 (en) 2009-06-12 2011-07-15 Saint Gobain THIN LAYER DEPOSITION METHOD AND PRODUCT OBTAINED
FR3038597B1 (en) * 2015-07-08 2021-12-10 Saint Gobain MATERIAL EQUIPPED WITH A THERMAL PROPERTIES STACK
FR3054892A1 (en) * 2016-08-02 2018-02-09 Saint Gobain SUBSTRATE PROVIDED WITH A STACK WITH THERMAL PROPERTIES COMPRISING AT LEAST ONE LAYER COMPRISING ZIRCONIUM ENRICHED SILICON ZIRCONIUM NITRIDE, USE THEREOF AND MANUFACTURE THEREOF
US10287673B2 (en) * 2017-03-07 2019-05-14 Guardian Glass, LLC Coated article having low-E coating with IR reflecting layer(S) and yttrium inclusive high index nitrided dielectric layer

Also Published As

Publication number Publication date
FR3111890A1 (en) 2021-12-31
WO2021260296A1 (en) 2021-12-30
EP4172123A1 (en) 2023-05-03

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