FR3111890B1 - MATERIAL COMPRISING A ZINC-BASED FINE OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL - Google Patents
MATERIAL COMPRISING A ZINC-BASED FINE OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL Download PDFInfo
- Publication number
- FR3111890B1 FR3111890B1 FR2006609A FR2006609A FR3111890B1 FR 3111890 B1 FR3111890 B1 FR 3111890B1 FR 2006609 A FR2006609 A FR 2006609A FR 2006609 A FR2006609 A FR 2006609A FR 3111890 B1 FR3111890 B1 FR 3111890B1
- Authority
- FR
- France
- Prior art keywords
- zinc
- layer
- contact
- silicon
- depositing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/90—Other aspects of coatings
- C03C2217/94—Transparent conductive oxide layers [TCO] being part of a multilayer coating
- C03C2217/944—Layers comprising zinc oxide
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Laminated Bodies (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
L’invention concerne un matériau comprenant un substrat (30) revêtu sur une face (29) d’un empilement de couches minces (14) comportant au moins une couche fonctionnelle métallique (140) et comportant :- une sous-couche d’oxyde à base de zinc, ZnO (129) entre 0,3 et 5,0 nm ;- une sous-couche diélectrique de nitrure à base de silicium-zirconium SixNyZrZ (127) sous et au contact de ladite sous-couche d’oxyde à base de zinc ZnO (129), entre 5,0 et 50,0 nm ; - une sous-couche diélectrique primaire de nitrure à base de silicium Si3N4 (125) sous et au contact de ladite sous-couche de nitrure à base de silicium-zirconium SixNyZrZ (127), entre 5,0 et 30,0 nm ;- une couche de surblocage d’oxyde à base de titane TiOx située sur et au contact de ladite couche fonctionnelle (140). Figure de l’abrégé : Figure 1The invention relates to a material comprising a substrate (30) coated on one face (29) with a stack of thin layers (14) comprising at least one metallic functional layer (140) and comprising:- an underlayer of oxide based on zinc, ZnO (129) between 0.3 and 5.0 nm;- a dielectric sub-layer of silicon-zirconium nitride SixNyZrZ (127) under and in contact with said oxide sub-layer at zinc base ZnO (129), between 5.0 and 50.0 nm; - a primary dielectric sublayer of silicon nitride based on Si3N4 (125) under and in contact with said sublayer of silicon-zirconium nitride based on SixNyZrZ (127), between 5.0 and 30.0 nm;- a TiOx titanium based oxide overblocking layer located over and in contact with said functional layer (140). Abstract Figure: Figure 1
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR2006609A FR3111890B1 (en) | 2020-06-24 | 2020-06-24 | MATERIAL COMPRISING A ZINC-BASED FINE OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL |
EP21740593.5A EP4172123A1 (en) | 2020-06-24 | 2021-06-16 | Material comprising a stack with a thin zinc-based oxide dielectric sublayer and method for applying said material |
PCT/FR2021/051082 WO2021260296A1 (en) | 2020-06-24 | 2021-06-16 | Material comprising a stack with a thin zinc-based oxide dielectric sublayer and method for applying said material |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR2006609A FR3111890B1 (en) | 2020-06-24 | 2020-06-24 | MATERIAL COMPRISING A ZINC-BASED FINE OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL |
FR2006609 | 2020-06-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3111890A1 FR3111890A1 (en) | 2021-12-31 |
FR3111890B1 true FR3111890B1 (en) | 2022-07-01 |
Family
ID=72644409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR2006609A Active FR3111890B1 (en) | 2020-06-24 | 2020-06-24 | MATERIAL COMPRISING A ZINC-BASED FINE OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP4172123A1 (en) |
FR (1) | FR3111890B1 (en) |
WO (1) | WO2021260296A1 (en) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2728559B1 (en) | 1994-12-23 | 1997-01-31 | Saint Gobain Vitrage | GLASS SUBSTRATES COATED WITH A STACK OF THIN LAYERS WITH INFRARED REFLECTION PROPERTIES AND / OR IN THE FIELD OF SOLAR RADIATION |
FR2946639B1 (en) | 2009-06-12 | 2011-07-15 | Saint Gobain | THIN LAYER DEPOSITION METHOD AND PRODUCT OBTAINED |
FR3038597B1 (en) * | 2015-07-08 | 2021-12-10 | Saint Gobain | MATERIAL EQUIPPED WITH A THERMAL PROPERTIES STACK |
FR3054892A1 (en) * | 2016-08-02 | 2018-02-09 | Saint Gobain | SUBSTRATE PROVIDED WITH A STACK WITH THERMAL PROPERTIES COMPRISING AT LEAST ONE LAYER COMPRISING ZIRCONIUM ENRICHED SILICON ZIRCONIUM NITRIDE, USE THEREOF AND MANUFACTURE THEREOF |
US10287673B2 (en) * | 2017-03-07 | 2019-05-14 | Guardian Glass, LLC | Coated article having low-E coating with IR reflecting layer(S) and yttrium inclusive high index nitrided dielectric layer |
-
2020
- 2020-06-24 FR FR2006609A patent/FR3111890B1/en active Active
-
2021
- 2021-06-16 WO PCT/FR2021/051082 patent/WO2021260296A1/en unknown
- 2021-06-16 EP EP21740593.5A patent/EP4172123A1/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
FR3111890A1 (en) | 2021-12-31 |
WO2021260296A1 (en) | 2021-12-30 |
EP4172123A1 (en) | 2023-05-03 |
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Effective date: 20211231 |
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