FR3111892B1 - MATERIAL COMPRISING A ZINC-BASED FINE OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL - Google Patents
MATERIAL COMPRISING A ZINC-BASED FINE OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL Download PDFInfo
- Publication number
- FR3111892B1 FR3111892B1 FR2006607A FR2006607A FR3111892B1 FR 3111892 B1 FR3111892 B1 FR 3111892B1 FR 2006607 A FR2006607 A FR 2006607A FR 2006607 A FR2006607 A FR 2006607A FR 3111892 B1 FR3111892 B1 FR 3111892B1
- Authority
- FR
- France
- Prior art keywords
- zinc
- depositing
- underlayer
- oxide dielectric
- based fine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/90—Other aspects of coatings
- C03C2217/94—Transparent conductive oxide layers [TCO] being part of a multilayer coating
- C03C2217/944—Layers comprising zinc oxide
Abstract
L’invention concerne un matériau comprenant un substrat (30) revêtu sur une face (29) d’un empilement de couches minces (14) comportant au moins une couche fonctionnelle métallique (140) et comportant :- une sous-couche d’oxyde à base de zinc, ZnO (129) entre 0,3 et 5,0 nm ;- une sous-couche diélectrique de nitrure à base de silicium, Si3N4 (127) entre 10,0 et 50,0 nm ;- une surcouche d’oxyde à base de zinc, ZnO (161) entre 2,0 et 10,0 nm ;- une surcouche diélectrique (165) ;- une couche de surblocage d’oxyde à base de titane TiOx (150) située sur et au contact de ladite couche fonctionnelle (140). Figure de l’abrégé : Figure 1The invention relates to a material comprising a substrate (30) coated on one face (29) with a stack of thin layers (14) comprising at least one metallic functional layer (140) and comprising:- an underlayer of oxide zinc based, ZnO (129) between 0.3 and 5.0 nm;- a silicon nitride based dielectric underlayer, Si3N4 (127) between 10.0 and 50.0 nm;- an overlayer of zinc-based oxide, ZnO (161) between 2.0 and 10.0 nm;- a dielectric overlayer (165);- a titanium-based oxide TiOx (150) overblocking layer located over and in contact of said functional layer (140). Abstract Figure: Figure 1
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR2006607A FR3111892B1 (en) | 2020-06-24 | 2020-06-24 | MATERIAL COMPRISING A ZINC-BASED FINE OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL |
EP21740592.7A EP4172122A1 (en) | 2020-06-24 | 2021-06-16 | Material comprising a stack with a thin zinc-based oxide dielectric sublayer and method for depositing said material |
PCT/FR2021/051081 WO2021260295A1 (en) | 2020-06-24 | 2021-06-16 | Material comprising a stack with a thin zinc-based oxide dielectric sublayer and method for depositing said material |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR2006607A FR3111892B1 (en) | 2020-06-24 | 2020-06-24 | MATERIAL COMPRISING A ZINC-BASED FINE OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL |
FR2006607 | 2020-06-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3111892A1 FR3111892A1 (en) | 2021-12-31 |
FR3111892B1 true FR3111892B1 (en) | 2022-07-22 |
Family
ID=72644408
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR2006607A Active FR3111892B1 (en) | 2020-06-24 | 2020-06-24 | MATERIAL COMPRISING A ZINC-BASED FINE OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP4172122A1 (en) |
FR (1) | FR3111892B1 (en) |
WO (1) | WO2021260295A1 (en) |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2728559B1 (en) | 1994-12-23 | 1997-01-31 | Saint Gobain Vitrage | GLASS SUBSTRATES COATED WITH A STACK OF THIN LAYERS WITH INFRARED REFLECTION PROPERTIES AND / OR IN THE FIELD OF SOLAR RADIATION |
FR2893024B1 (en) * | 2005-11-08 | 2008-02-29 | Saint Gobain | SUBSTRATE PROVIDED WITH A STACK WITH THERMAL PROPERTIES |
FR2946639B1 (en) | 2009-06-12 | 2011-07-15 | Saint Gobain | THIN LAYER DEPOSITION METHOD AND PRODUCT OBTAINED |
GB201102724D0 (en) * | 2011-02-17 | 2011-03-30 | Pilkington Group Ltd | Heat treatable coated glass pane |
FR2972447B1 (en) * | 2011-03-08 | 2019-06-07 | Saint-Gobain Glass France | PROCESS FOR OBTAINING A SUBSTRATE WITH A COATING |
GB201106788D0 (en) * | 2011-04-21 | 2011-06-01 | Pilkington Group Ltd | Heat treatable coated glass pane |
FR3009833B1 (en) * | 2013-08-20 | 2015-10-16 | Saint Gobain | PROCESS FOR OBTAINING A SUBSTRATE WITH A COATING COMPRISING A DISCONTINUOUS METAL THIN LAYER |
FR3038597B1 (en) * | 2015-07-08 | 2021-12-10 | Saint Gobain | MATERIAL EQUIPPED WITH A THERMAL PROPERTIES STACK |
-
2020
- 2020-06-24 FR FR2006607A patent/FR3111892B1/en active Active
-
2021
- 2021-06-16 EP EP21740592.7A patent/EP4172122A1/en active Pending
- 2021-06-16 WO PCT/FR2021/051081 patent/WO2021260295A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
EP4172122A1 (en) | 2023-05-03 |
WO2021260295A1 (en) | 2021-12-30 |
FR3111892A1 (en) | 2021-12-31 |
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Legal Events
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PLFP | Fee payment |
Year of fee payment: 2 |
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PLSC | Publication of the preliminary search report |
Effective date: 20211231 |
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PLFP | Fee payment |
Year of fee payment: 3 |
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PLFP | Fee payment |
Year of fee payment: 4 |