FR3111833B1 - Préhenseur et procédé de saisie d’une plaque - Google Patents

Préhenseur et procédé de saisie d’une plaque Download PDF

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Publication number
FR3111833B1
FR3111833B1 FR2006672A FR2006672A FR3111833B1 FR 3111833 B1 FR3111833 B1 FR 3111833B1 FR 2006672 A FR2006672 A FR 2006672A FR 2006672 A FR2006672 A FR 2006672A FR 3111833 B1 FR3111833 B1 FR 3111833B1
Authority
FR
France
Prior art keywords
plate
gripping
gripper
opening
gripping head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR2006672A
Other languages
English (en)
Other versions
FR3111833A1 (fr
Inventor
Claude Jacquot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Solean
Original Assignee
Solean
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Solean filed Critical Solean
Priority to FR2006672A priority Critical patent/FR3111833B1/fr
Priority to PCT/EP2021/067459 priority patent/WO2021260166A1/fr
Publication of FR3111833A1 publication Critical patent/FR3111833A1/fr
Application granted granted Critical
Publication of FR3111833B1 publication Critical patent/FR3111833B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B25J15/0683—Details of suction cup structure, e.g. grooves or ridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Manipulator (AREA)

Abstract

Préhenseur et procédé de saisie d’une plaque Pour saisir, de façon fiable et économe en énergie, une plaque (2) comprenant une face supérieure (3) et des pistes (4, 5), sans détériorer ladite plaque, un préhenseur (1) comprend une tête de préhension (6) avec un bord de contact (15) plan, qui délimite une ouverture de préhension (16) et qui vient en appui contre des pistes (4, 5) pour être maintenu à distance de la face supérieure (3), ménageant ainsi des interstices de fuite (22) entre la plaque (2) et la tête de préhension (6). Le préhenseur (1) comprend en outre un dispositif d’aspiration (8), pour générer l’admission d’un flux d’air (F8) vers l’intérieur de la tête de préhension (6) au travers de l’ouverture de préhension (16) et ainsi créer une dépression dans l’ouverture de préhension (16) solidarisant la plaque (2) avec la tête de préhension (6), le flux d’air (F8) étant admis à partir des interstices de fuite (22). Figure pour l'abrégé : figure 2
FR2006672A 2020-06-25 2020-06-25 Préhenseur et procédé de saisie d’une plaque Expired - Fee Related FR3111833B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR2006672A FR3111833B1 (fr) 2020-06-25 2020-06-25 Préhenseur et procédé de saisie d’une plaque
PCT/EP2021/067459 WO2021260166A1 (fr) 2020-06-25 2021-06-25 Préhenseur et procédé de saisie d'une plaque

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2006672A FR3111833B1 (fr) 2020-06-25 2020-06-25 Préhenseur et procédé de saisie d’une plaque
FR2006672 2020-06-25

Publications (2)

Publication Number Publication Date
FR3111833A1 FR3111833A1 (fr) 2021-12-31
FR3111833B1 true FR3111833B1 (fr) 2022-07-15

Family

ID=72644424

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2006672A Expired - Fee Related FR3111833B1 (fr) 2020-06-25 2020-06-25 Préhenseur et procédé de saisie d’une plaque

Country Status (2)

Country Link
FR (1) FR3111833B1 (fr)
WO (1) WO2021260166A1 (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005228829A (ja) * 2004-02-10 2005-08-25 Nagamine Seisakusho:Kk 通気性材料
KR20110108591A (ko) * 2010-03-29 2011-10-06 현대중공업 주식회사 그리퍼의 흡착 패드
JP2012223860A (ja) 2011-04-20 2012-11-15 Murata Machinery Ltd 吸引チャック、及びそれを備えたワークの移載装置
CN107346756A (zh) * 2016-05-06 2017-11-14 应用材料意大利有限公司 制造太阳能电池件的至少两个布置的设备、系统及方法
FR3081612B1 (fr) * 2018-05-22 2021-09-17 Solean Procede et systeme de depilage d'un empilement de plaques de materiau semi-conducteur

Also Published As

Publication number Publication date
WO2021260166A1 (fr) 2021-12-30
FR3111833A1 (fr) 2021-12-31

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Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20211231

PLFP Fee payment

Year of fee payment: 3

ST Notification of lapse

Effective date: 20240205