FR3087005B1 - Installation of interferometer and its method of manufacture - Google Patents

Installation of interferometer and its method of manufacture Download PDF

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Publication number
FR3087005B1
FR3087005B1 FR1910888A FR1910888A FR3087005B1 FR 3087005 B1 FR3087005 B1 FR 3087005B1 FR 1910888 A FR1910888 A FR 1910888A FR 1910888 A FR1910888 A FR 1910888A FR 3087005 B1 FR3087005 B1 FR 3087005B1
Authority
FR
France
Prior art keywords
installation
anchor
interferometer
mirror layer
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1910888A
Other languages
French (fr)
Other versions
FR3087005A1 (en
Inventor
Christoph Schelling
Christoph Daniel Kraemmer
Marc Schmid
Reinhold Roedel
Thomas Buck
Benedikt Stein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR3087005A1 publication Critical patent/FR3087005A1/en
Application granted granted Critical
Publication of FR3087005B1 publication Critical patent/FR3087005B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00039—Anchors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0307—Anchors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/053—Translation according to an axis perpendicular to the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

TITRE : Installation d’interféromètre et son procédé de fabrication Installation de miroir (1) pour une installation d’interféromètre comprenant une couche de miroir (3) avec un ancrage (B), qui entoure la couche de miroir (3) au moins en partie latéralement, et un substrat (2) portant l’ancrage (B), - la couche de miroir (3) étant encastrée mécaniquement par l’ancrage (B), et l’ancrage (B) en vue de dessus sur le substrat (2) décrit une courbe (K) dont le rayon varie de manière azimutale. Figure 2dTITLE: Interferometer installation and method for manufacturing same Mirror installation (1) for an interferometer installation comprising a mirror layer (3) with an anchor (B), which surrounds the mirror layer (3) at least part laterally, and a substrate (2) carrying the anchor (B), - the mirror layer (3) being mechanically embedded by the anchor (B), and the anchor (B) seen from above on the substrate (2) describes a curve (K) whose radius varies azimuthally. Figure 2d

FR1910888A 2018-10-05 2019-10-01 Installation of interferometer and its method of manufacture Active FR3087005B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018217054.1A DE102018217054A1 (en) 2018-10-05 2018-10-05 Mirror device for an interferometer device, interferometer device, method for producing a mirror device for an interferometer device, and method for producing an interferometer device
DE102018217054.1 2018-10-05

Publications (2)

Publication Number Publication Date
FR3087005A1 FR3087005A1 (en) 2020-04-10
FR3087005B1 true FR3087005B1 (en) 2022-01-14

Family

ID=69158054

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1910888A Active FR3087005B1 (en) 2018-10-05 2019-10-01 Installation of interferometer and its method of manufacture

Country Status (3)

Country Link
KR (1) KR20200039568A (en)
DE (1) DE102018217054A1 (en)
FR (1) FR3087005B1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
AUPS098002A0 (en) * 2002-03-08 2002-03-28 University Of Western Australia, The Tunable cavity resonator, and method of fabricating same
FI124072B (en) 2009-05-29 2014-03-14 Valtion Teknillinen Micromechanical Fabry-Perot Adjustable Interferometer, Intermediate, and Method of Manufacture
US9372338B2 (en) * 2014-01-17 2016-06-21 Qualcomm Mems Technologies, Inc. Multi-state interferometric modulator with large stable range of motion

Also Published As

Publication number Publication date
FR3087005A1 (en) 2020-04-10
DE102018217054A1 (en) 2020-04-09
KR20200039568A (en) 2020-04-16

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