FR3084483B1 - Procede de realisation d'une structure presentant au moins un motif courbe - Google Patents

Procede de realisation d'une structure presentant au moins un motif courbe Download PDF

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Publication number
FR3084483B1
FR3084483B1 FR1856929A FR1856929A FR3084483B1 FR 3084483 B1 FR3084483 B1 FR 3084483B1 FR 1856929 A FR1856929 A FR 1856929A FR 1856929 A FR1856929 A FR 1856929A FR 3084483 B1 FR3084483 B1 FR 3084483B1
Authority
FR
France
Prior art keywords
reliefs
curved pattern
making
base layer
structure presenting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1856929A
Other languages
English (en)
Other versions
FR3084483A1 (fr
Inventor
Hubert Teyssedre
Pierre Brianceau
Stefan Landis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1856929A priority Critical patent/FR3084483B1/fr
Priority to US17/262,095 priority patent/US20220111562A1/en
Priority to EP19742219.9A priority patent/EP3827311A1/fr
Priority to PCT/EP2019/069829 priority patent/WO2020020903A1/fr
Priority to JP2021503803A priority patent/JP2021532407A/ja
Publication of FR3084483A1 publication Critical patent/FR3084483A1/fr
Application granted granted Critical
Publication of FR3084483B1 publication Critical patent/FR3084483B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00365—Production of microlenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0075—Manufacture of substrate-free structures
    • B81C99/009—Manufacturing the stamps or the moulds
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/02—Simple or compound lenses with non-spherical faces
    • G02B3/04—Simple or compound lenses with non-spherical faces with continuous faces that are rotationally symmetrical but deviate from a true sphere, e.g. so called "aspheric" lenses
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B2207/00—Coding scheme for general features or characteristics of optical elements and systems of subclass G02B, but not including elements and systems which would be classified in G02B6/00 and subgroups
    • G02B2207/101—Nanooptics

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Laminated Bodies (AREA)
  • Micromachines (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

La présente invention concerne un procédé de réalisation d'une structure présentant au moins un motif courbe, le procédé comprenant : - Fournir un substrat 2 présentant une face avant dont : ○ une partie est structurée par au moins une pluralité de reliefs, les reliefs de chaque pluralité définissant entre eux des espaces, et ○ une autre partie est exempte de reliefs, - Déposer une couche de base 5 d'un matériau tel qu'un polymère ou un verre, sur la face avant du substrat, au moins au droit des reliefs, et - Permettre au matériau de la couche de base de remplir au moins partiellement au moins un des espaces par déformation. La couche de base 5 est ainsi déformée de sorte que sa surface libre 50 présente au moins un motif 6 courbe.
FR1856929A 2018-07-25 2018-07-25 Procede de realisation d'une structure presentant au moins un motif courbe Expired - Fee Related FR3084483B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR1856929A FR3084483B1 (fr) 2018-07-25 2018-07-25 Procede de realisation d'une structure presentant au moins un motif courbe
US17/262,095 US20220111562A1 (en) 2018-07-25 2019-07-23 Method for producing a structure having at least one curved pattern
EP19742219.9A EP3827311A1 (fr) 2018-07-25 2019-07-23 Procédé de réalisation d'une structure présentant au moins un motif courbe
PCT/EP2019/069829 WO2020020903A1 (fr) 2018-07-25 2019-07-23 Procédé de réalisation d'une structure présentant au moins un motif courbe
JP2021503803A JP2021532407A (ja) 2018-07-25 2019-07-23 少なくとも１つの湾曲したパターンを有する構造体を製造するための方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1856929A FR3084483B1 (fr) 2018-07-25 2018-07-25 Procede de realisation d'une structure presentant au moins un motif courbe

Publications (2)

Publication Number Publication Date
FR3084483A1 FR3084483A1 (fr) 2020-01-31
FR3084483B1 true FR3084483B1 (fr) 2021-10-22

Family

ID=65685439

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1856929A Expired - Fee Related FR3084483B1 (fr) 2018-07-25 2018-07-25 Procede de realisation d'une structure presentant au moins un motif courbe

Country Status (5)

Country Link
US (1) US20220111562A1 (fr)
EP (1) EP3827311A1 (fr)
JP (1) JP2021532407A (fr)
FR (1) FR3084483B1 (fr)
WO (1) WO2020020903A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111825311A (zh) * 2019-04-17 2020-10-27 中国兵器工业第五九研究所 光学玻璃阵列透镜微纳热压成型工艺

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002283361A (ja) * 2001-03-23 2002-10-03 Seiko Epson Corp マイクロレンズアレイ及びその製造方法並びに光学装置
US7280278B2 (en) * 2004-06-02 2007-10-09 Micron Technology, Inc. Apparatus and method for manufacturing positive or negative microlenses
US8366949B2 (en) * 2005-08-19 2013-02-05 Kiichi Takamoto Mold for microlens and process for producing the same

Also Published As

Publication number Publication date
US20220111562A1 (en) 2022-04-14
JP2021532407A (ja) 2021-11-25
FR3084483A1 (fr) 2020-01-31
WO2020020903A1 (fr) 2020-01-30
EP3827311A1 (fr) 2021-06-02

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