FR3058075B1 - Plateau de detourage comportant une piece amovible - Google Patents

Plateau de detourage comportant une piece amovible Download PDF

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Publication number
FR3058075B1
FR3058075B1 FR1660584A FR1660584A FR3058075B1 FR 3058075 B1 FR3058075 B1 FR 3058075B1 FR 1660584 A FR1660584 A FR 1660584A FR 1660584 A FR1660584 A FR 1660584A FR 3058075 B1 FR3058075 B1 FR 3058075B1
Authority
FR
France
Prior art keywords
removable part
detourage
platform
plate
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1660584A
Other languages
English (en)
Other versions
FR3058075A1 (fr
Inventor
Pedro JERONIMO
Philippe Roche
Renaud Varache
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1660584A priority Critical patent/FR3058075B1/fr
Publication of FR3058075A1 publication Critical patent/FR3058075A1/fr
Application granted granted Critical
Publication of FR3058075B1 publication Critical patent/FR3058075B1/fr
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Micromachines (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Dicing (AREA)

Abstract

L'objet principal de l'invention est un plateau (1) de détourage pour la réalisation d'une structure monocouche ou multicouche, caractérisé en ce qu'il comporte : une plaque de base (6) comprenant une pluralité de logements (2) pour recevoir chacun une plaquette permettant de former la structure, et au moins une pièce amovible (7a, 7b), apte à s'étendre au moins en partie le long de la périphérie (P) dudit logement (2), ladite au moins une pièce amovible présentant une forme épousant au moins partiellement la forme de la plaquette reçue dans ledit logement (2).
FR1660584A 2016-11-02 2016-11-02 Plateau de detourage comportant une piece amovible Active FR3058075B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1660584A FR3058075B1 (fr) 2016-11-02 2016-11-02 Plateau de detourage comportant une piece amovible

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1660584A FR3058075B1 (fr) 2016-11-02 2016-11-02 Plateau de detourage comportant une piece amovible
FR1660584 2016-11-02

Publications (2)

Publication Number Publication Date
FR3058075A1 FR3058075A1 (fr) 2018-05-04
FR3058075B1 true FR3058075B1 (fr) 2019-05-10

Family

ID=57583356

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1660584A Active FR3058075B1 (fr) 2016-11-02 2016-11-02 Plateau de detourage comportant une piece amovible

Country Status (1)

Country Link
FR (1) FR3058075B1 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5184643B2 (ja) * 2008-10-21 2013-04-17 株式会社アルバック マスク及びマスクを用いた成膜方法
JP2014075418A (ja) * 2012-10-03 2014-04-24 Ulvac Japan Ltd 太陽電池用シリコン基板及びその製造方法、並びに太陽電池
WO2015188879A1 (fr) * 2014-06-13 2015-12-17 Applied Materials, Inc. Conception de bord plat assurant une meilleure uniformité et une durée de vie prolongée pour le bord
JP6650407B2 (ja) * 2014-09-30 2020-02-19 株式会社カネカ 太陽電池の製造方法、および太陽電池モジュールの製造方法

Also Published As

Publication number Publication date
FR3058075A1 (fr) 2018-05-04

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