FR3054914B1 - Procede d'inspection optique d'un objet - Google Patents

Procede d'inspection optique d'un objet Download PDF

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Publication number
FR3054914B1
FR3054914B1 FR1657518A FR1657518A FR3054914B1 FR 3054914 B1 FR3054914 B1 FR 3054914B1 FR 1657518 A FR1657518 A FR 1657518A FR 1657518 A FR1657518 A FR 1657518A FR 3054914 B1 FR3054914 B1 FR 3054914B1
Authority
FR
France
Prior art keywords
dimensional image
determining
optical inspection
window
inspection method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1657518A
Other languages
English (en)
Other versions
FR3054914A1 (fr
Inventor
Romain Roux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VIT SAS
Original Assignee
VIT SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VIT SAS filed Critical VIT SAS
Priority to FR1657518A priority Critical patent/FR3054914B1/fr
Priority to US16/322,357 priority patent/US10788434B2/en
Priority to EP17748541.4A priority patent/EP3494386A1/fr
Priority to PCT/FR2017/051923 priority patent/WO2018024957A1/fr
Publication of FR3054914A1 publication Critical patent/FR3054914A1/fr
Application granted granted Critical
Publication of FR3054914B1 publication Critical patent/FR3054914B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G01N2021/8893—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques providing a video image and a processed signal for helping visual decision

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Pathology (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Immunology (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Image Analysis (AREA)

Abstract

L'invention concerne un Procédé d'assistance à l'inspection optique d'un objet comprenant les étapes suivantes : détermination d'une première image tridimensionnelle de l'objet ; détermination d'une première image bidimensionnelle en couleur ou en niveaux de gris de l'objet ; détermination d'au moins une première fenêtre (F1) sur la première image bidimensionnelle entourant un défaut potentiel de l'objet à partir de la première image tridimensionnelle et/ou de la première image bidimensionnelle ; détermination d'une deuxième image bidimensionnelle correspondant a la première image bidimensionnelle en dehors de la première fenêtre et correspondant à une première carte de profondeur de l'objet dans la première fenêtre ; et détermination d'une deuxième image tridimensionnelle (I3D') correspondant à la première image tridimensionnelle sur laquelle est appliquée la deuxième image bidimensionnelle.
FR1657518A 2016-08-03 2016-08-03 Procede d'inspection optique d'un objet Active FR3054914B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR1657518A FR3054914B1 (fr) 2016-08-03 2016-08-03 Procede d'inspection optique d'un objet
US16/322,357 US10788434B2 (en) 2016-08-03 2017-07-12 Method for inspecting an object optically
EP17748541.4A EP3494386A1 (fr) 2016-08-03 2017-07-12 Procede d'inspection optique d'un objet
PCT/FR2017/051923 WO2018024957A1 (fr) 2016-08-03 2017-07-12 Procede d'inspection optique d'un objet

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1657518A FR3054914B1 (fr) 2016-08-03 2016-08-03 Procede d'inspection optique d'un objet
FR1657518 2016-08-03

Publications (2)

Publication Number Publication Date
FR3054914A1 FR3054914A1 (fr) 2018-02-09
FR3054914B1 true FR3054914B1 (fr) 2021-05-21

Family

ID=57045187

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1657518A Active FR3054914B1 (fr) 2016-08-03 2016-08-03 Procede d'inspection optique d'un objet

Country Status (4)

Country Link
US (1) US10788434B2 (fr)
EP (1) EP3494386A1 (fr)
FR (1) FR3054914B1 (fr)
WO (1) WO2018024957A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110334589B (zh) * 2019-05-23 2021-05-14 中国地质大学（武汉） 一种基于空洞卷积的高时序3d神经网络的动作识别方法
CN111854636B (zh) * 2020-07-06 2022-03-15 北京伟景智能科技有限公司 一种多相机阵列三维检测系统和方法
US11407110B2 (en) * 2020-07-17 2022-08-09 Path Robotics, Inc. Real time feedback and dynamic adjustment for welding robots
CN116007526B (zh) * 2023-03-27 2023-06-23 西安航天动力研究所 一种膜片刻痕深度自动测量系统及测量方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5060065A (en) * 1990-02-23 1991-10-22 Cimflex Teknowledge Corporation Apparatus and method for illuminating a printed circuit board for inspection
JP4372709B2 (ja) 2005-03-25 2009-11-25 シーケーディ株式会社 検査装置
FR3004249B1 (fr) * 2013-04-09 2016-01-22 Vit Systeme d'acquisition d'images tridimensionnelles
KR20150017421A (ko) * 2013-07-17 2015-02-17 주식회사 고영테크놀러지 3차원 기판검사장치의 그래픽 유저 인터페이스
KR101457040B1 (ko) * 2013-09-03 2014-10-31 주식회사 고영테크놀러지 3차원 기판검사장치의 그래픽 유저 인터페이스
JP6303867B2 (ja) * 2014-06-27 2018-04-04 オムロン株式会社 基板検査装置及びその制御方法

Also Published As

Publication number Publication date
EP3494386A1 (fr) 2019-06-12
US20190178817A1 (en) 2019-06-13
WO2018024957A1 (fr) 2018-02-08
US10788434B2 (en) 2020-09-29
FR3054914A1 (fr) 2018-02-09

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