FR3051000B1 - Article comportant une couche de nature organique-inorganique de bas indice de refraction obtenue par depot a angle oblique - Google Patents

Article comportant une couche de nature organique-inorganique de bas indice de refraction obtenue par depot a angle oblique Download PDF

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Publication number
FR3051000B1
FR3051000B1 FR1654138A FR1654138A FR3051000B1 FR 3051000 B1 FR3051000 B1 FR 3051000B1 FR 1654138 A FR1654138 A FR 1654138A FR 1654138 A FR1654138 A FR 1654138A FR 3051000 B1 FR3051000 B1 FR 3051000B1
Authority
FR
France
Prior art keywords
article
oblique angle
inorganic coating
refraction index
index obtained
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1654138A
Other languages
English (en)
Other versions
FR3051000A1 (fr
Inventor
William TROTTIER-LAPOINTE
Oleg Zabeida
Ludvik Martinu
Thomas Schmitt
Karin Scherer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ecole Polytechnique de Montreal
EssilorLuxottica SA
Original Assignee
Ecole Polytechnique de Montreal
Essilor International Compagnie Generale dOptique SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ecole Polytechnique de Montreal, Essilor International Compagnie Generale dOptique SA filed Critical Ecole Polytechnique de Montreal
Priority to FR1654138A priority Critical patent/FR3051000B1/fr
Priority to US16/300,319 priority patent/US20190225536A1/en
Priority to EP17727283.8A priority patent/EP3455386A1/fr
Priority to CN201780029077.3A priority patent/CN109219672A/zh
Priority to PCT/FR2017/051103 priority patent/WO2017194871A1/fr
Publication of FR3051000A1 publication Critical patent/FR3051000A1/fr
Application granted granted Critical
Publication of FR3051000B1 publication Critical patent/FR3051000B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/42—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating of an organic material and at least one non-metal coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225—Oblique incidence of vaporised material on substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225—Oblique incidence of vaporised material on substrate
    • C23C14/226—Oblique incidence of vaporised material on substrate in order to form films with columnar structure
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/213—SiO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/151—Deposition methods from the vapour phase by vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Laminated Bodies (AREA)
FR1654138A 2016-05-09 2016-05-09 Article comportant une couche de nature organique-inorganique de bas indice de refraction obtenue par depot a angle oblique Active FR3051000B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR1654138A FR3051000B1 (fr) 2016-05-09 2016-05-09 Article comportant une couche de nature organique-inorganique de bas indice de refraction obtenue par depot a angle oblique
US16/300,319 US20190225536A1 (en) 2016-05-09 2017-05-09 Item Comprising an Organic-Inorganic Layer with Low Refractive Index Obtained by Oblique Angle Deposition
EP17727283.8A EP3455386A1 (fr) 2016-05-09 2017-05-09 Article comportant une couche de nature organique-inorganique de bas indice de réfraction obtenue par dépôt à angle oblique
CN201780029077.3A CN109219672A (zh) 2016-05-09 2017-05-09 通过掠射角沉积获得的具有低折射率的包含有机-无机层的制品
PCT/FR2017/051103 WO2017194871A1 (fr) 2016-05-09 2017-05-09 Article comportant une couche de nature organique-inorganique de bas indice de réfraction obtenue par dépôt à angle oblique

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1654138A FR3051000B1 (fr) 2016-05-09 2016-05-09 Article comportant une couche de nature organique-inorganique de bas indice de refraction obtenue par depot a angle oblique
FR1654138 2016-05-09

Publications (2)

Publication Number Publication Date
FR3051000A1 FR3051000A1 (fr) 2017-11-10
FR3051000B1 true FR3051000B1 (fr) 2018-06-01

Family

ID=56511733

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1654138A Active FR3051000B1 (fr) 2016-05-09 2016-05-09 Article comportant une couche de nature organique-inorganique de bas indice de refraction obtenue par depot a angle oblique

Country Status (5)

Country Link
US (1) US20190225536A1 (fr)
EP (1) EP3455386A1 (fr)
CN (1) CN109219672A (fr)
FR (1) FR3051000B1 (fr)
WO (1) WO2017194871A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3581675A1 (fr) 2018-06-15 2019-12-18 Corporation de L'Ecole Polytechnique de Montreal Article optique doté d'un revêtement de film mince micro ou nanostructuré et son procédé
EP3974179A4 (fr) * 2019-05-22 2023-06-07 Daikin Industries, Ltd. Matériau de base résistant aux taches
FR3128032A1 (fr) * 2021-10-13 2023-04-14 Safran Electronics & Defense Elément optique antireflet
CN114890683B (zh) * 2022-04-28 2023-05-09 浙江合特光电有限公司 高性能防眩光组件及其加工方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2408113C (fr) * 2001-10-25 2005-10-04 Hoya Corporation Element optique a pellicule antireflechissant
EP1324078A3 (fr) * 2001-12-28 2004-01-14 Hoya Corporation Film hybride, Film antiréfléchissant contenant ce film hybride, produits optiques et procédé pour restaurer le pouvoir anticondensation de films hybrides
WO2006006254A1 (fr) * 2004-07-12 2006-01-19 Fujifilm Corporation Film antireflet, plaque de polarisation, et dispositif d’affichage d’image utilisant celui-ci
FR2985255B1 (fr) * 2011-12-28 2015-08-07 Ecole Polytech Article revetu d'un revetement interferentiel ayant des proprietes stables dans le temps.
DE102012205869A1 (de) * 2012-04-11 2013-10-17 Carl Zeiss Jena Gmbh Verfahren zur Herstellung eines reflexionsmindernden Interferenzschichtsystems sowie reflexionsminderndes Interferenzschichtsystem
FR3007024A1 (fr) * 2013-06-14 2014-12-19 Essilor Int Article revetu d'une couche de nature silico-organique ameliorant les performances d'un revetement externe
US10585211B2 (en) * 2014-04-28 2020-03-10 Corporation De L'ecole Polytechnique De Montreal Article having optimised thermomechanical properties, comprising a layer of titano-organic nature

Also Published As

Publication number Publication date
EP3455386A1 (fr) 2019-03-20
FR3051000A1 (fr) 2017-11-10
CN109219672A (zh) 2019-01-15
WO2017194871A1 (fr) 2017-11-16
US20190225536A1 (en) 2019-07-25

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