FR3049946B1 - Procede de fabrication d’une structure micromecanique en carbure de silicium comportant au moins une cavite - Google Patents

Procede de fabrication d’une structure micromecanique en carbure de silicium comportant au moins une cavite Download PDF

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Publication number
FR3049946B1
FR3049946B1 FR1653006A FR1653006A FR3049946B1 FR 3049946 B1 FR3049946 B1 FR 3049946B1 FR 1653006 A FR1653006 A FR 1653006A FR 1653006 A FR1653006 A FR 1653006A FR 3049946 B1 FR3049946 B1 FR 3049946B1
Authority
FR
France
Prior art keywords
cavity
producing
silicon carbide
carbide structure
micromechanical silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1653006A
Other languages
English (en)
Other versions
FR3049946A1 (fr
Inventor
Daniel Alquier
Rami KHAZAKA
Jean Francois Michaud
Marc PORTAIL
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite de Tours
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite Francois Rabelais de Tours
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite Francois Rabelais de Tours filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR1653006A priority Critical patent/FR3049946B1/fr
Priority to US16/091,384 priority patent/US10472230B2/en
Priority to EP17714827.7A priority patent/EP3440012A1/fr
Priority to PCT/EP2017/058222 priority patent/WO2017174709A1/fr
Priority to JP2019503769A priority patent/JP2019513904A/ja
Publication of FR3049946A1 publication Critical patent/FR3049946A1/fr
Application granted granted Critical
Publication of FR3049946B1 publication Critical patent/FR3049946B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00047—Cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/00468—Releasing structures
    • B81C1/00476—Releasing structures removing a sacrificial layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0214—Biosensors; Chemical sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0264—Pressure sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0315—Cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0111—Bulk micromachining
    • B81C2201/0116—Thermal treatment for structural rearrangement of substrate atoms, e.g. for making buried cavities

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
  • Chemical Vapour Deposition (AREA)
FR1653006A 2016-04-06 2016-04-06 Procede de fabrication d’une structure micromecanique en carbure de silicium comportant au moins une cavite Expired - Fee Related FR3049946B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR1653006A FR3049946B1 (fr) 2016-04-06 2016-04-06 Procede de fabrication d’une structure micromecanique en carbure de silicium comportant au moins une cavite
US16/091,384 US10472230B2 (en) 2016-04-06 2017-04-06 Process for fabricating a micromechanical structure made of silicon carbide including at least one cavity
EP17714827.7A EP3440012A1 (fr) 2016-04-06 2017-04-06 Procédé de fabrication d'une structure micromécanique en carbure de silicium comportant au moins une cavité
PCT/EP2017/058222 WO2017174709A1 (fr) 2016-04-06 2017-04-06 Procede de fabrication d'une structure micromecanique en carbure de silicium comportant au moins une cavite
JP2019503769A JP2019513904A (ja) 2016-04-06 2017-04-06 少なくとも１個の空洞を含む炭化ケイ素製のマイクロメカニカル構造を製作するための方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1653006A FR3049946B1 (fr) 2016-04-06 2016-04-06 Procede de fabrication d’une structure micromecanique en carbure de silicium comportant au moins une cavite
FR1653006 2016-04-06

Publications (2)

Publication Number Publication Date
FR3049946A1 FR3049946A1 (fr) 2017-10-13
FR3049946B1 true FR3049946B1 (fr) 2018-04-13

Family

ID=56611336

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1653006A Expired - Fee Related FR3049946B1 (fr) 2016-04-06 2016-04-06 Procede de fabrication d’une structure micromecanique en carbure de silicium comportant au moins une cavite

Country Status (5)

Country Link
US (1) US10472230B2 (fr)
EP (1) EP3440012A1 (fr)
JP (1) JP2019513904A (fr)
FR (1) FR3049946B1 (fr)
WO (1) WO2017174709A1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10114036A1 (de) * 2001-03-22 2002-10-02 Bosch Gmbh Robert Verfahren zur Herstellung von mikromechanischen Sensoren und damit hergestellte Sensoren
FR2913816B1 (fr) * 2007-03-16 2009-06-05 Commissariat Energie Atomique Procede de fabrication d'une structure d'interconnexions a cavites pour circuit integre
DE102008042432A1 (de) * 2008-09-29 2010-04-01 Robert Bosch Gmbh Verfahren zur Herstellung eines Halbleiterbauelements

Also Published As

Publication number Publication date
JP2019513904A (ja) 2019-05-30
WO2017174709A1 (fr) 2017-10-12
FR3049946A1 (fr) 2017-10-13
US10472230B2 (en) 2019-11-12
US20190152772A1 (en) 2019-05-23
EP3440012A1 (fr) 2019-02-13

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