FR3044020B1 - Revetement anti-corrosion a base de nickel et son procede d'obtention - Google Patents

Revetement anti-corrosion a base de nickel et son procede d'obtention Download PDF

Info

Publication number
FR3044020B1
FR3044020B1 FR1561155A FR1561155A FR3044020B1 FR 3044020 B1 FR3044020 B1 FR 3044020B1 FR 1561155 A FR1561155 A FR 1561155A FR 1561155 A FR1561155 A FR 1561155A FR 3044020 B1 FR3044020 B1 FR 3044020B1
Authority
FR
France
Prior art keywords
nickel
substrate
vacuum chamber
based anti
corrosion coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1561155A
Other languages
English (en)
Other versions
FR3044020A1 (fr
Inventor
Pierre-Yves Jouan
Julien Keraudy
Axel FERREC
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite de Nantes
Institut de Recherche Technologique Jules Verne
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite de Nantes
Institut de Recherche Technologique Jules Verne
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite de Nantes, Institut de Recherche Technologique Jules Verne filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR1561155A priority Critical patent/FR3044020B1/fr
Priority to PCT/EP2016/078178 priority patent/WO2017085279A1/fr
Publication of FR3044020A1 publication Critical patent/FR3044020A1/fr
Application granted granted Critical
Publication of FR3044020B1 publication Critical patent/FR3044020B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3485—Sputtering using pulsed power to the target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48—Ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

La présente invention concerne un procédé pour traiter un substrat en surface, ledit procédé comprenant : (i) la fourniture d'au moins une cathode comprenant au moins du Nickel dans une chambre sous vide ; (ii) la disposition d'un substrat dans la chambre sous vide de manière à présenter une surface apte à subir un traitement de surface ; (iii) le traitement de la surface du substrat par exposition d'au moins une partie de la surface à un plasma comprenant au moins des ions de nickel dans ladite chambre sous vide généré par pulvérisation cathodique magnétron en régime d'impulsions de haute puissance (HiPIMS) à la cathode ; et (iv) éventuellement le dépôt au moins de nickel par pulvérisation cathodique magnétron en régime d'impulsions de haute puissance (HiPIMS ou éventuellement en régime continu (DC) sur une partie de la surface du substrat, ledit dépôt formant une ou plusieurs couches continues sur la surface du substrat.
FR1561155A 2015-11-19 2015-11-19 Revetement anti-corrosion a base de nickel et son procede d'obtention Expired - Fee Related FR3044020B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1561155A FR3044020B1 (fr) 2015-11-19 2015-11-19 Revetement anti-corrosion a base de nickel et son procede d'obtention
PCT/EP2016/078178 WO2017085279A1 (fr) 2015-11-19 2016-11-18 Revêtement anti-corrosion à base de nickel et son procédé d'obtention

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1561155A FR3044020B1 (fr) 2015-11-19 2015-11-19 Revetement anti-corrosion a base de nickel et son procede d'obtention

Publications (2)

Publication Number Publication Date
FR3044020A1 FR3044020A1 (fr) 2017-05-26
FR3044020B1 true FR3044020B1 (fr) 2020-09-25

Family

ID=55300556

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1561155A Expired - Fee Related FR3044020B1 (fr) 2015-11-19 2015-11-19 Revetement anti-corrosion a base de nickel et son procede d'obtention

Country Status (2)

Country Link
FR (1) FR3044020B1 (fr)
WO (1) WO2017085279A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110144611B (zh) * 2019-06-10 2021-10-22 河北工业大学 一种镁合金表面耐蚀耐磨复合涂层及其制备方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0608582D0 (en) * 2006-05-02 2006-06-07 Univ Sheffield Hallam High power impulse magnetron sputtering vapour deposition
CN102017254A (zh) * 2008-02-27 2011-04-13 因派科特涂料公司 具有涂层的电极、其制造方法和材料的用途

Also Published As

Publication number Publication date
FR3044020A1 (fr) 2017-05-26
WO2017085279A1 (fr) 2017-05-26

Similar Documents

Publication Publication Date Title
CN103805996B (zh) 一种金属材料表面先镀膜再渗氮的复合处理方法
EP2784799B1 (fr) Revêtements denses et durs de substrats par pulvérisation magnétron pulsé à haute puissance
WO2013045454A3 (fr) Revêtement de substrats par pulvérisation magnétron pulsé de grande puissance
CA2916769C (fr) Couches de tib2 et leur fabrication
EA201170814A1 (ru) Устройство для обработки и/или нанесения покрытия на поверхности компонентов подложки
JP2011516728A5 (fr)
WO2009014394A3 (fr) Procédé de dépôt d'un mince film de céramique par pulvérisation au moyen d'une cible non conductrice
EP2829635B1 (fr) Procédé de production contrôlée de revêtements à base de diffusion au moyen de systèmes à arc cathodique sous vide
RU2009139921A (ru) Способ нанесения износостойких покрытий на лопатки компрессора гтд
RU2660502C1 (ru) Способ нанесения покрытия на поверхность стального изделия
MX2013012200A (es) Metodo de pulverizacion catódica por magnetron de impulso de alta potencia que proporciona la ionizacion mejorada de las particulas obtenidas por pulverización catódica y aparato para su implementacion.
RU2599073C1 (ru) Способ ионно-плазменного нанесения многослойного покрытия на изделия из алюминиевых сплавов
CN103866243A (zh) 一种氮氧钛铝/氮化钛铝/钛铝复合膜的制备方法
FR3044020B1 (fr) Revetement anti-corrosion a base de nickel et son procede d'obtention
RU2013130575A (ru) Способ нанесения защитного покрытия на поверхность стального изделия
CN107675136B (zh) 一种工件表面pvd镀膜的方法
Mello et al. Corrosion effects of plasma immersion ion implantation-enhanced Cr deposition on SAE 1070 carbon steel
CN105624617A (zh) 电弧离子镀制备致密MCrAlRe型涂层的方法
US20200199734A1 (en) Magnesium alloy surface coating method and corrosion-resistant magnesium alloy prepared thereby
RU2541261C2 (ru) Способ формирования нанокомпозитного покрытия на поверхности изделия
RU2009114631A (ru) Способ нанесения металлических покрытий на изделия из керамики
RU2566232C1 (ru) Способ комбинированной ионно-плазменной обработки изделий из алюминиевых сплавов
RU2515714C1 (ru) Способ нанесения нанокомпозитного покрытия на поверхность стального изделия
CN103911591B (zh) 一种高附着力氮氧钛铝/钛铝复合膜的制备方法
KR20110117528A (ko) 알루미늄 박막 코팅 방법

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20170526

PLFP Fee payment

Year of fee payment: 3

PLFP Fee payment

Year of fee payment: 4

PLFP Fee payment

Year of fee payment: 5

PLFP Fee payment

Year of fee payment: 6

ST Notification of lapse

Effective date: 20220705