FR3039318B1 - Procede de controle de cristallisation d’une couche par incorporation d’un element - Google Patents

Procede de controle de cristallisation d’une couche par incorporation d’un element

Info

Publication number
FR3039318B1
FR3039318B1 FR1557117A FR1557117A FR3039318B1 FR 3039318 B1 FR3039318 B1 FR 3039318B1 FR 1557117 A FR1557117 A FR 1557117A FR 1557117 A FR1557117 A FR 1557117A FR 3039318 B1 FR3039318 B1 FR 3039318B1
Authority
FR
France
Prior art keywords
incorporating
layer
controlling crystallization
crystallization
controlling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1557117A
Other languages
English (en)
Other versions
FR3039318A1 (fr
Inventor
Paul Gondcharton
Lamine Benaissa
Bruno Imbert
Guillaume Rodriguez
Chiara Sabbione
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1557117A priority Critical patent/FR3039318B1/fr
Priority to EP16742349.0A priority patent/EP3326197B1/fr
Priority to US15/747,246 priority patent/US10403597B2/en
Priority to PCT/FR2016/051621 priority patent/WO2017017325A1/fr
Publication of FR3039318A1 publication Critical patent/FR3039318A1/fr
Application granted granted Critical
Publication of FR3039318B1 publication Critical patent/FR3039318B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C3/00—Assembling of devices or systems from individually processed components
    • B81C3/001—Bonding of two components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
    • H01L21/2003—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy characterised by the substrate
    • H01L21/2007—Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/27—Manufacturing methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
    • H01L21/02175—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal
    • H01L21/02194—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal the material containing more than one metal element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
    • H01L21/02266—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by physical ablation of a target, e.g. sputtering, reactive sputtering, physical vapour deposition or pulsed laser deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/27—Manufacturing methods
    • H01L2224/274—Manufacturing methods by blanket deposition of the material of the layer connector
    • H01L2224/27444—Manufacturing methods by blanket deposition of the material of the layer connector in gaseous form
    • H01L2224/2745—Physical vapour deposition [PVD], e.g. evaporation, or sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/80001—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected by connecting a bonding area directly to another bonding area, i.e. connectorless bonding, e.g. bumpless bonding
    • H01L2224/808—Bonding techniques
    • H01L2224/80894—Direct bonding, i.e. joining surfaces by means of intermolecular attracting interactions at their interfaces, e.g. covalent bonds, van der Waals forces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/053—Oxides composed of metals from groups of the periodic table
    • H01L2924/0536—6th Group

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
FR1557117A 2015-07-24 2015-07-24 Procede de controle de cristallisation d’une couche par incorporation d’un element Expired - Fee Related FR3039318B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR1557117A FR3039318B1 (fr) 2015-07-24 2015-07-24 Procede de controle de cristallisation d’une couche par incorporation d’un element
EP16742349.0A EP3326197B1 (fr) 2015-07-24 2016-06-29 Procédé de collage direct
US15/747,246 US10403597B2 (en) 2015-07-24 2016-06-29 Direct bonding method
PCT/FR2016/051621 WO2017017325A1 (fr) 2015-07-24 2016-06-29 Procédé de collage direct

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1557117A FR3039318B1 (fr) 2015-07-24 2015-07-24 Procede de controle de cristallisation d’une couche par incorporation d’un element

Publications (2)

Publication Number Publication Date
FR3039318A1 FR3039318A1 (fr) 2017-01-27
FR3039318B1 true FR3039318B1 (fr) 2017-07-21

Family

ID=54356519

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1557117A Expired - Fee Related FR3039318B1 (fr) 2015-07-24 2015-07-24 Procede de controle de cristallisation d’une couche par incorporation d’un element

Country Status (4)

Country Link
US (1) US10403597B2 (fr)
EP (1) EP3326197B1 (fr)
FR (1) FR3039318B1 (fr)
WO (1) WO2017017325A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111362304B (zh) * 2020-04-13 2021-03-09 中国原子能科学研究院 氧同位素靶的制备方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1455848A (fr) 1965-04-01 1966-10-21 Neyrpic Ets Perfectionnements aux dispositifs de réglage de vitesse des coupleurs hydrauliques
FR2872625B1 (fr) * 2004-06-30 2006-09-22 Commissariat Energie Atomique Assemblage par adhesion moleculaire de deux substrats, l'un au moins supportant un film conducteur electrique
KR100997843B1 (ko) * 2008-08-29 2010-12-01 주식회사 솔켐 전기방사법에 의해 제조된 고분자 전해질을 포함한 염료감응형 태양전지 소자 및 이의 제조방법
FR2953328B1 (fr) * 2009-12-01 2012-03-30 S O I Tec Silicon On Insulator Tech Heterostructure pour composants electroniques de puissance, composants optoelectroniques ou photovoltaiques
ITMI20110510A1 (it) * 2011-03-30 2012-10-01 Eni Spa Ossidi misti di metalli di transizione, catalizzatori di idrotrattamento da essi ottenuti, e processo di preparazione
CN109097746A (zh) * 2011-06-30 2018-12-28 唯景公司 溅射靶和溅射方法
FR3006236B1 (fr) * 2013-06-03 2016-07-29 Commissariat Energie Atomique Procede de collage metallique direct
FR3022562B1 (fr) 2014-06-24 2016-07-22 Commissariat Energie Atomique Procede de passivation et procede de collage direct de couches de tungstene

Also Published As

Publication number Publication date
WO2017017325A1 (fr) 2017-02-02
EP3326197A1 (fr) 2018-05-30
EP3326197B1 (fr) 2019-07-24
FR3039318A1 (fr) 2017-01-27
US10403597B2 (en) 2019-09-03
US20180218999A1 (en) 2018-08-02

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