FR3034881B1 - Mise en œuvre de chitosane ou d'alginate en tant que masque de transfert dans des procedes de lithographie et de transfert - Google Patents

Mise en œuvre de chitosane ou d'alginate en tant que masque de transfert dans des procedes de lithographie et de transfert

Info

Publication number
FR3034881B1
FR3034881B1 FR1553072A FR1553072A FR3034881B1 FR 3034881 B1 FR3034881 B1 FR 3034881B1 FR 1553072 A FR1553072 A FR 1553072A FR 1553072 A FR1553072 A FR 1553072A FR 3034881 B1 FR3034881 B1 FR 3034881B1
Authority
FR
France
Prior art keywords
transfer
chitosan
lithography
alginate
implementing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1553072A
Other languages
English (en)
Other versions
FR3034881A1 (fr
Inventor
Yann Chevolot
Thierry Delair
Emmanuelle Laurenceau
Jean-Louis Leclercq
Eliane Souteyrand
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ecole Superieure De Chimie Physique Electroniq Fr
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite Claude Bernard Lyon 1 UCBL
Ecole Centrale de Lyon
Institut National des Sciences Appliquees de Lyon
Universite Jean Monnet Saint Etienne
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite Claude Bernard Lyon 1 UCBL, Ecole Centrale de Lyon, Institut National des Sciences Appliquees de Lyon , Universite Jean Monnet Saint Etienne filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR1553072A priority Critical patent/FR3034881B1/fr
Priority to PCT/FR2016/050795 priority patent/WO2016162638A1/fr
Publication of FR3034881A1 publication Critical patent/FR3034881A1/fr
Application granted granted Critical
Publication of FR3034881B1 publication Critical patent/FR3034881B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • G03F7/2059—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a scanning corpuscular radiation beam, e.g. an electron beam
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/32—Liquid compositions therefor, e.g. developers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Materials For Photolithography (AREA)
FR1553072A 2015-04-09 2015-04-09 Mise en œuvre de chitosane ou d'alginate en tant que masque de transfert dans des procedes de lithographie et de transfert Expired - Fee Related FR3034881B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1553072A FR3034881B1 (fr) 2015-04-09 2015-04-09 Mise en œuvre de chitosane ou d'alginate en tant que masque de transfert dans des procedes de lithographie et de transfert
PCT/FR2016/050795 WO2016162638A1 (fr) 2015-04-09 2016-04-07 Mise en œuvre de chitosane ou d'alginate en tant que masque de transfert dans des procédés de lithographie et de transfert

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1553072A FR3034881B1 (fr) 2015-04-09 2015-04-09 Mise en œuvre de chitosane ou d'alginate en tant que masque de transfert dans des procedes de lithographie et de transfert

Publications (2)

Publication Number Publication Date
FR3034881A1 FR3034881A1 (fr) 2016-10-14
FR3034881B1 true FR3034881B1 (fr) 2017-05-05

Family

ID=53200204

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1553072A Expired - Fee Related FR3034881B1 (fr) 2015-04-09 2015-04-09 Mise en œuvre de chitosane ou d'alginate en tant que masque de transfert dans des procedes de lithographie et de transfert

Country Status (2)

Country Link
FR (1) FR3034881B1 (fr)
WO (1) WO2016162638A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2738112C1 (ru) * 2019-11-15 2020-12-08 Автономная некоммерческая образовательная организация высшего образования «Сколковский институт науки и технологий» Применение соединения полисахарида в литографии

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3985915A (en) * 1974-12-20 1976-10-12 International Business Machines Corporation Use of nitrocellulose containing 10.5 to 12% nitrogen as electron beam positive resists
TW574628B (en) * 1996-12-10 2004-02-01 Morton Int Inc High resolution positive acting dry film photoresist
JP2002169291A (ja) * 2000-12-04 2002-06-14 Canon Inc 感光性樹脂組成物、レジスト組成物、パターン形成方法およびデバイス
US9760009B2 (en) * 2011-05-13 2017-09-12 Clarkson University Cross-linked polymer based hydrogel material compositions, methods and applications

Also Published As

Publication number Publication date
WO2016162638A1 (fr) 2016-10-13
FR3034881A1 (fr) 2016-10-14

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