FR3026890B1 - Procede de controle de la fermeture de cavite par depot non conforme d'une couche - Google Patents

Procede de controle de la fermeture de cavite par depot non conforme d'une couche

Info

Publication number
FR3026890B1
FR3026890B1 FR1459507A FR1459507A FR3026890B1 FR 3026890 B1 FR3026890 B1 FR 3026890B1 FR 1459507 A FR1459507 A FR 1459507A FR 1459507 A FR1459507 A FR 1459507A FR 3026890 B1 FR3026890 B1 FR 3026890B1
Authority
FR
France
Prior art keywords
cavity
layer
controlling closure
conforming deposition
conforming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1459507A
Other languages
English (en)
Other versions
FR3026890A1 (fr
Inventor
Emmanuel Rolland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1459507A priority Critical patent/FR3026890B1/fr
Priority to US15/514,993 priority patent/US20170241032A1/en
Priority to EP15771624.2A priority patent/EP3201120A1/fr
Priority to PCT/EP2015/072735 priority patent/WO2016050932A1/fr
Publication of FR3026890A1 publication Critical patent/FR3026890A1/fr
Application granted granted Critical
Publication of FR3026890B1 publication Critical patent/FR3026890B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • C25D5/022—Electroplating of selected surface areas using masking means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • B23P15/26—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass heat exchangers or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00055—Grooves
    • B81C1/00071—Channels
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/48—After-treatment of electroplated surfaces
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/12—Semiconductors
    • C25D7/123—Semiconductors first coated with a seed layer or a conductive layer
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
    • F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
    • H01L21/46—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
    • H01L21/461—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/469—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After-treatment of these layers
    • H01L21/471—Inorganic layers
    • H01L21/473—Inorganic layers composed of oxides or glassy oxides or oxide based glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2220/00—Closure means, e.g. end caps on header boxes or plugs on conduits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mechanical Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Micromachines (AREA)
  • Thin Film Transistor (AREA)
FR1459507A 2014-10-03 2014-10-03 Procede de controle de la fermeture de cavite par depot non conforme d'une couche Active FR3026890B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR1459507A FR3026890B1 (fr) 2014-10-03 2014-10-03 Procede de controle de la fermeture de cavite par depot non conforme d'une couche
US15/514,993 US20170241032A1 (en) 2014-10-03 2015-10-01 Method for controlling cavity closure by non-conformal deposition of a layer
EP15771624.2A EP3201120A1 (fr) 2014-10-03 2015-10-01 Procede de controle de la fermeture de cavite par depot non conforme d'une couche
PCT/EP2015/072735 WO2016050932A1 (fr) 2014-10-03 2015-10-01 Procede de controle de la fermeture de cavite par depot non conforme d'une couche

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1459507A FR3026890B1 (fr) 2014-10-03 2014-10-03 Procede de controle de la fermeture de cavite par depot non conforme d'une couche

Publications (2)

Publication Number Publication Date
FR3026890A1 FR3026890A1 (fr) 2016-04-08
FR3026890B1 true FR3026890B1 (fr) 2017-12-22

Family

ID=52474011

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1459507A Active FR3026890B1 (fr) 2014-10-03 2014-10-03 Procede de controle de la fermeture de cavite par depot non conforme d'une couche

Country Status (4)

Country Link
US (1) US20170241032A1 (fr)
EP (1) EP3201120A1 (fr)
FR (1) FR3026890B1 (fr)
WO (1) WO2016050932A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3088999B1 (fr) * 2018-11-26 2020-12-11 Stiral Procédé de fabrication d’un échangeur thermique ou d’un caloduc

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3686081A (en) * 1969-01-31 1972-08-22 Messerschmitt Boelkow Blohm Method for incorporating strength increasing filler materials in a matrix
US6031286A (en) * 1997-02-28 2000-02-29 International Business Machines Corporation Semiconductor structures containing a micro pipe system therein
EP1132500A3 (fr) * 2000-03-08 2002-01-23 Applied Materials, Inc. Procédé pour le dépôt électrochimique de métal en utilisant de formes d'onde modulées
US7229909B2 (en) * 2004-12-09 2007-06-12 International Business Machines Corporation Integrated circuit chip utilizing dielectric layer having oriented cylindrical voids formed from carbon nanotubes
US8262916B1 (en) * 2009-06-30 2012-09-11 Microfabrica Inc. Enhanced methods for at least partial in situ release of sacrificial material from cavities or channels and/or sealing of etching holes during fabrication of multi-layer microscale or millimeter-scale complex three-dimensional structures
US9422154B2 (en) * 2010-11-02 2016-08-23 International Business Machines Corporation Feedback control of dimensions in nanopore and nanofluidic devices

Also Published As

Publication number Publication date
WO2016050932A1 (fr) 2016-04-07
EP3201120A1 (fr) 2017-08-09
FR3026890A1 (fr) 2016-04-08
US20170241032A1 (en) 2017-08-24

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