FR3022628B1 - Element sensible, procede pour realiser un tel element sensible, capteur et procede de mesure de temperature et/ou de pression mettant en œuvre un tel element sensible - Google Patents

Element sensible, procede pour realiser un tel element sensible, capteur et procede de mesure de temperature et/ou de pression mettant en œuvre un tel element sensible Download PDF

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Publication number
FR3022628B1
FR3022628B1 FR1455623A FR1455623A FR3022628B1 FR 3022628 B1 FR3022628 B1 FR 3022628B1 FR 1455623 A FR1455623 A FR 1455623A FR 1455623 A FR1455623 A FR 1455623A FR 3022628 B1 FR3022628 B1 FR 3022628B1
Authority
FR
France
Prior art keywords
sensitive element
sensitive
sensor
pressure
making
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1455623A
Other languages
English (en)
Other versions
FR3022628A1 (fr
Inventor
Philippe Lecoeur
Elie Lefeuvre
Guillaume Agnus
Bertrand Vilquin
Elisabeth Dufour-Gergam
David Le Bourdais
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite Paris Saclay
Original Assignee
Universite Paris Sud Paris 11
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universite Paris Sud Paris 11 filed Critical Universite Paris Sud Paris 11
Priority to FR1455623A priority Critical patent/FR3022628B1/fr
Publication of FR3022628A1 publication Critical patent/FR3022628A1/fr
Application granted granted Critical
Publication of FR3022628B1 publication Critical patent/FR3022628B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • G01K7/186—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer using microstructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/22—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor
    • G01K7/226—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor using microstructures, e.g. silicon spreading resistance
FR1455623A 2014-06-19 2014-06-19 Element sensible, procede pour realiser un tel element sensible, capteur et procede de mesure de temperature et/ou de pression mettant en œuvre un tel element sensible Expired - Fee Related FR3022628B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1455623A FR3022628B1 (fr) 2014-06-19 2014-06-19 Element sensible, procede pour realiser un tel element sensible, capteur et procede de mesure de temperature et/ou de pression mettant en œuvre un tel element sensible

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1455623A FR3022628B1 (fr) 2014-06-19 2014-06-19 Element sensible, procede pour realiser un tel element sensible, capteur et procede de mesure de temperature et/ou de pression mettant en œuvre un tel element sensible
FR1455623 2014-06-19

Publications (2)

Publication Number Publication Date
FR3022628A1 FR3022628A1 (fr) 2015-12-25
FR3022628B1 true FR3022628B1 (fr) 2018-11-09

Family

ID=51987189

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1455623A Expired - Fee Related FR3022628B1 (fr) 2014-06-19 2014-06-19 Element sensible, procede pour realiser un tel element sensible, capteur et procede de mesure de temperature et/ou de pression mettant en œuvre un tel element sensible

Country Status (1)

Country Link
FR (1) FR3022628B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110455317A (zh) * 2019-07-05 2019-11-15 华南师范大学 一种耐高温柔性传感器及其制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE701478C (de) * 1937-09-22 1941-01-17 Patra Patent Treuhand Elektrisches Messgeraet fuer niedrige Gas- oder Dampfdrucke
EP2075557B1 (fr) * 2007-12-26 2013-02-27 NGK Spark Plug Co., Ltd. Capteur de température et son procédé de fabrication
KR102063563B1 (ko) * 2011-03-30 2020-02-11 엠바츄어 인크. 극히 낮은 저항 물질로 형성된 전기, 기계, 컴퓨팅, 및/또는 다른 디바이스
EP2637007B1 (fr) * 2012-03-08 2020-01-22 ams international AG Capteur de pression capacitif MEMS

Also Published As

Publication number Publication date
FR3022628A1 (fr) 2015-12-25

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Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20151225

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TP Transmission of property

Owner name: UNIVERSITE PARIS-SACLAY, FR

Effective date: 20220117

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Effective date: 20230205