FR3002812B1 - Procede de transfert de couche - Google Patents

Procede de transfert de couche

Info

Publication number
FR3002812B1
FR3002812B1 FR1351846A FR1351846A FR3002812B1 FR 3002812 B1 FR3002812 B1 FR 3002812B1 FR 1351846 A FR1351846 A FR 1351846A FR 1351846 A FR1351846 A FR 1351846A FR 3002812 B1 FR3002812 B1 FR 3002812B1
Authority
FR
France
Prior art keywords
transfer method
layer transfer
layer
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1351846A
Other languages
English (en)
Other versions
FR3002812A1 (fr
Inventor
Aomar Halimaoui
Edrisse Arbaoui
Vincent Larrey
Christophe Morales
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics Crolles 2 SAS
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
STMicroelectronics Crolles 2 SAS
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, STMicroelectronics Crolles 2 SAS, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1351846A priority Critical patent/FR3002812B1/fr
Publication of FR3002812A1 publication Critical patent/FR3002812A1/fr
Application granted granted Critical
Publication of FR3002812B1 publication Critical patent/FR3002812B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76259—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along a porous layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Recrystallisation Techniques (AREA)
FR1351846A 2013-03-01 2013-03-01 Procede de transfert de couche Expired - Fee Related FR3002812B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1351846A FR3002812B1 (fr) 2013-03-01 2013-03-01 Procede de transfert de couche

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1351846A FR3002812B1 (fr) 2013-03-01 2013-03-01 Procede de transfert de couche

Publications (2)

Publication Number Publication Date
FR3002812A1 FR3002812A1 (fr) 2014-09-05
FR3002812B1 true FR3002812B1 (fr) 2016-08-05

Family

ID=48856749

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1351846A Expired - Fee Related FR3002812B1 (fr) 2013-03-01 2013-03-01 Procede de transfert de couche

Country Status (1)

Country Link
FR (1) FR3002812B1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10903263B2 (en) 2016-10-10 2021-01-26 Soitec Front-side type image sensor and method for manufacturing such a sensor
US11742215B2 (en) 2020-07-29 2023-08-29 Infineon Technologies Ag Methods for forming a semiconductor device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3040108B1 (fr) * 2015-08-12 2017-08-11 Commissariat Energie Atomique Procede de fabrication d'une structure semi-conductrice avec collage direct temporaire exploitant une couche poreuse

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030087503A1 (en) * 1994-03-10 2003-05-08 Canon Kabushiki Kaisha Process for production of semiconductor substrate
EP0989593A3 (fr) * 1998-09-25 2002-01-02 Canon Kabushiki Kaisha Dispositif et procédé de séparation de substrat, et procédé de fabrication de susbtrat
US20050082526A1 (en) * 2003-10-15 2005-04-21 International Business Machines Corporation Techniques for layer transfer processing
FR2977075A1 (fr) * 2011-06-23 2012-12-28 Soitec Silicon On Insulator Procede de fabrication d'un substrat semi-conducteur, et substrat semi-conducteur

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10903263B2 (en) 2016-10-10 2021-01-26 Soitec Front-side type image sensor and method for manufacturing such a sensor
US11552123B2 (en) 2016-10-10 2023-01-10 Soitec Front-side type image sensors
US11742215B2 (en) 2020-07-29 2023-08-29 Infineon Technologies Ag Methods for forming a semiconductor device

Also Published As

Publication number Publication date
FR3002812A1 (fr) 2014-09-05

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Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 4

ST Notification of lapse

Effective date: 20171130