FR2994263B1 - Procede et dispositif d'identification de materiaux dans une scene - Google Patents

Procede et dispositif d'identification de materiaux dans une scene

Info

Publication number
FR2994263B1
FR2994263B1 FR1257518A FR1257518A FR2994263B1 FR 2994263 B1 FR2994263 B1 FR 2994263B1 FR 1257518 A FR1257518 A FR 1257518A FR 1257518 A FR1257518 A FR 1257518A FR 2994263 B1 FR2994263 B1 FR 2994263B1
Authority
FR
France
Prior art keywords
scene
identifying materials
identifying
materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1257518A
Other languages
English (en)
Other versions
FR2994263A1 (fr
Inventor
Romain Roux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VIT SAS
Original Assignee
VIT SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VIT SAS filed Critical VIT SAS
Priority to FR1257518A priority Critical patent/FR2994263B1/fr
Priority to CN201380051800.XA priority patent/CN104704346A/zh
Priority to KR20157003764A priority patent/KR20150036575A/ko
Priority to PCT/FR2013/051875 priority patent/WO2014020289A1/fr
Priority to US14/418,172 priority patent/US20150212009A1/en
Priority to EP13756656.8A priority patent/EP2880421A1/fr
Publication of FR2994263A1 publication Critical patent/FR2994263A1/fr
Application granted granted Critical
Publication of FR2994263B1 publication Critical patent/FR2994263B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1734—Sequential different kinds of measurements; Combining two or more methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/9563—Inspecting patterns on the surface of objects and suppressing pattern images
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR1257518A 2012-08-02 2012-08-02 Procede et dispositif d'identification de materiaux dans une scene Active FR2994263B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR1257518A FR2994263B1 (fr) 2012-08-02 2012-08-02 Procede et dispositif d'identification de materiaux dans une scene
CN201380051800.XA CN104704346A (zh) 2012-08-02 2013-08-02 用于识别场景中的材料的方法和装置
KR20157003764A KR20150036575A (ko) 2012-08-02 2013-08-02 장면에서 재료들을 식별하기 위한 방법 및 디바이스
PCT/FR2013/051875 WO2014020289A1 (fr) 2012-08-02 2013-08-02 Procede et dispositif d'identification de materiaux dans une scene
US14/418,172 US20150212009A1 (en) 2012-08-02 2013-08-02 Method and device for identifying materials in a scene
EP13756656.8A EP2880421A1 (fr) 2012-08-02 2013-08-02 Procede et dispositif d'identification de materiaux dans une scene

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1257518A FR2994263B1 (fr) 2012-08-02 2012-08-02 Procede et dispositif d'identification de materiaux dans une scene

Publications (2)

Publication Number Publication Date
FR2994263A1 FR2994263A1 (fr) 2014-02-07
FR2994263B1 true FR2994263B1 (fr) 2018-09-07

Family

ID=47714174

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1257518A Active FR2994263B1 (fr) 2012-08-02 2012-08-02 Procede et dispositif d'identification de materiaux dans une scene

Country Status (6)

Country Link
US (1) US20150212009A1 (fr)
EP (1) EP2880421A1 (fr)
KR (1) KR20150036575A (fr)
CN (1) CN104704346A (fr)
FR (1) FR2994263B1 (fr)
WO (1) WO2014020289A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106018434B (zh) * 2016-07-06 2018-12-28 康代影像科技(苏州)有限公司 一种光学检测设备
JP6617124B2 (ja) * 2017-07-20 2019-12-11 セコム株式会社 物体検出装置
CN109752319A (zh) * 2017-11-01 2019-05-14 青岛海尔智能技术研发有限公司 一种识别衣物材质的光学方法及装置

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3748484A (en) * 1969-12-31 1973-07-24 Texas Instruments Inc Object identification by emission polarization
FI63835C (fi) * 1981-02-10 1983-08-10 Altim Control Ky Foerfarande foer identifiering av ett virkes ytegenskaper
US4648053A (en) * 1984-10-30 1987-03-03 Kollmorgen Technologies, Corp. High speed optical inspection system
US5138162A (en) * 1988-12-16 1992-08-11 The United States Of America As Represented By The Secretary Of The Army Method and apparatus for producing enhanced images of curved thermal objects
JPH02220242A (ja) * 1989-02-21 1990-09-03 Olympus Optical Co Ltd 光ディスク用基板の屈折率の検出方法
JPH0518889A (ja) * 1991-07-15 1993-01-26 Mitsubishi Electric Corp 異物検査方法およびその装置
US5798830A (en) * 1993-06-17 1998-08-25 Ultrapointe Corporation Method of establishing thresholds for image comparison
US5611000A (en) * 1994-02-22 1997-03-11 Digital Equipment Corporation Spline-based image registration
IL125659A (en) * 1998-08-05 2002-09-12 Cadent Ltd Method and device for three-dimensional simulation of a structure
US6662116B2 (en) * 2001-11-30 2003-12-09 Exxonmobile Research And Engineering Company Method for analyzing an unknown material as a blend of known materials calculated so as to match certain analytical data and predicting properties of the unknown based on the calculated blend
WO2004097383A1 (fr) * 2003-04-29 2004-11-11 Surfoptic Limited Mesure d'une caracteristique de surface
US7092082B1 (en) * 2003-11-26 2006-08-15 Kla-Tencor Technologies Corp. Method and apparatus for inspecting a semiconductor wafer
US8182099B2 (en) * 2005-12-21 2012-05-22 International Business Machines Corporation Noise immune optical encoder for high ambient light projection imaging systems
US7710572B2 (en) * 2006-11-30 2010-05-04 Asml Netherlands B.V. Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
FR2945348B1 (fr) * 2009-05-07 2011-05-13 Thales Sa Procede d'identification d'une scene a partir d'images polarisees multi longueurs d'onde
JP5538862B2 (ja) * 2009-12-18 2014-07-02 キヤノン株式会社 画像処理装置、画像処理システム、画像処理方法、及びプログラム
CN103026191B (zh) * 2010-07-21 2015-08-19 第一太阳能有限公司 温度调整光谱仪
FR2963093B1 (fr) * 2010-07-26 2012-08-03 Vit Installation d'inspection optique 3d de circuits electroniques
DE102010046438A1 (de) * 2010-09-24 2012-03-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zur optischen Charakterisierung von Materialien
US8845107B1 (en) * 2010-12-23 2014-09-30 Rawles Llc Characterization of a scene with structured light
US9104120B2 (en) * 2011-02-10 2015-08-11 Kla-Tencor Corporation Structured illumination for contrast enhancement in overlay metrology
US8638989B2 (en) * 2012-01-17 2014-01-28 Leap Motion, Inc. Systems and methods for capturing motion in three-dimensional space

Also Published As

Publication number Publication date
FR2994263A1 (fr) 2014-02-07
CN104704346A (zh) 2015-06-10
EP2880421A1 (fr) 2015-06-10
KR20150036575A (ko) 2015-04-07
US20150212009A1 (en) 2015-07-30
WO2014020289A1 (fr) 2014-02-06

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