FR2993392B1 - Procede de fabrication de source d'ions - Google Patents

Procede de fabrication de source d'ions

Info

Publication number
FR2993392B1
FR2993392B1 FR1256764A FR1256764A FR2993392B1 FR 2993392 B1 FR2993392 B1 FR 2993392B1 FR 1256764 A FR1256764 A FR 1256764A FR 1256764 A FR1256764 A FR 1256764A FR 2993392 B1 FR2993392 B1 FR 2993392B1
Authority
FR
France
Prior art keywords
ion source
manufacturing ion
manufacturing
source
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1256764A
Other languages
English (en)
Other versions
FR2993392A1 (fr
Inventor
Jacques Gierak
Klaus Hasselbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR1256764A priority Critical patent/FR2993392B1/fr
Publication of FR2993392A1 publication Critical patent/FR2993392A1/fr
Application granted granted Critical
Publication of FR2993392B1 publication Critical patent/FR2993392B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0805—Liquid metal sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0807—Gas field ion sources [GFIS]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
FR1256764A 2012-07-13 2012-07-13 Procede de fabrication de source d'ions Active FR2993392B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1256764A FR2993392B1 (fr) 2012-07-13 2012-07-13 Procede de fabrication de source d'ions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1256764A FR2993392B1 (fr) 2012-07-13 2012-07-13 Procede de fabrication de source d'ions

Publications (2)

Publication Number Publication Date
FR2993392A1 FR2993392A1 (fr) 2014-01-17
FR2993392B1 true FR2993392B1 (fr) 2016-03-11

Family

ID=46963894

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1256764A Active FR2993392B1 (fr) 2012-07-13 2012-07-13 Procede de fabrication de source d'ions

Country Status (1)

Country Link
FR (1) FR2993392B1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58135557A (ja) * 1982-02-04 1983-08-12 Jeol Ltd イオンビ−ム発生方法及び装置
JPH01296552A (ja) * 1988-05-24 1989-11-29 Hitachi Ltd イオンおよび電子ビーム複合装置
US8080930B2 (en) * 2006-09-07 2011-12-20 Michigan Technological University Self-regenerating nanotips for low-power electric propulsion (EP) cathodes

Also Published As

Publication number Publication date
FR2993392A1 (fr) 2014-01-17

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