FR2968123B1 - Procédé de fabrication de films minces supportes - Google Patents
Procédé de fabrication de films minces supportesInfo
- Publication number
- FR2968123B1 FR2968123B1 FR1059948A FR1059948A FR2968123B1 FR 2968123 B1 FR2968123 B1 FR 2968123B1 FR 1059948 A FR1059948 A FR 1059948A FR 1059948 A FR1059948 A FR 1059948A FR 2968123 B1 FR2968123 B1 FR 2968123B1
- Authority
- FR
- France
- Prior art keywords
- thin films
- supported thin
- manufacturing supported
- manufacturing
- films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/185—Joining of semiconductor bodies for junction formation
- H01L21/187—Joining of semiconductor bodies for junction formation by direct bonding
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1059948A FR2968123B1 (fr) | 2010-11-30 | 2010-11-30 | Procédé de fabrication de films minces supportes |
| PCT/EP2011/071429 WO2012072702A1 (fr) | 2010-11-30 | 2011-11-30 | Procédé de fabrication de films minces supportés |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1059948A FR2968123B1 (fr) | 2010-11-30 | 2010-11-30 | Procédé de fabrication de films minces supportes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2968123A1 FR2968123A1 (fr) | 2012-06-01 |
| FR2968123B1 true FR2968123B1 (fr) | 2013-01-11 |
Family
ID=43858233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR1059948A Expired - Fee Related FR2968123B1 (fr) | 2010-11-30 | 2010-11-30 | Procédé de fabrication de films minces supportes |
Country Status (2)
| Country | Link |
|---|---|
| FR (1) | FR2968123B1 (fr) |
| WO (1) | WO2012072702A1 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110085736A (zh) * | 2019-04-28 | 2019-08-02 | 厦门市三安集成电路有限公司 | 一种薄膜单晶压电材料复合基板的制造方法和应用 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005046057A1 (de) * | 2005-09-27 | 2007-03-29 | Robert Bosch Gmbh | Verfahren zum Erzeugen einer im wesentlichen einkristallinen Struktur auf einem Fremdsubstratelement sowie zugehöriges Bauelement |
| FR2935536B1 (fr) * | 2008-09-02 | 2010-09-24 | Soitec Silicon On Insulator | Procede de detourage progressif |
-
2010
- 2010-11-30 FR FR1059948A patent/FR2968123B1/fr not_active Expired - Fee Related
-
2011
- 2011-11-30 WO PCT/EP2011/071429 patent/WO2012072702A1/fr active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2012072702A1 (fr) | 2012-06-07 |
| FR2968123A1 (fr) | 2012-06-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |
Effective date: 20140731 |