FR2959816B1 - Procede et dispositif de controle de pieces par interferometrie a retroinjection optique. - Google Patents

Procede et dispositif de controle de pieces par interferometrie a retroinjection optique.

Info

Publication number
FR2959816B1
FR2959816B1 FR1053461A FR1053461A FR2959816B1 FR 2959816 B1 FR2959816 B1 FR 2959816B1 FR 1053461 A FR1053461 A FR 1053461A FR 1053461 A FR1053461 A FR 1053461A FR 2959816 B1 FR2959816 B1 FR 2959816B1
Authority
FR
France
Prior art keywords
retroinjection
interferometry
optical
controlling parts
controlling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1053461A
Other languages
English (en)
Other versions
FR2959816A1 (fr
Inventor
Smet Marie-Anne De
Julien Charles
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airbus Operations SAS
Original Assignee
Airbus Operations SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Airbus Operations SAS filed Critical Airbus Operations SAS
Priority to FR1053461A priority Critical patent/FR2959816B1/fr
Publication of FR2959816A1 publication Critical patent/FR2959816A1/fr
Application granted granted Critical
Publication of FR2959816B1 publication Critical patent/FR2959816B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02092—Self-mixing interferometers, i.e. feedback of light from object into laser cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
FR1053461A 2010-05-04 2010-05-04 Procede et dispositif de controle de pieces par interferometrie a retroinjection optique. Expired - Fee Related FR2959816B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1053461A FR2959816B1 (fr) 2010-05-04 2010-05-04 Procede et dispositif de controle de pieces par interferometrie a retroinjection optique.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1053461A FR2959816B1 (fr) 2010-05-04 2010-05-04 Procede et dispositif de controle de pieces par interferometrie a retroinjection optique.

Publications (2)

Publication Number Publication Date
FR2959816A1 FR2959816A1 (fr) 2011-11-11
FR2959816B1 true FR2959816B1 (fr) 2012-07-27

Family

ID=42942069

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1053461A Expired - Fee Related FR2959816B1 (fr) 2010-05-04 2010-05-04 Procede et dispositif de controle de pieces par interferometrie a retroinjection optique.

Country Status (1)

Country Link
FR (1) FR2959816B1 (fr)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1166914C (zh) * 2002-05-31 2004-09-15 清华大学 频率分裂氦-氖激光回馈自混合非接触测微仪

Also Published As

Publication number Publication date
FR2959816A1 (fr) 2011-11-11

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