FR2953024B1 - Procede d'equilibrage d'un capteur d'acceleration et capteur ainsi equilibre - Google Patents

Procede d'equilibrage d'un capteur d'acceleration et capteur ainsi equilibre Download PDF

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Publication number
FR2953024B1
FR2953024B1 FR1059592A FR1059592A FR2953024B1 FR 2953024 B1 FR2953024 B1 FR 2953024B1 FR 1059592 A FR1059592 A FR 1059592A FR 1059592 A FR1059592 A FR 1059592A FR 2953024 B1 FR2953024 B1 FR 2953024B1
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sensor
balancing
electrodes
acceleration sensor
balanced
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FR2953024A1 (fr
Inventor
Torsten Ohms
Axel Franke
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Robert Bosch GmbH
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Robert Bosch GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

Procédé d'équilibrage d'un capteur d'accélération (11) comportant un substrat (12) et une masse sismique (13), le capteur d'accélération (11) ayant une première et une autre première électrode (1, 1') fixées sur un premier côté (10 du substrat (12), entre la première et l'autre première électrode (1, 1'), il y a des contre-électrodes (14) de la masse sismique (13), le capteur d'accélération (11) comporte d'un côté (20), d'autres secondes électrodes (2') et sur un quatrième côté (40) en regard du second côté (20), d'autres quatrièmes électrodes (20). Dans une première étape, on applique une première tension d'excitation pour exciter une première excursion de la masse sismique (3) dans une première direction (110), cette première tension étant pratiquement identique, dans une seconde étape, on compense le premier débattement en appliquant une première tension de compensation aux autres secondes et autres quatrièmes électrodes (2', 4').
FR1059592A 2009-11-23 2010-11-22 Procede d'equilibrage d'un capteur d'acceleration et capteur ainsi equilibre Active FR2953024B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009047018.2A DE102009047018B4 (de) 2009-11-23 2009-11-23 Verfahren zum Abgleich eines Beschleunigungssensors und Beschleunigungssensor

Publications (2)

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FR2953024A1 FR2953024A1 (fr) 2011-05-27
FR2953024B1 true FR2953024B1 (fr) 2020-09-25

Family

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FR1059592A Active FR2953024B1 (fr) 2009-11-23 2010-11-22 Procede d'equilibrage d'un capteur d'acceleration et capteur ainsi equilibre

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Country Link
US (1) US8381570B2 (fr)
CN (1) CN102095894B (fr)
DE (1) DE102009047018B4 (fr)
FR (1) FR2953024B1 (fr)
IT (1) IT1402564B1 (fr)
TW (1) TWI475232B (fr)

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DE102010029645B4 (de) * 2010-06-02 2018-03-29 Robert Bosch Gmbh Mikromechanisches Bauelement mit einer Teststruktur zur Bestimmung der Schichtdicke einer Abstandsschicht und Verfahren zum Herstellen einer solchen Teststruktur
US9403671B2 (en) 2011-06-30 2016-08-02 Hewlett-Packard Development Company, L.P. Calibration of MEMS sensor
DE102011121822A1 (de) * 2011-12-21 2013-06-27 Wabco Gmbh Verfahren und Einrichtung zum Bestimmen der Einbaulage eines Sensormoduls in einem Fahrzeug sowie Fahrzeug mit einer derartigen Einrichtung
DE102012212093A1 (de) * 2012-07-11 2014-06-05 Robert Bosch Gmbh Kalibriervorrichtung, sensor und verfahren
US9096419B2 (en) * 2012-10-01 2015-08-04 Qualcomm Mems Technologies, Inc. Electromechanical systems device with protrusions to provide additional stable states
US9702897B2 (en) * 2012-10-08 2017-07-11 Northrop Grumman Systems Corporation Dynamic self-calibration of an accelerometer system
FR3002324B1 (fr) * 2013-02-19 2016-01-22 Sagem Defense Securite Capteur a accelerometre pendulaire electrostatique et procede de commande d'un tel capteur
DE102015000158A1 (de) * 2015-01-05 2016-07-07 Northrop Grumman Litef Gmbh Beschleunigungssensor mit reduziertem Bias und Herstellungsverfahren eines Beschleunigungssensors
DE102016203153A1 (de) * 2016-02-29 2017-08-31 Robert Bosch Gmbh Verfahren zum Betreiben eines mikromechanischen z-Beschleunigungssensors
CN110435821B (zh) * 2019-08-15 2021-03-12 青岛海研电子有限公司 一种波浪浮标振动补偿装置
CN113702665B (zh) * 2021-10-27 2022-02-11 杭州麦新敏微科技有限责任公司 一种mems加速度计及其形成方法

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US5249465A (en) 1990-12-11 1993-10-05 Motorola, Inc. Accelerometer utilizing an annular mass
US5278634A (en) * 1991-02-22 1994-01-11 Cyberoptics Corporation High precision component alignment sensor system
JP3385688B2 (ja) * 1993-12-13 2003-03-10 株式会社デンソー 半導体ヨーレートセンサおよびその製造方法
DE4431338C2 (de) * 1994-09-02 2003-07-31 Bosch Gmbh Robert Beschleunigungssensor
DE4432837B4 (de) * 1994-09-15 2004-05-13 Robert Bosch Gmbh Beschleunigungssensor und Meßverfahren
US5880369A (en) * 1996-03-15 1999-03-09 Analog Devices, Inc. Micromachined device with enhanced dimensional control
JP3603501B2 (ja) * 1996-09-25 2004-12-22 株式会社村田製作所 角速度検出装置
JP3666370B2 (ja) * 2000-07-06 2005-06-29 株式会社村田製作所 外力検知センサ
US6536280B1 (en) * 2000-09-12 2003-03-25 Ic Mechanics, Inc. Thin film MEMS sensors employing electrical sensing and force feedback
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CN1219289C (zh) * 2002-01-17 2005-09-14 财团法人工业技术研究院 光学头物镜速度感测器的校准方法
US6810738B2 (en) * 2002-07-10 2004-11-02 Hitachi Metals, Ltd. Acceleration measuring apparatus with calibration function
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US7134336B2 (en) * 2004-03-19 2006-11-14 Denso Corporation Vibration type angular velocity sensor
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Also Published As

Publication number Publication date
TWI475232B (zh) 2015-03-01
US8381570B2 (en) 2013-02-26
ITMI20102075A1 (it) 2011-05-24
CN102095894A (zh) 2011-06-15
TW201140062A (en) 2011-11-16
DE102009047018A1 (de) 2011-05-26
IT1402564B1 (it) 2013-09-13
US20110120208A1 (en) 2011-05-26
CN102095894B (zh) 2015-05-06
DE102009047018B4 (de) 2023-02-09
FR2953024A1 (fr) 2011-05-27

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