FR2934058B1 - Dispositif de projection interferometrique a trois ouvertures pour produire une tache constituee de structures fines - Google Patents

Dispositif de projection interferometrique a trois ouvertures pour produire une tache constituee de structures fines

Info

Publication number
FR2934058B1
FR2934058B1 FR0854813A FR0854813A FR2934058B1 FR 2934058 B1 FR2934058 B1 FR 2934058B1 FR 0854813 A FR0854813 A FR 0854813A FR 0854813 A FR0854813 A FR 0854813A FR 2934058 B1 FR2934058 B1 FR 2934058B1
Authority
FR
France
Prior art keywords
producing
open
projection device
fine structures
task consisting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0854813A
Other languages
English (en)
Other versions
FR2934058A1 (fr
Inventor
Renaud Foy
Michel Tallon
Sandrine Perruchot
Van Suu Auguste Le
Pierre Eric Blanc
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR0854813A priority Critical patent/FR2934058B1/fr
Priority to PCT/FR2009/000865 priority patent/WO2010007251A1/fr
Publication of FR2934058A1 publication Critical patent/FR2934058A1/fr
Application granted granted Critical
Publication of FR2934058B1 publication Critical patent/FR2934058B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/18—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical projection, e.g. combination of mirror and condenser and objective
    • G02B27/20—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical projection, e.g. combination of mirror and condenser and objective for imaging minute objects, e.g. light-pointer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G02B19/0057—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/144—Beam splitting or combining systems operating by reflection only using partially transparent surfaces without spectral selectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR0854813A 2008-07-15 2008-07-15 Dispositif de projection interferometrique a trois ouvertures pour produire une tache constituee de structures fines Expired - Fee Related FR2934058B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0854813A FR2934058B1 (fr) 2008-07-15 2008-07-15 Dispositif de projection interferometrique a trois ouvertures pour produire une tache constituee de structures fines
PCT/FR2009/000865 WO2010007251A1 (fr) 2008-07-15 2009-07-15 Dispositif de projection interférométrique a trois ouvertures pour produire une tache constituee de structures fines

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0854813A FR2934058B1 (fr) 2008-07-15 2008-07-15 Dispositif de projection interferometrique a trois ouvertures pour produire une tache constituee de structures fines

Publications (2)

Publication Number Publication Date
FR2934058A1 FR2934058A1 (fr) 2010-01-22
FR2934058B1 true FR2934058B1 (fr) 2010-09-24

Family

ID=40404079

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0854813A Expired - Fee Related FR2934058B1 (fr) 2008-07-15 2008-07-15 Dispositif de projection interferometrique a trois ouvertures pour produire une tache constituee de structures fines

Country Status (2)

Country Link
FR (1) FR2934058B1 (fr)
WO (1) WO2010007251A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2961901B1 (fr) * 2010-06-28 2012-07-27 Univ Claude Bernard Lyon Dispositif de determination d'une pente d'un front d'onde
JP7083397B2 (ja) 2018-02-02 2022-06-10 ベーリンガー インゲルハイム インターナショナル ゲゼルシャフト ミット ベシュレンクテル ハフツング グレリンｏ－アシルトランスフェラーゼ（ｇｏａｔ）阻害剤として使用するためのトリアゾロピリミジン誘導体
KR20200116978A (ko) 2018-02-02 2020-10-13 베링거 인겔하임 인터내셔날 게엠베하 그렐린 o-아실 트랜스퍼라제(goat) 억제제로서의 벤질-치환된, (피리딘-3-일)메틸-치환된 또는 (피리딘-4-일)메틸-치환된 옥사디아졸로피리딘 유도체
JP2023526353A (ja) 2020-05-22 2023-06-21 ベーリンガー インゲルハイム インターナショナル ゲゼルシャフト ミット ベシュレンクテル ハフツング アルキル７－アミノ－５－メチル－［１，２，５］オキサジアゾロ［３，４－ｂ］ピリジンカルボキシレートの連続製造方法
JP2023526351A (ja) 2020-05-22 2023-06-21 ベーリンガー インゲルハイム インターナショナル ゲゼルシャフト ミット ベシュレンクテル ハフツング アルキル７－アミノ－５－メチル－［１，２，５］オキサジアゾロ［３，４－ｂ］ピリジンカルボキシレートの製造方法
US11703318B1 (en) * 2022-02-24 2023-07-18 United States Of America As Represented By The Secretary Of The Navy Homodyne encoder system with adaptive path length matching

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3574280D1 (en) * 1985-12-23 1989-12-21 Ibm Deutschland Method and arrangement for optically determining surface profiles
FR2712978B1 (fr) * 1993-11-24 1996-02-02 Onera (Off Nat Aerospatiale) Interféromètre optique achromatique, du type à décalage trilatéral.
US7391519B1 (en) * 2005-06-15 2008-06-24 Lockheed Martin Corporation Generation of spatially distributed spectral data using a multi-aperture system

Also Published As

Publication number Publication date
FR2934058A1 (fr) 2010-01-22
WO2010007251A1 (fr) 2010-01-21

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20120330