FR2923025B1 - Systeme d'examen, procede d'examen, appareil dtm et dispositif de detection - Google Patents

Systeme d'examen, procede d'examen, appareil dtm et dispositif de detection

Info

Publication number
FR2923025B1
FR2923025B1 FR0857339A FR0857339A FR2923025B1 FR 2923025 B1 FR2923025 B1 FR 2923025B1 FR 0857339 A FR0857339 A FR 0857339A FR 0857339 A FR0857339 A FR 0857339A FR 2923025 B1 FR2923025 B1 FR 2923025B1
Authority
FR
France
Prior art keywords
exam
dtm
detection device
exam system
exam method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0857339A
Other languages
English (en)
Other versions
FR2923025A1 (fr
Inventor
Li Zhang
Zhiqiang Chen
Haifen Hu
Yuanjing Li
Yinong Liu
Shangmin Sun
Wenyu Zhang
Yuxiang Xing
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tsinghua University
Nuctech Co Ltd
Original Assignee
Tsinghua University
Nuctech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tsinghua University, Nuctech Co Ltd filed Critical Tsinghua University
Publication of FR2923025A1 publication Critical patent/FR2923025A1/fr
Application granted granted Critical
Publication of FR2923025B1 publication Critical patent/FR2923025B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • G01T1/2914—Measurement of spatial distribution of radiation
    • G01T1/2985—In depth localisation, e.g. using positron emitters; Tomographic imaging (longitudinal and transverse section imaging; apparatus for radiation diagnosis sequentially in different planes, steroscopic radiation diagnosis)

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Flow Control (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR0857339A 2007-10-30 2008-10-28 Systeme d'examen, procede d'examen, appareil dtm et dispositif de detection Active FR2923025B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2007101765528A CN101424947B (zh) 2007-10-30 2007-10-30 一种气路控制方法和装置

Publications (2)

Publication Number Publication Date
FR2923025A1 FR2923025A1 (fr) 2009-05-01
FR2923025B1 true FR2923025B1 (fr) 2012-03-30

Family

ID=40527628

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0857339A Active FR2923025B1 (fr) 2007-10-30 2008-10-28 Systeme d'examen, procede d'examen, appareil dtm et dispositif de detection

Country Status (2)

Country Link
CN (1) CN101424947B (fr)
FR (1) FR2923025B1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101718763B (zh) * 2009-12-15 2012-06-06 中国石油集团川庆钻探工程有限公司长庆录井公司 色谱样品气路控制系统
JP5558871B2 (ja) * 2010-03-15 2014-07-23 株式会社ダイヘン アーク溶接装置
CN104216423B (zh) * 2013-05-31 2018-01-09 北京北方华创微电子装备有限公司 半导体设备制造中控制气体输入的方法及系统
CN108278492B (zh) * 2018-01-22 2021-01-08 上海至纯洁净系统科技股份有限公司 一种保持工艺制程切换过程压力稳定的方法及装置
CN118704087A (zh) * 2023-03-27 2024-09-27 北京北方华创微电子装备有限公司 半导体工艺设备及其气动阀控制方法
CN117994540A (zh) * 2023-12-28 2024-05-07 北京声迅电子股份有限公司 基于可见光图像和x光图像的包裹匹配方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2217788Y (zh) * 1994-12-01 1996-01-17 电力工业部西安热工研究所 气粉两相流体参数测量自动吹扫装置
EP0818621A1 (fr) * 1996-01-23 1998-01-14 Toyota Jidosha Kabushiki Kaisha Systeme de traitement d'un carburant volatil pour un moteur a plusieurs cylindres

Also Published As

Publication number Publication date
CN101424947B (zh) 2010-08-11
CN101424947A (zh) 2009-05-06
FR2923025A1 (fr) 2009-05-01

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