FR2908235B1 - Equipement pour la tomographie d'un echantillon - Google Patents
Equipement pour la tomographie d'un echantillonInfo
- Publication number
- FR2908235B1 FR2908235B1 FR0609708A FR0609708A FR2908235B1 FR 2908235 B1 FR2908235 B1 FR 2908235B1 FR 0609708 A FR0609708 A FR 0609708A FR 0609708 A FR0609708 A FR 0609708A FR 2908235 B1 FR2908235 B1 FR 2908235B1
- Authority
- FR
- France
- Prior art keywords
- tomography
- sample
- equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
- H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/309—Accessories, mechanical or electrical features support of sample holder
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/22—Treatment of data
- H01J2237/226—Image reconstruction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2602—Details
- H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2611—Stereoscopic measurements and/or imaging
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2617—Comparison or superposition of transmission images; Moiré
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2802—Transmission microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2803—Scanning microscopes characterised by the imaging method
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2813—Scanning microscopes characterised by the application
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0609708A FR2908235B1 (fr) | 2006-11-07 | 2006-11-07 | Equipement pour la tomographie d'un echantillon |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0609708A FR2908235B1 (fr) | 2006-11-07 | 2006-11-07 | Equipement pour la tomographie d'un echantillon |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2908235A1 FR2908235A1 (fr) | 2008-05-09 |
FR2908235B1 true FR2908235B1 (fr) | 2009-01-16 |
Family
ID=38235312
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0609708A Expired - Fee Related FR2908235B1 (fr) | 2006-11-07 | 2006-11-07 | Equipement pour la tomographie d'un echantillon |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2908235B1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3973559B1 (fr) * | 2019-05-20 | 2023-08-30 | ELDICO Scientific AG | Diffractomètre pour cristallographie à particules chargées |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61142649A (ja) * | 1984-12-14 | 1986-06-30 | Jeol Ltd | 電子線を用いた断層像取得装置 |
US5412210A (en) * | 1990-10-12 | 1995-05-02 | Hitachi, Ltd. | Scanning electron microscope and method for production of semiconductor device by using the same |
JP3205160B2 (ja) * | 1994-02-23 | 2001-09-04 | 株式会社日立製作所 | 磁界の測定方法およびこれを用いた荷電粒子線装置 |
JP3332384B2 (ja) * | 1995-06-26 | 2002-10-07 | 株式会社 日立製作所 | 電子顕微鏡および電子顕微方法 |
AU2531600A (en) * | 1999-02-27 | 2000-09-21 | Meier Markus Institut Fur Mechanische Systeme | Goniometer |
IT247963Y1 (it) * | 1999-12-23 | 2002-09-20 | Fiat Auto Spa | Dispositivo porta-campioni accessorio, per analisi stereoscopiche almicroscopio elettronico a scansione . |
SE0100728D0 (sv) * | 2001-03-05 | 2001-03-05 | Sidec Technologies Ab Karolins | New method |
JP3776887B2 (ja) * | 2003-01-07 | 2006-05-17 | 株式会社日立ハイテクノロジーズ | 電子線装置 |
-
2006
- 2006-11-07 FR FR0609708A patent/FR2908235B1/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2908235A1 (fr) | 2008-05-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 10 |
|
ST | Notification of lapse |
Effective date: 20170731 |