FR2908235B1 - Equipement pour la tomographie d'un echantillon - Google Patents

Equipement pour la tomographie d'un echantillon

Info

Publication number
FR2908235B1
FR2908235B1 FR0609708A FR0609708A FR2908235B1 FR 2908235 B1 FR2908235 B1 FR 2908235B1 FR 0609708 A FR0609708 A FR 0609708A FR 0609708 A FR0609708 A FR 0609708A FR 2908235 B1 FR2908235 B1 FR 2908235B1
Authority
FR
France
Prior art keywords
tomography
sample
equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0609708A
Other languages
English (en)
Other versions
FR2908235A1 (fr
Inventor
Catherine Gauthier
Pijarn Jornsanch
Varlot Karine Masenelli
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INST NAT SCIENCES APPLIQ
Original Assignee
INST NAT SCIENCES APPLIQ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INST NAT SCIENCES APPLIQ filed Critical INST NAT SCIENCES APPLIQ
Priority to FR0609708A priority Critical patent/FR2908235B1/fr
Publication of FR2908235A1 publication Critical patent/FR2908235A1/fr
Application granted granted Critical
Publication of FR2908235B1 publication Critical patent/FR2908235B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261Details
    • H01J37/265Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/30Accessories, mechanical or electrical features
    • G01N2223/309Accessories, mechanical or electrical features support of sample holder
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/22Treatment of data
    • H01J2237/226Image reconstruction
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244Detection characterized by the detecting means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26Electron or ion microscopes
    • H01J2237/2602Details
    • H01J2237/2605Details operating at elevated pressures, e.g. atmosphere
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26Electron or ion microscopes
    • H01J2237/2611Stereoscopic measurements and/or imaging
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26Electron or ion microscopes
    • H01J2237/2617Comparison or superposition of transmission images; Moiré
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26Electron or ion microscopes
    • H01J2237/28Scanning microscopes
    • H01J2237/2802Transmission microscopes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26Electron or ion microscopes
    • H01J2237/28Scanning microscopes
    • H01J2237/2803Scanning microscopes characterised by the imaging method
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26Electron or ion microscopes
    • H01J2237/28Scanning microscopes
    • H01J2237/2813Scanning microscopes characterised by the application

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR0609708A 2006-11-07 2006-11-07 Equipement pour la tomographie d'un echantillon Expired - Fee Related FR2908235B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0609708A FR2908235B1 (fr) 2006-11-07 2006-11-07 Equipement pour la tomographie d'un echantillon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0609708A FR2908235B1 (fr) 2006-11-07 2006-11-07 Equipement pour la tomographie d'un echantillon

Publications (2)

Publication Number Publication Date
FR2908235A1 FR2908235A1 (fr) 2008-05-09
FR2908235B1 true FR2908235B1 (fr) 2009-01-16

Family

ID=38235312

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0609708A Expired - Fee Related FR2908235B1 (fr) 2006-11-07 2006-11-07 Equipement pour la tomographie d'un echantillon

Country Status (1)

Country Link
FR (1) FR2908235B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3973559B1 (fr) * 2019-05-20 2023-08-30 ELDICO Scientific AG Diffractomètre pour cristallographie à particules chargées

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61142649A (ja) * 1984-12-14 1986-06-30 Jeol Ltd 電子線を用いた断層像取得装置
US5412210A (en) * 1990-10-12 1995-05-02 Hitachi, Ltd. Scanning electron microscope and method for production of semiconductor device by using the same
JP3205160B2 (ja) * 1994-02-23 2001-09-04 株式会社日立製作所 磁界の測定方法およびこれを用いた荷電粒子線装置
JP3332384B2 (ja) * 1995-06-26 2002-10-07 株式会社 日立製作所 電子顕微鏡および電子顕微方法
AU2531600A (en) * 1999-02-27 2000-09-21 Meier Markus Institut Fur Mechanische Systeme Goniometer
IT247963Y1 (it) * 1999-12-23 2002-09-20 Fiat Auto Spa Dispositivo porta-campioni accessorio, per analisi stereoscopiche almicroscopio elettronico a scansione .
SE0100728D0 (sv) * 2001-03-05 2001-03-05 Sidec Technologies Ab Karolins New method
JP3776887B2 (ja) * 2003-01-07 2006-05-17 株式会社日立ハイテクノロジーズ 電子線装置

Also Published As

Publication number Publication date
FR2908235A1 (fr) 2008-05-09

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Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 10

ST Notification of lapse

Effective date: 20170731