FR2907775B1 - Composant micromecanique. - Google Patents

Composant micromecanique.

Info

Publication number
FR2907775B1
FR2907775B1 FR0758563A FR0758563A FR2907775B1 FR 2907775 B1 FR2907775 B1 FR 2907775B1 FR 0758563 A FR0758563 A FR 0758563A FR 0758563 A FR0758563 A FR 0758563A FR 2907775 B1 FR2907775 B1 FR 2907775B1
Authority
FR
France
Prior art keywords
rotation axis
substrate
micromechanical component
micro
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0758563A
Other languages
English (en)
Other versions
FR2907775A1 (fr
Inventor
Torsten Ohms
Tjalf Pirk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2907775A1 publication Critical patent/FR2907775A1/fr
Application granted granted Critical
Publication of FR2907775B1 publication Critical patent/FR2907775B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
FR0758563A 2006-10-30 2007-10-25 Composant micromecanique. Expired - Fee Related FR2907775B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200610051197 DE102006051197A1 (de) 2006-10-30 2006-10-30 Mikromechanisches Bauelement mit einer Mikroschwingvorrichtung und Verwendung eines Bauelements

Publications (2)

Publication Number Publication Date
FR2907775A1 FR2907775A1 (fr) 2008-05-02
FR2907775B1 true FR2907775B1 (fr) 2013-12-06

Family

ID=39264660

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0758563A Expired - Fee Related FR2907775B1 (fr) 2006-10-30 2007-10-25 Composant micromecanique.

Country Status (3)

Country Link
DE (1) DE102006051197A1 (fr)
FR (1) FR2907775B1 (fr)
IT (1) ITMI20072048A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008042967B4 (de) * 2008-10-20 2017-04-06 Robert Bosch Gmbh Kaskadierte mikromechanische Aktuatorstruktur
DE102012219660B4 (de) 2012-10-26 2023-10-12 Robert Bosch Gmbh Mechanisches Bauteil
JP2014182225A (ja) 2013-03-18 2014-09-29 Seiko Epson Corp 光スキャナー、アクチュエーター、画像表示装置およびヘッドマウントディスプレイ
JP2014182226A (ja) 2013-03-18 2014-09-29 Seiko Epson Corp 光スキャナー、アクチュエーター、画像表示装置およびヘッドマウントディスプレイ
US11714276B2 (en) 2020-05-12 2023-08-01 Microsoft Technology Licensing, Llc Microelectromechanical system (MEMS) scanner having a torsional beam flexure with variable width

Also Published As

Publication number Publication date
DE102006051197A1 (de) 2008-05-08
ITMI20072048A1 (it) 2008-04-30
FR2907775A1 (fr) 2008-05-02

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