FR2897467B1 - Condensateur mim - Google Patents

Condensateur mim

Info

Publication number
FR2897467B1
FR2897467B1 FR0650540A FR0650540A FR2897467B1 FR 2897467 B1 FR2897467 B1 FR 2897467B1 FR 0650540 A FR0650540 A FR 0650540A FR 0650540 A FR0650540 A FR 0650540A FR 2897467 B1 FR2897467 B1 FR 2897467B1
Authority
FR
France
Prior art keywords
mim capacitor
mim
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0650540A
Other languages
English (en)
Other versions
FR2897467A1 (fr
Inventor
Joaquim Torres
Sonarith Chhun
Laurent Georges Gosset
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics Crolles 2 SAS
Original Assignee
STMicroelectronics Crolles 2 SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics Crolles 2 SAS filed Critical STMicroelectronics Crolles 2 SAS
Priority to FR0650540A priority Critical patent/FR2897467B1/fr
Priority to US11/706,059 priority patent/US7630191B2/en
Publication of FR2897467A1 publication Critical patent/FR2897467A1/fr
Application granted granted Critical
Publication of FR2897467B1 publication Critical patent/FR2897467B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/33—Thin- or thick-film capacitors 
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/08—Inorganic dielectrics
    • H01G4/085—Vapour deposited
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
    • H01L28/84—Electrodes with an enlarged surface, e.g. formed by texturisation being a rough surface, e.g. using hemispherical grains
FR0650540A 2006-02-15 2006-02-15 Condensateur mim Expired - Fee Related FR2897467B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0650540A FR2897467B1 (fr) 2006-02-15 2006-02-15 Condensateur mim
US11/706,059 US7630191B2 (en) 2006-02-15 2007-02-13 MIM capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0650540A FR2897467B1 (fr) 2006-02-15 2006-02-15 Condensateur mim

Publications (2)

Publication Number Publication Date
FR2897467A1 FR2897467A1 (fr) 2007-08-17
FR2897467B1 true FR2897467B1 (fr) 2009-04-03

Family

ID=37103254

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0650540A Expired - Fee Related FR2897467B1 (fr) 2006-02-15 2006-02-15 Condensateur mim

Country Status (2)

Country Link
US (1) US7630191B2 (fr)
FR (1) FR2897467B1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7611958B2 (en) * 2007-12-05 2009-11-03 Infineon Technologies Ag Method of making a semiconductor element
US20100123993A1 (en) * 2008-02-13 2010-05-20 Herzel Laor Atomic layer deposition process for manufacture of battery electrodes, capacitors, resistors, and catalyzers
WO2010088684A2 (fr) * 2009-02-02 2010-08-05 Space Charge, LLC Condensateur utilisant des extensions à base de carbone
EP2396817A4 (fr) * 2009-02-12 2014-08-20 Laor Consulting Llc Condensateur électrique fritté et à nanopores, condensateur électrochimique et batterie et leur procédé de fabrication
US8236645B1 (en) * 2011-02-07 2012-08-07 GlobalFoundries, Inc. Integrated circuits having place-efficient capacitors and methods for fabricating the same
WO2015118901A1 (fr) * 2014-02-07 2015-08-13 株式会社村田製作所 Condensateur
JP7063019B2 (ja) * 2018-03-09 2022-05-09 Tdk株式会社 薄膜コンデンサの製造方法及び薄膜コンデンサ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2262186A (en) * 1991-12-04 1993-06-09 Philips Electronic Associated A capacitive structure for a semiconductor device
US5976928A (en) * 1997-11-20 1999-11-02 Advanced Technology Materials, Inc. Chemical mechanical polishing of FeRAM capacitors
US6346741B1 (en) * 1997-11-20 2002-02-12 Advanced Technology Materials, Inc. Compositions and structures for chemical mechanical polishing of FeRAM capacitors and method of fabricating FeRAM capacitors using same
US6187624B1 (en) * 1999-06-04 2001-02-13 Taiwan Semiconductor Manufacturing Company Method for making closely spaced capacitors with reduced parasitic capacitance on a dynamic random access memory (DRAM) device
KR100331554B1 (ko) * 1999-09-27 2002-04-06 윤종용 인접된 커패시터 사이의 크로스토크가 억제된 반도체 소자의 커패시터 어레이 및 그 제조방법
US6548348B1 (en) * 2001-06-18 2003-04-15 Taiwan Semiconductor Manufacturing Company Method of forming a storage node contact hole in a porous insulator layer
US6825130B2 (en) * 2002-12-12 2004-11-30 Asm Japan K.K. CVD of porous dielectric materials

Also Published As

Publication number Publication date
US20070200197A1 (en) 2007-08-30
FR2897467A1 (fr) 2007-08-17
US7630191B2 (en) 2009-12-08

Similar Documents

Publication Publication Date Title
DE602005025715D1 (de) Kondensator
GB2436211B (en) Capacitor assembly
DK2228086T3 (da) Forstøver
DE112006000551A5 (de) Leistungskondensator
DE602006010234D1 (de) Elektrolytkondensator
DK2215092T3 (da) Substitueret piperidino-dihydrothienopyrimidin
DE602005006501D1 (de) Vielschichtkondensator
DE602005008215D1 (de) Elektrolytkondensator
EP2104122A4 (fr) Condensateur
DE602008004431D1 (de) Tantalkondensator
FR2897467B1 (fr) Condensateur mim
AT503251A3 (de) Doppeldifferentialanordnung
EP2096651A4 (fr) Condensateur
DE602005023511D1 (de) Metall-isolator-metall-bauelement
FI20060763A0 (fi) Öljypuomi
BRPI0819546A2 (pt) "capacitor"
DE112007000953A5 (de) Möbel
ITMI20062202A1 (it) Struttura di dodina multiconnessione
SE0801757L (sv) Väggelement
DE502006009288D1 (de) Koppelkondensator-Anordnung
TH101115B (th) ตู้เสื้อผ้า
TH87413B (th) ชั้นหนังสือ
TH87411B (th) ชั้นวางของ
ES1063219Y (es) Armario lava-vajillas
FI20060413A0 (fi) Pulpetti

Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20121031