FR2870050A1 - Electrical contact terminal for connecting static switch and excimer laser, has tube crossing through male and female parts when they are overlapped with each other, where female part is placed in hole of wall of switch - Google Patents

Abstract

The terminal has a female part (PF) placed in a hole of a wall (C5) of a static switch (C). A male part (PM) overlaps in the female part. An electrical connecting tube crosses through the male and female parts when they are overlapped with each other. The tube has a perforation (A33) to inject insulation grease in the switch. Contact zones between the parts constitute an electric current passage path between the tube and the wall. An independent claim is also included for a utilization of a two contact terminal for producing an electrical connection between a static switch and an excimer laser.

Description

The present invention relates to an electrical connection pad.

  This electrical connection pad is more specifically intended to provide a removable electrical connection for equipment having sealing constraints.

  For this purpose, the invention relates to an electrical connection pad comprising: an electrically insulating female part adapted to be positioned in a hole in a wall of the aforementioned electrical equipment, so as to ensure the tightness of this equipment; an electrically insulating male part adapted to be releasably engaged with the outside of the equipment in the female part; and a detachable connecting tube capable of passing right through the male and female parts when they are nested one inside the other.

  Thus, the insulating female portion seals the electrical equipment, including when removing the male part.

  This feature is particularly advantageous for connecting a static switch filled with oil.

  Indeed, in the prior art, the connection pads of such equipment were constituted by a single piece, and it was impossible to break the electrical connection without compromising the tightness of the switch.

  According to another advantageous characteristic, the connecting tube comprises a bore along its entire length.

  Thus, this piercing can be used to introduce a material in the electrical equipment, and in particular an insulating grease, without the need to disassemble the female part.

  Preferably, the connecting tube has a threaded portion near its outer end to the electrical equipment.

  This threaded portion can thus be used to introduce a set screw when it is decided to remove the removable connecting tube.

  According to another advantageous characteristic, the connection pad comprises 3o an electrically conductive support adapted to receive an end of the connecting tube and elastic means also electrically conductive adapted to achieve at least in part, the electrical connection between the connecting tube and the support.

  These elastic means make it possible to ensure excellent electrical contact between the connecting tube and the electrical support, since they are adapted to deform when they are crushed between the connecting tube and the support, thus leaving, so to speak , no game

  Preferably, the connection pad according to the invention comprises a clamping member adapted to maintain a conductive plate in electrical connection with the support, this support having grooves on a contact surface with said plate.

  Thus, when the conductive plate is strongly tightened between the clamping member and the support, the grooves penetrate into the material of the conductive plate, which greatly increases the electrical connection between these different elements.

  According to a particularly advantageous characteristic of the invention, the contact zones between the male part and the female part constitute a preferential path of passage of electric current of at least 40 mm between the connecting tube and the equipment wall.

  This feature greatly increases the safety of the electrical equipment.

  Other features and advantages of the present invention appear in the light of the description of the various embodiments which will follow, this description being given by way of nonlimiting example is made with reference to the drawings in which: - Figure 1 FIG. 2 shows a static switch according to the invention in a preferred embodiment; FIG. 3 represents the static switch of FIG. 2 connected to an excimer laser; - Figures 4A and 4B show in section male and female portions of a connection pad according to the invention; - Figure 5 shows a connection pad according to the invention in a preferred embodiment, and - Figure 6 shows, in section, a support of a connection pad according to the invention.

  FIG. 1 represents a switching tower T known from the prior art.

  This tower T comprises six switching boards T101, T106 interconnected in series by T20 tinned copper connections, in a T5 chassis filled with T7 oil.

  Each switch board T10; comprises a plurality of MOS transistors T30 connected together in series and in parallel.

  T10 switch cards; are connected to ground, for example via the first switching board T101, as in the embodiment of FIG. 1.

  The switching tower T also comprises primary capacitors T40 connected on the one hand to a connection plate T50 and on the other hand to a transfer plate T60, these two plates being electrically conductive and preferably made of copper.

  The connection plate T50 is supplied with voltage by a 30 kv T70 external power supply. This T70 power supply allows the charging of T40 capacitors.

  The connecting plate T50 is also connected to the last switching plate T106 by means of a tinned copper T20 connection identical or similar to the inter-card links T20 mentioned above.

  The switching boards T101 to T106 are controlled by a control unit T80 external to the switching tower T, this control unit being, in the mode described here, connected to the first board T101 by a cable T81.

  The control unit T80 allows the discharge of the capacitors T40 in the conductive transfer plate T60 via the inter-board links T20.

  This transfer plate T60 has an output T90 external to the switching tower T. The tower T thus acts as a switch providing, at its output T90, a voltage equal to 0 volts or 30,000 volts, under the control of the control means T80.

  Figure 2 shows a static switch C according to the invention in a preferred embodiment.

  This static switch C comprises, in a chassis filled with oil T7, ten turns T1 to T10 identical or similar to the tower T described above with reference to FIG. 1, these ten turns being used for the ionization of the gas of a excimer laser, as described later with reference to FIG. 3. The wall C5 of the static switch C is a stainless steel wall with a thickness of 5 to 10 mm.

  The static switch C comprises five conductors in the form of copper plates C30, each of which makes it possible to connect two commutation towers in parallel, namely, in this embodiment: the towers T1, T2; T3, T4; T5, T6; to - towers T7, T8; and - the towers T9, T1o.

  According to the invention, the ten turns T1, T10 are simultaneously controlled by a control unit C80.

  This control unit C80 supplies a control signal to each 1s of the turns T1, T10 to discharge the capacitors T40 contained in these towers, to their outputs T90.

  More specifically, the control unit C80 is connected to a communication card T101 of each of the turns Ti, in a manner similar to the connection between the control unit T80 and the switching board T101 of the tower T described in FIG. reference to Figure 1.

  According to the present invention, the connecting cables C811, C8110 between the control unit C80 and the towers T1, T10 are of identical lengths.

  Thus, the towers T1, T10 receive simultaneous discharge commands from the control unit C80 with a time offset at most less than a few nanoseconds.

  In the preferred embodiment described herein, each tower T1, T10 is connected to a conductive plate C30 by means of its output T90.

  In order to ensure these connections, each of the five conductive plates C30 comprises two U-shaped connectors C10 into which are inserted the T90 outputs of two turns connected in parallel.

  To ensure good electrical contact between the output T90 of a tower and this U-shaped connector C10, two rows of beryllium bronze elastic contacts in the form of rounded strips are used.

  For this purpose, it is possible in particular to use the contact finger known to those skilled in the art under the name SPRINGLINE (registered trademark) reference 8101 11829S6305.

  Such resilient contacts are known to those skilled in the art and will not be described here.

  Each of the five copper conductive plates C30 is electrically connected by a C95 end to a connection pad P1, P5 as described below, with reference to FIG. 4.

  The five pads P5, P5 of the switch are interconnected by a plate L8 Io allowing the parallel of the ten switching towers T1, Tio.

  The static switch C of FIG. 2 also comprises a tower T and a control unit T80 that are identical or similar to those described previously with reference to FIG. 1.

  This tower T is connected by means of its output T90 to a pad P6 identical to the five pads described P1, P5 above.

  This tower T, whose discharge is controlled independently of the discharge of the other ten towers T1, Tio is used for the pre-ionization of the excimer laser gas.

  Figure 3 shows a static switch C according to the present invention connected to an excimer laser with Corona pre-ionization.

  The excimer laser described here operates in pulse mode, the pulse frequency up to 1 KHz.

  Each pulse comprises a pre-ionization phase of a gas G followed by an ionization phase of this gas.

  In the embodiment described here, this gas is constituted as follows: 0.07% HCl, 0.2% Xe and 99.73% Ne.

  The excimer laser L comprises a chamber separation plate L2 which defines two LA and LG enclosures of this laser isolated from each other.

  The LG enclosure is filled with gas G. The enclosure LA is filled with dry air (insulating gas) under pressure.

  In this embodiment, the LA chamber of the excimer laser L comprises six connection pads P1, P6, each of them being connected to the pad P1, P6 of the same reference of the static switch C. More specifically, the laser excimer L comprises five pads P1, P5, each of them being connected by means of a copper strip L10 to a pad P1, P5 of the static switch C for the ionization charge transfer and for the paralleling of the five pairs turns of 30 kV each.

  The laser L also comprises a connection pad P6 connected to the connection pad P6 of the static switch C for the pre-ionization.

  In the preferred embodiment described here, the connection between the pads P6 of the laser L and the static switch C for the pre-ionization is performed by means of a shielded cable.

  The excimer laser L is also connected to the static switch C by two links L20 connected to the ground which, in known manner, to close the electromagnetic fields.

  As previously described, the five pads P1i P5 of the static switch C, used for the transfer of the ionization charge are interconnected by the plate L8.

  The pads P1, P5 of the excimer laser L are connected by screws L24 to a copper connecting plate L25 to which secondary capacitors L40, identical or similar to the primary capacitors T40 of the switching circuits Ti, are connected.

  The secondary capacitors L40 are also connected to a transfer copper plate L60 identical in function to the conductive transfer plate T60 of the tower T described with reference to FIG.

  The connection plate L25, the capacitors L40 and the transfer plate L60 are all located in the enclosure LA filled with dry air under pressure.

  The chamber LG filled with gas G comprises an insulating support L30, preferably ceramic (pure alumina AI203), fixed against the inner wall of the chamber separation plate L2. The excimer laser also comprises an L45 cathode fixed to the insulating support L30 vis-à-vis an L50 anode; the anode L50 and the cathode L45 are located in the chamber LG filled with gas.

  In the embodiment described here, the L50 anode is connected to the ground by two stainless steel links L55 via the chamber separation plate L2.

  For more details on this arrangement, the skilled person can refer to Figure 2 of the patent application FR 92 14098 A1 in the name of Laserdot.

  The excimer laser L also comprises a screw L70 making it possible to connect the transfer plate L60 of the enclosure LA containing dry air to the cathode L45 contained in the chamber LG containing the gas G. This screw L70 thus passes through the plate L2 chamber separation and L30 ceramic insulating support.

  FIGS. 4A and 4B respectively represent male PM and to female PF insulating parts of a connection pad P1, P6 according to the invention. In the preferred embodiment described, the two parts PM and PF are made of plastic (polyethylene terephthalate, PETP).

  The PM male part has a cylindrical base M1 whose axis of symmetry A is shown in Figure 4A.

  This cylindrical base M1 has an outer face M2 and an inner face M3, these two faces being substantially flat, parallel to each other and normal to the axis of symmetry A. The male part PM also comprises a cylindrical appendix M4 about the axis A. This appendix M4 is preferably of material with the base M1 that it extends from its internal face M3.

  The diameter of the appendix M4 is smaller than the diameter of the base M1.

  This appendix M4 comprises, at its end, a flat face M5, normal to the axis A and parallel to the external faces M2 and internal M3 of the base M1.

  The male part PM also comprises a cylindrical hole opening M6 axis A through the male part PM from side to side from the outer face M2 to the surface M5 of the appendix M4.

  In the embodiment described here, the male part PM has a plurality of smooth through holes M7 passing right through the cylindrical base 3o M1 for fixing this male part PM with the static switch C. Only one of these holes is shown in Figure 4A.

  The pads P1, P6 according to the invention also comprise a female part PF, adapted to interlock with the male part PM.

  This female part comprises a cylindrical base F1 around an axis of rotation A ', this cylindrical base F1 having an inner face F2 and an outer face F3 planar, parallel to each other and normal to the axis of rotation 0'.

  Preferably, the diameter of the base F1 of the female part PF is identical to the diameter of the cylindrical base M1 of the male part PM.

  The female part PF also comprises a cylindrical appendage F4 of axis of symmetry A 'and having, at its end, a plane face F5 and parallel to the internal face F2 and to the external face F3 of the base F1.

  The diameter of the appendix F4 of the female part PF is, on the one hand, lower than the diameter of the base F1 of this female part PF and, on the other hand, greater than the diameter of the appendix M4 of the male part. PM.

  The female part PF has a cylindrical bore F6 of axis A 'made from the face F5 of its appendix F4.

  The depth of this drilling F6 is substantially equal to the height of the appendix M4 of the male part PM. The bottom of this hole is referenced F8 in FIG. 4B.

  The diameter of this bore F6 is very slightly greater than the diameter of the appendix M4 of the male part PM.

  The female part PF also has a cylindrical opening hole F7 with axis A 'of diameter equal to the diameter of the opening hole M6 of the male part PM.

  This opening hole F7 opens on the one hand on the internal face F2 of the base F1 and, on the other hand, on the bottom F8 of the bore F6.

  According to the invention, the male part PM and the female part PF are adapted to be nested one inside the other, their axes of symmetry A and A 'then being merged.

  More precisely, the appendix M4 of the male part PM can be introduced into the first cylindrical hole F6 of the female part PF.

  When this is the case, the outer face F3 of the base F1 of the female part PF comes into contact with the inner face M3 of the base M1 of the male part PM.

  Similarly, the face M5 of the appendix M4 of the male part PM comes into contact with the bottom F8 of the bore F6 of the female part PF.

  The through-hole cylindrical holes M6 of the male part PM and F7 of the female part PF are aligned.

  Preferably, the female part PF comprises a circular groove F9 around the appendix F4, this groove F9 being adapted to receive an O-ring.

  In the embodiment described here, the female part PF comprises a plurality of smooth through holes F10 passing right through the cylindrical base F1, for the attachment of this female part PF with the static switch C. Only one of between them is shown in Figure 4B.

  We will now describe with reference to FIG. 5 the connection between a connection pad P1, P6 of the static switch C and the corresponding connection pad P1, P6 of the excimer laser L for the transfer of the ionization charge (P1, to P5 ) or of recommendation (P6). In the embodiment described here, these six links are identical.

  In the embodiment described here, the static switch C comprises a wall C5 stainless steel with a thickness of 10 mm coated on its outer part by an insulating wall C6.

  According to the present invention, the female part PF of the pad P1 described with reference to FIG. 4B is intended to be fixed inside the static switch C. Consequently, the height of the appendix F4 of the female part PF corresponds substantially to the thickness of the inner wall C5 plus the thickness and the insulating wall C6 of the static switch C. The switch C thus comprises a cylindrical bore A5 of a diameter substantially greater than the diameter of the appendix F4 of the female part PF, this drilling being performed in the inner wall C5 and in the insulating wall C6 of this switch.

  Thus, the female part PF of the pad P1 is positioned inside the static switch C so that the external face F3 of the cylindrical base F1 of the female part PF bears against the internal face of the internal wall C5 of the switch C. To ensure the attachment of the female part PF in the static switch 30 C by means of several screws not shown, the inner wall C5 has threaded non-emergent portions C9 vis-à-vis the smooth holes F10 of the part female PF. io

  The female part PF thus makes it possible to seal the static switch C filled with oil T7.

  In the same way, the male part PM of the pad P1 is designed to be fixed, outside the switch C and removably, against the insulating wall C6 of the static switch C, when it is nested in the female part PF .

  For this purpose, the smooth holes M7 of the male part PM are placed vis-à-vis threaded portions C10 emerging from the internal wall C6, these open threaded portions C10 itself being opposite non-emerging threaded portions C11 drilled on the outer face of the wall C5 of the static switch C. In this arrangement, the inner face M3 of the base M1 of the male part PM is positioned against the insulating wall C6.

  According to the present invention, the connection pad P1 comprises means of connection with a conductive plate C30 connected to two switching towers (for example T1, T2) as described previously with reference to FIG.

  In the preferred embodiment described here, these connecting means comprise a support A10 and a clamping member A20, both made of copper, for holding a C95 end of the conductive plate C30 mentioned above.

  For this purpose, the end C95 of the conductive plate C30, the support A10 and the clamping member A20 all have a threaded portion, these threaded portions being aligned to receive a screw not shown in Figure 5, in view of the fixing the conductive plate C30 between the support A10 and the clamping member A20.

  In the preferred embodiment of the invention described here, the support A10 has on its surface in contact with the conductive plate C30, grooves A25 which allow, when clamping the member A20 on the support A10, to improve the electrical contact between the conductive plate C30 and the support A10.

  The copper support A10 is constituted in the embodiment described herein by a substantially cylindrical piece of axis A ", as shown in more detail in FIG.

  Figure 6 shows in section the copper support A10 of a connection pad P1 according to the invention.

  This support consists of a cylindrical copper piece of axis A ".

  The support A10 has a plane inner face S1, circular, axis of symmetry A ", this inner face S1 comprising the streaks A25 above which, in this preferred embodiment, are also circular.

  The support A10 has an external face S2 parallel to the internal face S1. The support A10 comprises a first non-emerging cylindrical bore S4 of axis A "made from the internal face S2.

  The diameter of this first bore S4 is smaller than the diameter of the support A10 and greater than the diameter of the opening hole M6 of the male part PM of this pad.

  The bottom of the bore S4 is referenced S3 in FIG.

  From this bottom S3, the support A10 comprises a second hole S5 of axis A ", non-opening and whose diameter is equal to the diameter of the opening hole M6 of the male part PM of this pad PI.

  The bottom of this second bore S5 is referenced S6 in FIG.

  In the preferred embodiment described here, the support A10 comprises threaded outlets S7 parallel to the axis A ", and drilled near the outer edge of the inner face S2 for fixing the support A10 on the internal face F2 of the F1 base of the PF female part.

  For this purpose, the portion F2 has threaded portions that are not open towards the threaded portions S7 of the support A10, these threaded portions not being shown in FIGS. 4B and 5 for simplification.

  The connection pad PI according to the invention also comprises a cylindrical connecting tube A30 of diameter very slightly less than the diameter of the hole M6 of the male part PM.

  The length of the connecting tube A30 is substantially equal to the sum of the following lengths: - twice the depth of the first bore S4 of the copper support A10; twice the depth of the second bore S5 of the copper support A10; Height of the base M1 of the male part PM; height of the base F1 of the female part PF; and - height of the appendix F4 of the female part PF.

  The connecting tube A30 is thus adapted to pass right through the male PM and female PF parts when they are nested one inside the other.

  Before fixing the support A10 to the internal face F2 of the female part PF, an annular copper spring A35 is positioned against the surface S3 of the first bore S4 of the copper support A10.

  The height of this elastic spring copper A35 is substantially equal to the depth of the first hole S4.

  According to the invention, the diameter of the circular space defined by this elastic spring A35 is substantially smaller than the diameter of the connecting tube A30.

  Thus, once the support A10 is fixed against the internal face F2 of the female part PF, it is possible to insert the connecting tube A30 through the through hole F7 of the female part PF, until it reaches the bottom S6 of the second hole S5 of the copper support A10, this second hole being adapted, by its diameter, to receive one end of the connecting tube 130.

  To reach this bottom S6, the connecting tube A30 forcibly passes through the elastic ring A35. This ring A35 thus ensures excellent electrical contact between the outer periphery of the connecting tube A30 and the support A10.

  The male part PM is then positioned by threading the connecting tube A30 through the through hole M6 of this male part PM.

  Then, we just nest the male part PM in the female part PF as described above.

  In this configuration, the inner face M3 of the base M1 of the male part PM is pressed against the outer surface of the insulating wall C10.

  This male part PM is fixed integrally to the internal wall C5 of the static switch C through the internal wall C11 by means of screws not shown in FIG. 6, these screws passing through the smooth holes M7 of the male part PM, the threaded rods C10. and C11 of the insulating wall C6 and the wall C5.

  The pad P1 then comprises a second support A10 in which a second elastic annular copper spring A35 has been positioned by force, as described above.

  This second support A10 is fixed to the outer surface M2 of the male part PM with screws not shown.

  For this purpose, the male part PM has threaded portions that are not open towards the threaded portions S7 of the support A10.

  After fixing, the end of the cylindrical connecting tube A30 is in contact with the bottom S6 of the second through hole S5 of the second support A10.

  Again, excellent electrical contact is provided between the connecting tube A30 and the second copper support A10 through the resilient annular spring copper A35.

  The pad P1 according to the invention finally comprises a second clamping member A20 for holding the copper connecting plate L10 in cooperation with the second support A10.

  The fixing of the copper connection plate L10 with the pad P1 of the excimer laser is carried out with screws. It will not be described in detail here.

  Preferentially, the shape of the copper connection plate L10 is chosen to adjust the inductor of the system and to vary the charging time of the secondary capacitors L40.

  In a preferred embodiment, the connecting tube A30 has at its outer end a threaded portion A32 in which can be inserted a screw allowing the removal of the connecting tube easily.

  In the preferred embodiment described herein, this connecting tube comprises an A33 piercing along its entire length for injecting grease through the tube, this grease being infiltrated in particular in the contact zones between the male parts. PM and female PF of the pad P1 and in the contact zones between the female part PF and the internal surface of the wall C5 of the static switch C. This grease thus allows an excellent electrical insulator which prevents the formation of plasma along the tube A30 link. In the preferred embodiment of the invention described here, the zones

  contact between the male beam PM and the female beam PF constitute an electrical current bypass path of at least 40 mm between the connecting tube A30 and the wall c5.

  This characteristic advantageously makes it possible to improve the electrical isolation of the static switch.

  Those skilled in the art will readily understand that, thanks to the particularly advantageous arrangement of the invention, the male part PM of the connecting tube P1 can be removed while the female part PF remains fixed to the wall C5 of the static switch, this PF female part ensuring the sealing of this static switch.

  It is thus possible to remove the connecting tube A30 and to break the electrical connection without compromising the tightness of the static switch.

Claims (6)

  An electrical connection pad comprising: an electrically insulating female part (PF) adapted to be positioned in a bore (A5) of a wall (C5) of an electrical equipment (C, L), so as to ensure sealing of said equipment; - An electrically insulating male part (PM) adapted to interlock, removably from the outside of said electrical equipment, in said female part (PF); and - a removable electrical connection tube (A30) capable of passing right through said male (PM) and female (PF) parts when they are nested one inside the other.   2 Plot according to claim 1, characterized in that said connecting tube 15 (A30) comprises a bore (A33) along its entire length.   3 block according to claim 1 or 2, characterized in that said connecting tube (A30) comprises a threaded portion (A32) near its outer end to said electrical equipment.   4 Plot according to any one of claims 1 to 3, characterized in that it further comprises a support (A10) electrically conductive adapted to receive an end of the connecting tube (A30) and elastic means (A35) electrically conductive adapted to perform, at least in part, the electrical connection between said connecting tube (A30) and said support (A10). Plot according to claim 4, characterized in that it further comprises a clamping member (A20) adapted to maintain a conductive plate (C30) in electrical connection with said support (A10), and in that said support comprises 3o streaks (A25) on a contact surface with said plate (C30).   6 pad according to any one of claims 1 to 5, characterized in that the contact areas between said male part (PM) and said female part (PF) constitute an electrical current bypass path of at least 40 mm between said connecting tube (A30) and said wall (C5).   Use of two bond pads according to any one of claims 1 to 6 for providing an electrical connection between a static switch and an excimer laser.