FR2860298B1 - Ellipsometre spectroscopique a polarisation incidente et analyseur fixes - Google Patents

Ellipsometre spectroscopique a polarisation incidente et analyseur fixes

Info

Publication number
FR2860298B1
FR2860298B1 FR0311261A FR0311261A FR2860298B1 FR 2860298 B1 FR2860298 B1 FR 2860298B1 FR 0311261 A FR0311261 A FR 0311261A FR 0311261 A FR0311261 A FR 0311261A FR 2860298 B1 FR2860298 B1 FR 2860298B1
Authority
FR
France
Prior art keywords
incidental
polarization
spectroscopic ellipsometer
fixed analyzer
analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0311261A
Other languages
English (en)
Other versions
FR2860298A1 (fr
Inventor
Robert Andre Marcel Stehle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR0311261A priority Critical patent/FR2860298B1/fr
Publication of FR2860298A1 publication Critical patent/FR2860298A1/fr
Application granted granted Critical
Publication of FR2860298B1 publication Critical patent/FR2860298B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
FR0311261A 2003-09-25 2003-09-25 Ellipsometre spectroscopique a polarisation incidente et analyseur fixes Expired - Fee Related FR2860298B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0311261A FR2860298B1 (fr) 2003-09-25 2003-09-25 Ellipsometre spectroscopique a polarisation incidente et analyseur fixes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0311261A FR2860298B1 (fr) 2003-09-25 2003-09-25 Ellipsometre spectroscopique a polarisation incidente et analyseur fixes

Publications (2)

Publication Number Publication Date
FR2860298A1 FR2860298A1 (fr) 2005-04-01
FR2860298B1 true FR2860298B1 (fr) 2007-06-15

Family

ID=34307166

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0311261A Expired - Fee Related FR2860298B1 (fr) 2003-09-25 2003-09-25 Ellipsometre spectroscopique a polarisation incidente et analyseur fixes

Country Status (1)

Country Link
FR (1) FR2860298B1 (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5042951A (en) * 1989-09-19 1991-08-27 Therma-Wave, Inc. High resolution ellipsometric apparatus
US4999014A (en) * 1989-05-04 1991-03-12 Therma-Wave, Inc. Method and apparatus for measuring thickness of thin films
US5166752A (en) * 1990-01-11 1992-11-24 Rudolph Research Corporation Simultaneous multiple angle/multiple wavelength ellipsometer and method
US5412473A (en) * 1993-07-16 1995-05-02 Therma-Wave, Inc. Multiple angle spectroscopic analyzer utilizing interferometric and ellipsometric devices
US6750968B2 (en) * 2000-10-03 2004-06-15 Accent Optical Technologies, Inc. Differential numerical aperture methods and device

Also Published As

Publication number Publication date
FR2860298A1 (fr) 2005-04-01

Similar Documents

Publication Publication Date Title
EP1560044A4 (fr) Analyseur a polarisation
DE60301703D1 (de) Organische Speichervorrichtung
NO20043583L (no) Analytisk innretning med predikteringsmodul og relaterte metoder
DE60316900D1 (de) Analysevorrichtung
DE60329222D1 (de) Biopsievorrichtung mit probenahmeröhre
DE602006019198D1 (de) Probe- und haltevorrichtung
DE602005006952D1 (de) NMR-Spektrometer und supraleitende Sondenspule
DE60319973D1 (de) Wegwerfbarer sensor mit verbessertem probeneinlass
DE602005002690D1 (de) Optisches Messgerät
DE202005018808U1 (de) Wickelvorrichtung mit Zentralver- und -entriegelung
DE60327781D1 (de) Magnetmesseinrichtung
DK1489117T3 (da) Harpikssammensætning og optisk element
DE60131112D1 (de) Polarisationsmodendispersionsmessung mit phasenempfindlicher Seitenbanddetection
DE60217989D1 (de) Verwendung eines spektroskopischen Ellipsometers
FI20050738A (fi) RFID-lukulaitteisto ja -menetelmä
DE60125131D1 (de) Spektralellipsometer
EP1855129A4 (fr) Élément de conversion de polarisation et projecteur équipé dudit élément
NO20030347D0 (no) Antenneelement og gruppeantenne
FR2860298B1 (fr) Ellipsometre spectroscopique a polarisation incidente et analyseur fixes
DE60307934D1 (de) Pilotton Multiplexierung der Polarisationszustände in der Heterodynanalyse eines optischen Elements
DK1693656T3 (da) Fotodetektor og spektroskop anvendende samme
FI20031458A (fi) Kantopakkaus ja pakkauksen kantorakenne
NO20055522D0 (no) Koblingsanordning og fremgangsmate ved bruk av samme
DE112005001394T5 (de) Herstellungsverfahren für eine Polarisationsinversionseinheit
DK1495086T3 (da) Forrudevasker og afiser

Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20101029