FR2851821B1 - Dispositif de detection de pression - Google Patents

Dispositif de detection de pression

Info

Publication number
FR2851821B1
FR2851821B1 FR0401945A FR0401945A FR2851821B1 FR 2851821 B1 FR2851821 B1 FR 2851821B1 FR 0401945 A FR0401945 A FR 0401945A FR 0401945 A FR0401945 A FR 0401945A FR 2851821 B1 FR2851821 B1 FR 2851821B1
Authority
FR
France
Prior art keywords
detection device
pressure detection
pressure
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0401945A
Other languages
English (en)
Other versions
FR2851821A1 (fr
Inventor
Inao Toyoda
Teruo Oda
Seiichirou Otake
Hiroaki Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2003053710A external-priority patent/JP4019977B2/ja
Priority claimed from JP2003069380A external-priority patent/JP4069770B2/ja
Application filed by Denso Corp filed Critical Denso Corp
Publication of FR2851821A1 publication Critical patent/FR2851821A1/fr
Application granted granted Critical
Publication of FR2851821B1 publication Critical patent/FR2851821B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0098—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means using semiconductor body comprising at least one PN junction as detecting element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
FR0401945A 2003-02-28 2004-02-26 Dispositif de detection de pression Expired - Fee Related FR2851821B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003053710A JP4019977B2 (ja) 2003-02-28 2003-02-28 圧力検出装置
JP2003069380A JP4069770B2 (ja) 2003-03-14 2003-03-14 圧力検出装置

Publications (2)

Publication Number Publication Date
FR2851821A1 FR2851821A1 (fr) 2004-09-03
FR2851821B1 true FR2851821B1 (fr) 2006-04-28

Family

ID=32852733

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0401945A Expired - Fee Related FR2851821B1 (fr) 2003-02-28 2004-02-26 Dispositif de detection de pression

Country Status (3)

Country Link
US (1) US7002227B2 (fr)
DE (1) DE102004009360B4 (fr)
FR (1) FR2851821B1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005020176A1 (de) * 2005-04-28 2006-11-16 Robert Bosch Gmbh Mikromechanischer Drucksensor sowie ein entsprechendes Herstellungsverfahren
CN101268348A (zh) * 2005-07-22 2008-09-17 意法半导体股份有限公司 带有高满刻度值的集成式压力传感器
JP4710779B2 (ja) * 2006-09-28 2011-06-29 株式会社日立製作所 力学量計測装置
US8272256B2 (en) * 2008-09-30 2012-09-25 Ngk Spark Plug Co., Ltd. Pressure sensor
JP2010107500A (ja) * 2008-09-30 2010-05-13 Ngk Spark Plug Co Ltd 圧力検出装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3786320A (en) * 1968-10-04 1974-01-15 Matsushita Electronics Corp Schottky barrier pressure sensitive semiconductor device with air space around periphery of metal-semiconductor junction
US4011577A (en) * 1972-03-21 1977-03-08 Omron Tateisi Electronics Co. Mechanical-electrical force transducer with semiconductor-insulating layer-tin oxide composite
US4570097A (en) * 1984-10-26 1986-02-11 Texas Instruments Incorporated Electrical connections for a piezoelectric pressure transmitter for an internal combustion engine
US4645965A (en) * 1984-10-26 1987-02-24 Texas Instruments Incorporated Cylinder pressure transmitter for an internal combustion engine
US4590400A (en) * 1984-10-26 1986-05-20 Texas Instruments Incorporated Piezoelectric cylinder pressure transmitter
US4567395A (en) * 1984-10-26 1986-01-28 Texas Instruments Incorporated Piezoelectric pressure transmitter for an internal combustion engine
DE4022782A1 (de) * 1990-07-18 1992-01-23 Bosch Gmbh Robert Druckgeber zur druckerfassung im brennraum von brennkraftmaschinen
JP3166015B2 (ja) * 1992-07-16 2001-05-14 株式会社豊田中央研究所 力変換素子およびこれを用いた圧力検出回路
JPH0719981A (ja) * 1993-06-01 1995-01-20 Nippondenso Co Ltd 高温用圧力センサ
FR2717262B1 (fr) * 1994-03-14 1997-09-26 Nippon Denso Co Détecteur de pression.
EP0695927A3 (fr) * 1994-08-01 1996-06-26 Motorola Inc Transducteur-détecteur utilisant un jonction Schottky et possédant à la sortie un signal de tension élevé
JPH10300604A (ja) * 1997-04-23 1998-11-13 Matsushita Electric Works Ltd 圧力センサ
JP2001074582A (ja) 1999-08-31 2001-03-23 Hitachi Ltd 筒内圧センサ
JP4159895B2 (ja) * 2003-02-17 2008-10-01 キヤノンアネルバ株式会社 静電容量型圧力センサ及びその製造方法

Also Published As

Publication number Publication date
DE102004009360A1 (de) 2004-09-09
US7002227B2 (en) 2006-02-21
US20040169242A1 (en) 2004-09-02
DE102004009360B4 (de) 2015-04-02
FR2851821A1 (fr) 2004-09-03

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Legal Events

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PLFP Fee payment

Year of fee payment: 13

PLFP Fee payment

Year of fee payment: 14

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ST Notification of lapse

Effective date: 20191006