FR2847384B1 - Procede et dispositif pour tester des substrats sensibles aux mouvements - Google Patents

Procede et dispositif pour tester des substrats sensibles aux mouvements

Info

Publication number
FR2847384B1
FR2847384B1 FR0312784A FR0312784A FR2847384B1 FR 2847384 B1 FR2847384 B1 FR 2847384B1 FR 0312784 A FR0312784 A FR 0312784A FR 0312784 A FR0312784 A FR 0312784A FR 2847384 B1 FR2847384 B1 FR 2847384B1
Authority
FR
France
Prior art keywords
sensitive substrates
motion sensitive
testing motion
testing
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0312784A
Other languages
English (en)
French (fr)
Other versions
FR2847384A1 (fr
Inventor
Stefan Schneidewind
Claus Dietrich
Jorg Kiesewetter
Hans Michael Weber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cascade Microtech Dresden GmbH
Original Assignee
SUSS MicroTec Test Systems GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10258375A external-priority patent/DE10258375A1/de
Application filed by SUSS MicroTec Test Systems GmbH filed Critical SUSS MicroTec Test Systems GmbH
Publication of FR2847384A1 publication Critical patent/FR2847384A1/fr
Application granted granted Critical
Publication of FR2847384B1 publication Critical patent/FR2847384B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0035—Testing
    • B81C99/005—Test apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
FR0312784A 2002-11-01 2003-10-31 Procede et dispositif pour tester des substrats sensibles aux mouvements Expired - Fee Related FR2847384B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10251377 2002-11-01
DE10258375A DE10258375A1 (de) 2002-11-01 2002-12-12 Verfahren zur Haltevorrichtung zum Testen von bewegungssensitiven Substraten

Publications (2)

Publication Number Publication Date
FR2847384A1 FR2847384A1 (fr) 2004-05-21
FR2847384B1 true FR2847384B1 (fr) 2008-08-29

Family

ID=32231874

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0312784A Expired - Fee Related FR2847384B1 (fr) 2002-11-01 2003-10-31 Procede et dispositif pour tester des substrats sensibles aux mouvements

Country Status (3)

Country Link
US (1) US20040119492A1 (enExample)
JP (1) JP2004157121A (enExample)
FR (1) FR2847384B1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4387987B2 (ja) * 2004-06-11 2009-12-24 株式会社オクテック 微小構造体の検査装置、微小構造体の検査方法および微小構造体の検査プログラム
KR20070083503A (ko) 2005-03-31 2007-08-24 가부시끼가이샤 오크테크 미소 구조체의 프로브 카드, 미소 구조체의 검사 장치,검사 방법 및 컴퓨터 프로그램
JP5121202B2 (ja) * 2006-09-29 2013-01-16 東京エレクトロン株式会社 プローブカードおよび微小構造体の検査装置
JP2009139172A (ja) * 2007-12-05 2009-06-25 Tokyo Electron Ltd 微小構造体の変位量検出装置
KR101794744B1 (ko) 2013-08-14 2017-12-01 에프이아이 컴파니 하전 입자 비임 시스템용 회로 프로브

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0196804B1 (en) * 1985-03-11 1991-01-23 Nippon Telegraph And Telephone Corporation Method and apparatus for testing integrated electronic device
JPH01235139A (ja) * 1988-03-16 1989-09-20 Fujitsu Ltd 電子ビームプローバにおける試料装着方法
JPH0933567A (ja) * 1995-07-21 1997-02-07 Akebono Brake Ind Co Ltd 半導体加速度センサのセンサチップ検査方法及び検査装置
US5600257A (en) * 1995-08-09 1997-02-04 International Business Machines Corporation Semiconductor wafer test and burn-in
JPH0972939A (ja) * 1995-09-05 1997-03-18 Fujitsu Ten Ltd 基板測定装置
JPH0982771A (ja) * 1995-09-19 1997-03-28 Toshiba Corp 半導体材料の評価方法およびその装置
JPH0989912A (ja) * 1995-09-25 1997-04-04 Olympus Optical Co Ltd テーブル機構
US5814733A (en) * 1996-09-12 1998-09-29 Motorola, Inc. Method of characterizing dynamics of a workpiece handling system
US5777484A (en) * 1996-09-30 1998-07-07 Packard Hughes Interconnect Company Device for testing integrated circuit chips during vibration
JPH11163066A (ja) * 1997-11-29 1999-06-18 Tokyo Electron Ltd ウエハ試験装置
FR2790833B1 (fr) * 1999-03-08 2001-04-20 St Microelectronics Sa Procede de test statistique de circuits integres
US6232790B1 (en) * 1999-03-08 2001-05-15 Honeywell Inc. Method and apparatus for amplifying electrical test signals from a micromechanical device
JP2001004379A (ja) * 1999-06-23 2001-01-12 Denso Corp 慣性センサの感度調整方法
DE10139443A1 (de) * 2001-08-10 2003-03-06 Eads Deutschland Gmbh Verfahren und Vorrichtung zum Trimmen von Sensoren mit schwingenden Strukturen

Also Published As

Publication number Publication date
FR2847384A1 (fr) 2004-05-21
JP2004157121A (ja) 2004-06-03
US20040119492A1 (en) 2004-06-24

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20120629