FR2847194B1 - Procede de creation de pores dans une feuille mince de polyimide - Google Patents

Procede de creation de pores dans une feuille mince de polyimide

Info

Publication number
FR2847194B1
FR2847194B1 FR0214473A FR0214473A FR2847194B1 FR 2847194 B1 FR2847194 B1 FR 2847194B1 FR 0214473 A FR0214473 A FR 0214473A FR 0214473 A FR0214473 A FR 0214473A FR 2847194 B1 FR2847194 B1 FR 2847194B1
Authority
FR
France
Prior art keywords
radiation
sheet
chemical attack
creating
thin sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0214473A
Other languages
English (en)
Other versions
FR2847194A1 (fr
Inventor
Roger Legras
Etienne Ferain
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INIVERSITE CATHOLIQUE DE LOUVA
Katholieke Universiteit Leuven
Original Assignee
INIVERSITE CATHOLIQUE DE LOUVA
Katholieke Universiteit Leuven
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0214473A priority Critical patent/FR2847194B1/fr
Application filed by INIVERSITE CATHOLIQUE DE LOUVA, Katholieke Universiteit Leuven filed Critical INIVERSITE CATHOLIQUE DE LOUVA
Priority to AT03776906T priority patent/ATE332184T1/de
Priority to DE60306679T priority patent/DE60306679T2/de
Priority to EP03776906A priority patent/EP1569742B1/fr
Priority to AU2003289706A priority patent/AU2003289706A1/en
Priority to PCT/EP2003/012780 priority patent/WO2004045750A1/fr
Publication of FR2847194A1 publication Critical patent/FR2847194A1/fr
Application granted granted Critical
Publication of FR2847194B1 publication Critical patent/FR2847194B1/fr
Priority to US11/131,943 priority patent/US7419612B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D69/00Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/02Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D67/00Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0002Organic membrane manufacture
    • B01D67/0023Organic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/0032Organic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • B01D67/0034Organic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D71/00Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/06Organic material
    • B01D71/58Other polymers having nitrogen in the main chain, with or without oxygen or carbon only
    • B01D71/62Polycondensates having nitrogen-containing heterocyclic rings in the main chain
    • B01D71/64Polyimides; Polyamide-imides; Polyester-imides; Polyamide acids or similar polyimide precursors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B26HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26FPERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
    • B26F1/00Perforating; Punching; Cutting-out; Stamping-out; Apparatus therefor
    • B26F1/26Perforating by non-mechanical means, e.g. by fluid jet
    • B26F1/31Perforating by non-mechanical means, e.g. by fluid jet by radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2325/00Details relating to properties of membranes
    • B01D2325/02Details relating to pores or porosity of the membranes
    • B01D2325/021Pore shapes
    • B01D2325/0212Symmetric or isoporous membranes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Forests & Forestry (AREA)
  • Mechanical Engineering (AREA)
  • Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
FR0214473A 2002-11-19 2002-11-19 Procede de creation de pores dans une feuille mince de polyimide Expired - Fee Related FR2847194B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR0214473A FR2847194B1 (fr) 2002-11-19 2002-11-19 Procede de creation de pores dans une feuille mince de polyimide
DE60306679T DE60306679T2 (de) 2002-11-19 2003-11-14 Verfahren zur erzeugung von poren in einer dünnen folie aus polyimid
EP03776906A EP1569742B1 (fr) 2002-11-19 2003-11-14 Procede de creation de pores dans une feuille mince de polyimide
AU2003289706A AU2003289706A1 (en) 2002-11-19 2003-11-14 Method for producing pores in a thin polyimide sheet
AT03776906T ATE332184T1 (de) 2002-11-19 2003-11-14 Verfahren zur erzeugung von poren in einer dünnen folie aus polyimid
PCT/EP2003/012780 WO2004045750A1 (fr) 2002-11-19 2003-11-14 Procede de creation de pores dans une feuille mince de polyimide
US11/131,943 US7419612B2 (en) 2002-11-19 2005-05-18 Method of creating pores in a thin sheet of polyimide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0214473A FR2847194B1 (fr) 2002-11-19 2002-11-19 Procede de creation de pores dans une feuille mince de polyimide

Publications (2)

Publication Number Publication Date
FR2847194A1 FR2847194A1 (fr) 2004-05-21
FR2847194B1 true FR2847194B1 (fr) 2005-02-04

Family

ID=32187737

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0214473A Expired - Fee Related FR2847194B1 (fr) 2002-11-19 2002-11-19 Procede de creation de pores dans une feuille mince de polyimide

Country Status (7)

Country Link
US (1) US7419612B2 (fr)
EP (1) EP1569742B1 (fr)
AT (1) ATE332184T1 (fr)
AU (1) AU2003289706A1 (fr)
DE (1) DE60306679T2 (fr)
FR (1) FR2847194B1 (fr)
WO (1) WO2004045750A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8962132B2 (en) 2004-09-28 2015-02-24 Giner, Inc. Solid polymer electrolyte composite membrane comprising a porous support and a solid polymer electrolyte including a dispersed reduced noble metal or noble metal oxide
US7807063B2 (en) * 2004-09-28 2010-10-05 Giner Electrochemical Systems, Llc Solid polymer electrolyte composite membrane comprising plasma etched porous support
US7867669B2 (en) 2004-09-28 2011-01-11 Giner Electrochemical Systems, Llc Solid polymer electrolyte composite membrane comprising laser micromachined porous support
US7947405B2 (en) 2004-09-29 2011-05-24 Giner Electrochemical Systems, Llc Solid polymer electrolyte composite membrane comprising porous ceramic support
CN1293129C (zh) * 2004-10-14 2007-01-03 北京化工大学 一种低介电常数纳米多孔聚酰亚胺薄膜的制备方法
US20080060995A1 (en) * 2006-09-12 2008-03-13 Sean Zhang Semi-Permeable Membrane
EP2187217B1 (fr) * 2007-08-24 2013-11-06 Lsip, Llc Procede de detection de cancer gynecologique
US10364504B2 (en) 2012-02-23 2019-07-30 University Of Houston Fabrication of multilayered nanosized porous membranes and their use for making novel nanostructures
US9728802B2 (en) 2013-05-14 2017-08-08 Giner, Inc. Micromold methods for fabricating perforated substrates and for preparing solid polymer electrolyte composite membranes
US10896804B2 (en) * 2017-07-27 2021-01-19 Lawrence Livermore National Security, Llc Planarization, densification, and exfoliation of porous materials by high-energy ion beams

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3303085A (en) 1962-02-28 1967-02-07 Gen Electric Molecular sieves and methods for producing same
US3493751A (en) 1966-06-17 1970-02-03 Gen Electric Track registration alpha autoradiography
US3415993A (en) 1966-11-07 1968-12-10 Gen Electric Radiation detection sheet material having metal coating to facilitate read-out
GB1271423A (en) 1968-06-27 1972-04-19 Gen Electric Improvements relating to the manufacture of sheets having holes therein by an etching process
US3612871A (en) 1969-04-01 1971-10-12 Gen Electric Method for making visible radiation damage tracks in track registration materials
US3852134A (en) 1969-05-05 1974-12-03 Gen Electric Method for forming selectively perforate bodies
BE755122A (fr) 1969-06-20 1971-02-01 Albright & Wilson Procede de depot electrolytique de cuivre
US3677844A (en) 1970-11-19 1972-07-18 Gen Electric Process for making an elastic stretchy sheet containing apertures having a diameter of at least five angstroms and being suitable as a molecular sieve
US3770532A (en) 1971-02-16 1973-11-06 Gen Electric Porous bodies and method of making
US3713921A (en) 1971-04-01 1973-01-30 Gen Electric Geometry control of etched nuclear particle tracks
GB1375204A (fr) 1971-04-05 1974-11-27
US3742182A (en) 1971-12-27 1973-06-26 Coherent Radiation Method for scanning mask forming holes with a laser beam
US4115303A (en) 1972-04-21 1978-09-19 Commissariat A L'energie Atomique Method of fabrication of porous macromolecular materials having an internal lining and materials obtained by means of said method
EP0109147A3 (fr) 1982-10-19 1986-04-16 Varian Associates, Inc. Appareil de lithographie par faisceau de particules chargées comportant un dispositif de production de vide localisé
US4652412A (en) 1985-06-14 1987-03-24 Polaroid Corporation Method for forming microporous filter
FR2597391B1 (fr) * 1986-03-25 1989-02-24 Univ Catholique Louvain Procede de realisation de perforations dans un materiau solide en feuille, dispositif d'irradiation pour la mise en oeuvre du procede et materiau perfore ainsi obtenu
FR2607022B1 (fr) 1986-11-20 1991-02-22 Commissariat Energie Atomique Realisation de membranes microporeuses asymetriques par double irradiation, et membranes ainsi obtenues
DE3704546A1 (de) 1987-02-13 1988-08-25 Kernforschungsz Karlsruhe Verfahren zur herstellung eines filters und danach hergestelltes filter
FR2623100B1 (fr) 1987-11-13 1991-04-05 Commissariat Energie Atomique Membrane microporeuse obtenue par irradiation de deux faces et procede d'obtention correspondant
DE3742770A1 (de) 1987-12-17 1989-06-29 Akzo Gmbh Mikro-/ultrafiltrationsmembranen mit definierter porengroesse durch bestrahlung mit gepulsten lasern und verfahren zur herstellung
DE3816078A1 (de) * 1988-05-11 1989-11-23 Brandt Reinhard Verfahren zur herstellung hitzebestaendiger und chemikalienresistenter feinstporiger mikrosiebe (lichgroessen d > 10 nano-m) aus der polyimid-folie "kapton" (handelsname von du pont)
DE4103853C2 (de) 1991-02-08 1994-09-15 Oxyphen Gmbh Verfahren zur Herstellung von Polymerfolienfiltern
CH685760A5 (de) 1992-06-25 1995-09-29 Guenther Weikmann Verfahren zum Ausfiltrieren von Fremdstoffen und Vorrichtung hiefür.
AU1362597A (en) 1997-01-10 1998-08-03 Morphometrix Technologies Inc. Membrane microfilter manufacturing process
FR2803238A1 (fr) * 1999-12-29 2001-07-06 Iniversite Catholique De Louva Procede de creation de pores et film microporeux
FR2803237A1 (fr) * 1999-12-29 2001-07-06 Iniversite Catholique De Louva Procede de creation de pores dans un materiau polymere en feuilles ou une couche polymere telle qu'un film mince d'epaisseur egale a une centaine de nanometres, prealablement deposee sur un support metallique
IL140279A0 (en) * 2000-12-13 2002-02-10 Mandelzweig David Personal computer card extraction tool and method

Also Published As

Publication number Publication date
ATE332184T1 (de) 2006-07-15
FR2847194A1 (fr) 2004-05-21
EP1569742A1 (fr) 2005-09-07
EP1569742B1 (fr) 2006-07-05
AU2003289706A1 (en) 2004-06-15
US7419612B2 (en) 2008-09-02
WO2004045750A1 (fr) 2004-06-03
US20060000798A1 (en) 2006-01-05
DE60306679D1 (de) 2006-08-17
DE60306679T2 (de) 2007-06-28

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Effective date: 20080930