FR2838988B1 - COUCHES EPAISSES DE YBa2Cu3O7-y, PROCEDE POUR LEUR PREPARATION - Google Patents

COUCHES EPAISSES DE YBa2Cu3O7-y, PROCEDE POUR LEUR PREPARATION

Info

Publication number
FR2838988B1
FR2838988B1 FR0205217A FR0205217A FR2838988B1 FR 2838988 B1 FR2838988 B1 FR 2838988B1 FR 0205217 A FR0205217 A FR 0205217A FR 0205217 A FR0205217 A FR 0205217A FR 2838988 B1 FR2838988 B1 FR 2838988B1
Authority
FR
France
Prior art keywords
yba2cu3o7
preparation
thick layers
thick
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR0205217A
Other languages
English (en)
Other versions
FR2838988A1 (fr
Inventor
Philippe Odier
Francois Florent Weiss
Zainul Supardi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR0205217A priority Critical patent/FR2838988B1/fr
Priority to AU2003262801A priority patent/AU2003262801A1/en
Priority to EP03747149A priority patent/EP1497480A1/fr
Priority to PCT/FR2003/001254 priority patent/WO2003091475A1/fr
Priority to US10/512,063 priority patent/US20050233910A1/en
Priority to JP2003587997A priority patent/JP2005532676A/ja
Publication of FR2838988A1 publication Critical patent/FR2838988A1/fr
Application granted granted Critical
Publication of FR2838988B1 publication Critical patent/FR2838988B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45502—Flow conditions in reaction chamber
    • C23C16/45504—Laminar flow
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/408—Oxides of copper or solid solutions thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4486—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by producing an aerosol and subsequent evaporation of the droplets or particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0324—Processes for depositing or forming copper oxide superconductor layers from a solution

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Dispersion Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Chemical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR0205217A 2002-04-25 2002-04-25 COUCHES EPAISSES DE YBa2Cu3O7-y, PROCEDE POUR LEUR PREPARATION Expired - Lifetime FR2838988B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0205217A FR2838988B1 (fr) 2002-04-25 2002-04-25 COUCHES EPAISSES DE YBa2Cu3O7-y, PROCEDE POUR LEUR PREPARATION
AU2003262801A AU2003262801A1 (en) 2002-04-25 2003-04-18 Thick films of ybaless thansbgreater than2less than/sbgreater thanculess thansbgreater than3less than/sbgreater thano less thansbgreater than7-yless than/sbgreater than and preparation method thereof
EP03747149A EP1497480A1 (fr) 2002-04-25 2003-04-18 Couches epaisses de yba2cu3o7-y, procede pour leur preparation.
PCT/FR2003/001254 WO2003091475A1 (fr) 2002-04-25 2003-04-18 Couches epaisses de yba2cu3o7-y, procede pour leur preparation.
US10/512,063 US20050233910A1 (en) 2002-04-25 2003-04-18 Thick films of yba<sb>2</sb>cu<sb>3</sb>o <sb>7-y</sb> and preparation method thereof
JP2003587997A JP2005532676A (ja) 2002-04-25 2003-04-18 ＹＢａ２Ｃｕ３Ｏ７−ｙ厚膜およびその作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0205217A FR2838988B1 (fr) 2002-04-25 2002-04-25 COUCHES EPAISSES DE YBa2Cu3O7-y, PROCEDE POUR LEUR PREPARATION

Publications (2)

Publication Number Publication Date
FR2838988A1 FR2838988A1 (fr) 2003-10-31
FR2838988B1 true FR2838988B1 (fr) 2005-03-25

Family

ID=28799934

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0205217A Expired - Lifetime FR2838988B1 (fr) 2002-04-25 2002-04-25 COUCHES EPAISSES DE YBa2Cu3O7-y, PROCEDE POUR LEUR PREPARATION

Country Status (6)

Country Link
US (1) US20050233910A1 (fr)
EP (1) EP1497480A1 (fr)
JP (1) JP2005532676A (fr)
AU (1) AU2003262801A1 (fr)
FR (1) FR2838988B1 (fr)
WO (1) WO2003091475A1 (fr)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5906965A (en) * 1996-01-19 1999-05-25 Superconductor Technologies, Inc. Thin film superconductor-insulator-superconductor multi-layer films and method for obtaining the same
EP1198848A1 (fr) * 1999-07-23 2002-04-24 American Superconductor Corporation Precurseur de film epais a conducteur revetu

Also Published As

Publication number Publication date
JP2005532676A (ja) 2005-10-27
EP1497480A1 (fr) 2005-01-19
FR2838988A1 (fr) 2003-10-31
WO2003091475A1 (fr) 2003-11-06
US20050233910A1 (en) 2005-10-20
AU2003262801A1 (en) 2003-11-10

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