FR2821206B1 - Procede de fonctionnement d'une machine d'analyse optique de galettes a microstructures, machine adaptee - Google Patents
Procede de fonctionnement d'une machine d'analyse optique de galettes a microstructures, machine adapteeInfo
- Publication number
- FR2821206B1 FR2821206B1 FR0102184A FR0102184A FR2821206B1 FR 2821206 B1 FR2821206 B1 FR 2821206B1 FR 0102184 A FR0102184 A FR 0102184A FR 0102184 A FR0102184 A FR 0102184A FR 2821206 B1 FR2821206 B1 FR 2821206B1
- Authority
- FR
- France
- Prior art keywords
- machine
- microstructure
- wafers
- operating method
- optical analysis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0102184A FR2821206B1 (fr) | 2001-02-16 | 2001-02-16 | Procede de fonctionnement d'une machine d'analyse optique de galettes a microstructures, machine adaptee |
PCT/FR2002/000603 WO2002067296A1 (fr) | 2001-02-16 | 2002-02-15 | Procede de fonctionnement d'une machine d'analyse optique de galettes a microstructures, machine adaptee |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0102184A FR2821206B1 (fr) | 2001-02-16 | 2001-02-16 | Procede de fonctionnement d'une machine d'analyse optique de galettes a microstructures, machine adaptee |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2821206A1 FR2821206A1 (fr) | 2002-08-23 |
FR2821206B1 true FR2821206B1 (fr) | 2003-09-19 |
Family
ID=8860145
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0102184A Expired - Fee Related FR2821206B1 (fr) | 2001-02-16 | 2001-02-16 | Procede de fonctionnement d'une machine d'analyse optique de galettes a microstructures, machine adaptee |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR2821206B1 (fr) |
WO (1) | WO2002067296A1 (fr) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6278828A (ja) * | 1985-10-01 | 1987-04-11 | Dainippon Screen Mfg Co Ltd | 表面処理方法およびその装置 |
US5766360A (en) * | 1992-03-27 | 1998-06-16 | Kabushiki Kaisha Toshiba | Substrate processing apparatus and substrate processing method |
US6208751B1 (en) * | 1998-03-24 | 2001-03-27 | Applied Materials, Inc. | Cluster tool |
-
2001
- 2001-02-16 FR FR0102184A patent/FR2821206B1/fr not_active Expired - Fee Related
-
2002
- 2002-02-15 WO PCT/FR2002/000603 patent/WO2002067296A1/fr not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
FR2821206A1 (fr) | 2002-08-23 |
WO2002067296A1 (fr) | 2002-08-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20121031 |