DE60105899D1 - Schaltvorrichtung, insbesondere zum optischen schalten - Google Patents

Schaltvorrichtung, insbesondere zum optischen schalten

Info

Publication number
DE60105899D1
DE60105899D1 DE60105899T DE60105899T DE60105899D1 DE 60105899 D1 DE60105899 D1 DE 60105899D1 DE 60105899 T DE60105899 T DE 60105899T DE 60105899 T DE60105899 T DE 60105899T DE 60105899 D1 DE60105899 D1 DE 60105899D1
Authority
DE
Germany
Prior art keywords
switching
optical
switching device
optical switching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60105899T
Other languages
English (en)
Other versions
DE60105899T2 (de
Inventor
Claude Bourgeois
Patrick Debergh
Stephan Gonseth
Gregoire Perregaux
Felix Rudolf
Der Wiel Appolonius Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Colibrys SA
Original Assignee
Colibrys SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Colibrys SA filed Critical Colibrys SA
Application granted granted Critical
Publication of DE60105899D1 publication Critical patent/DE60105899D1/de
Publication of DE60105899T2 publication Critical patent/DE60105899T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/353Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/354Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/35442D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/35481xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/35521x1 switch, e.g. on/off switch
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357Electrostatic force
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
DE60105899T 2000-02-25 2001-02-23 Schaltvorrichtung, insbesondere zum optischen schalten Expired - Lifetime DE60105899T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP00810162 2000-02-25
EP00810162A EP1128201A1 (de) 2000-02-25 2000-02-25 Schaltvorrichtung, insbesondere zum optischen Schalten
PCT/CH2001/000118 WO2001063337A1 (en) 2000-02-25 2001-02-23 Switching device, particularly for optical switching

Publications (2)

Publication Number Publication Date
DE60105899D1 true DE60105899D1 (de) 2004-11-04
DE60105899T2 DE60105899T2 (de) 2005-10-20

Family

ID=8174570

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60105899T Expired - Lifetime DE60105899T2 (de) 2000-02-25 2001-02-23 Schaltvorrichtung, insbesondere zum optischen schalten

Country Status (5)

Country Link
US (1) US6798935B2 (de)
EP (2) EP1128201A1 (de)
DE (1) DE60105899T2 (de)
DK (1) DK1171792T3 (de)
WO (1) WO2001063337A1 (de)

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JP2003057569A (ja) * 2001-06-07 2003-02-26 Sumitomo Electric Ind Ltd 光スイッチ及び光スイッチアレイ
WO2003027751A1 (fr) 2001-09-21 2003-04-03 Sumitomo Electric Industries, Ltd. Commutateur optique et reseau de commutateurs optiques
JP2003266391A (ja) * 2002-03-19 2003-09-24 Japan Aviation Electronics Industry Ltd 静電駆動デバイス
US7417782B2 (en) * 2005-02-23 2008-08-26 Pixtronix, Incorporated Methods and apparatus for spatial light modulation
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US20080158635A1 (en) * 2005-02-23 2008-07-03 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US7271945B2 (en) * 2005-02-23 2007-09-18 Pixtronix, Inc. Methods and apparatus for actuating displays
US7746529B2 (en) 2005-02-23 2010-06-29 Pixtronix, Inc. MEMS display apparatus
US8482496B2 (en) 2006-01-06 2013-07-09 Pixtronix, Inc. Circuits for controlling MEMS display apparatus on a transparent substrate
US7755582B2 (en) 2005-02-23 2010-07-13 Pixtronix, Incorporated Display methods and apparatus
US7502159B2 (en) * 2005-02-23 2009-03-10 Pixtronix, Inc. Methods and apparatus for actuating displays
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US7675665B2 (en) 2005-02-23 2010-03-09 Pixtronix, Incorporated Methods and apparatus for actuating displays
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US7999994B2 (en) * 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US8159428B2 (en) 2005-02-23 2012-04-17 Pixtronix, Inc. Display methods and apparatus
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US7304785B2 (en) * 2005-02-23 2007-12-04 Pixtronix, Inc. Display methods and apparatus
US7742016B2 (en) 2005-02-23 2010-06-22 Pixtronix, Incorporated Display methods and apparatus
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
US7876489B2 (en) 2006-06-05 2011-01-25 Pixtronix, Inc. Display apparatus with optical cavities
EP2080045A1 (de) 2006-10-20 2009-07-22 Pixtronix Inc. Lichtleiter und rücklichtsysteme mit lichtumlenkern bei variierenden dichten
US7852546B2 (en) 2007-10-19 2010-12-14 Pixtronix, Inc. Spacers for maintaining display apparatus alignment
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
DE102008006570A1 (de) * 2008-01-29 2009-07-30 Robert Bosch Gmbh Festkörpergelenk und mikromechanisches Bauelement
US8248560B2 (en) 2008-04-18 2012-08-21 Pixtronix, Inc. Light guides and backlight systems incorporating prismatic structures and light redirectors
US7920317B2 (en) 2008-08-04 2011-04-05 Pixtronix, Inc. Display with controlled formation of bubbles
US8169679B2 (en) * 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
JP2013519121A (ja) 2010-02-02 2013-05-23 ピクストロニックス・インコーポレーテッド 低温封孔流体充填ディスプレイ装置を製造するための方法
BR112012019383A2 (pt) 2010-02-02 2017-09-12 Pixtronix Inc Circuitos para controlar aparelho de exibição
EP2545544A1 (de) 2010-03-11 2013-01-16 Pixtronix, Inc. Reflektive und transflektive betriebsmodi für eine anzeigevorrichtung
KR20170077261A (ko) 2010-12-20 2017-07-05 스냅트랙, 인코포레이티드 감소된 음향 방출을 갖는 mems 광 변조기 어레이들을 위한 시스템들 및 방법들
US8749538B2 (en) 2011-10-21 2014-06-10 Qualcomm Mems Technologies, Inc. Device and method of controlling brightness of a display based on ambient lighting conditions
US8633551B1 (en) * 2012-06-29 2014-01-21 Intel Corporation Semiconductor package with mechanical fuse
US9183812B2 (en) 2013-01-29 2015-11-10 Pixtronix, Inc. Ambient light aware display apparatus
US9170421B2 (en) 2013-02-05 2015-10-27 Pixtronix, Inc. Display apparatus incorporating multi-level shutters
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
US20150279282A1 (en) * 2014-03-28 2015-10-01 Pixtronix, Inc. Distributed electrostatic actuator for mems devices
CN105091737B (zh) * 2015-08-24 2018-09-14 扬州大学 一种悬臂梁偏转位移测量装置
US10712359B2 (en) * 2018-05-01 2020-07-14 Nxp Usa, Inc. Flexure with enhanced torsional stiffness and MEMS device incorporating same
US10794701B2 (en) 2018-05-01 2020-10-06 Nxp Usa, Inc. Inertial sensor with single proof mass and multiple sense axis capability

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8707854D0 (en) 1987-04-02 1987-05-07 British Telecomm Radiation deflector assembly
US5226099A (en) 1991-04-26 1993-07-06 Texas Instruments Incorporated Digital micromirror shutter device
FR2726135B1 (fr) * 1994-10-25 1997-01-17 Suisse Electronique Microtech Dispositif de commutation
FR2729232A1 (fr) * 1995-01-10 1996-07-12 Commissariat Energie Atomique Dispositif optique pour application optomecanique
JP3787983B2 (ja) * 1997-06-18 2006-06-21 セイコーエプソン株式会社 光スイッチング素子、画像表示装置及び投射装置
US6154590A (en) * 1998-09-28 2000-11-28 Lucent Technologies Inc. Wavelength-tunable devices and systems comprising flexed optical gratings
US6535663B1 (en) * 1999-07-20 2003-03-18 Memlink Ltd. Microelectromechanical device with moving element
US6463189B1 (en) * 2000-02-24 2002-10-08 Avanex Corporation Method and apparatus for optical switching devices utilizing a bi-morphic piezoelectric apparatus

Also Published As

Publication number Publication date
EP1128201A1 (de) 2001-08-29
EP1171792A1 (de) 2002-01-16
EP1171792B1 (de) 2004-09-29
WO2001063337A1 (en) 2001-08-30
DE60105899T2 (de) 2005-10-20
US20020118911A1 (en) 2002-08-29
US6798935B2 (en) 2004-09-28
DK1171792T3 (da) 2004-11-29

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