FR2818825B1 - Dispositif comprenant une structure mobile a rigidite variable, de preference a commande electrostatique - Google Patents

Dispositif comprenant une structure mobile a rigidite variable, de preference a commande electrostatique

Info

Publication number
FR2818825B1
FR2818825B1 FR0016765A FR0016765A FR2818825B1 FR 2818825 B1 FR2818825 B1 FR 2818825B1 FR 0016765 A FR0016765 A FR 0016765A FR 0016765 A FR0016765 A FR 0016765A FR 2818825 B1 FR2818825 B1 FR 2818825B1
Authority
FR
France
Prior art keywords
mobile structure
variable rigidity
electrostatic control
rigidity mobile
electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0016765A
Other languages
English (en)
Other versions
FR2818825A1 (fr
Inventor
Eric Ollier
David Roy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0016765A priority Critical patent/FR2818825B1/fr
Priority to EP01995749A priority patent/EP1344310A1/fr
Priority to US10/451,065 priority patent/US20040070310A1/en
Priority to PCT/FR2001/004116 priority patent/WO2002050990A1/fr
Priority to JP2002552177A priority patent/JP2004527385A/ja
Publication of FR2818825A1 publication Critical patent/FR2818825A1/fr
Application granted granted Critical
Publication of FR2818825B1 publication Critical patent/FR2818825B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
FR0016765A 2000-12-21 2000-12-21 Dispositif comprenant une structure mobile a rigidite variable, de preference a commande electrostatique Expired - Fee Related FR2818825B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0016765A FR2818825B1 (fr) 2000-12-21 2000-12-21 Dispositif comprenant une structure mobile a rigidite variable, de preference a commande electrostatique
EP01995749A EP1344310A1 (fr) 2000-12-21 2001-12-20 Dispositif comprenant une structure mobile a rigidite variable, de preference a commande electrostatique
US10/451,065 US20040070310A1 (en) 2000-12-21 2001-12-20 Device comprising a variable-rigidity mobile structure preferably with electrostatic control
PCT/FR2001/004116 WO2002050990A1 (fr) 2000-12-21 2001-12-20 Dispositif comprenant une structure mobile a rigidite variable, de preference a commande electrostatique
JP2002552177A JP2004527385A (ja) 2000-12-21 2001-12-20 好適には静電制御性の剛性可変性移動式構造を備える装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0016765A FR2818825B1 (fr) 2000-12-21 2000-12-21 Dispositif comprenant une structure mobile a rigidite variable, de preference a commande electrostatique

Publications (2)

Publication Number Publication Date
FR2818825A1 FR2818825A1 (fr) 2002-06-28
FR2818825B1 true FR2818825B1 (fr) 2003-02-21

Family

ID=8857996

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0016765A Expired - Fee Related FR2818825B1 (fr) 2000-12-21 2000-12-21 Dispositif comprenant une structure mobile a rigidite variable, de preference a commande electrostatique

Country Status (5)

Country Link
US (1) US20040070310A1 (fr)
EP (1) EP1344310A1 (fr)
JP (1) JP2004527385A (fr)
FR (1) FR2818825B1 (fr)
WO (1) WO2002050990A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4186727B2 (ja) * 2002-07-26 2008-11-26 松下電器産業株式会社 スイッチ
DE102005032863A1 (de) * 2005-07-11 2007-01-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikroaktuator
US7529016B1 (en) 2006-07-27 2009-05-05 Allen James J Extended-range tiltable micromirror
JP5688641B2 (ja) * 2011-05-18 2015-03-25 日本電信電話株式会社 微小機械振動子の製造方法および微小機械振動子
DE102012208713A1 (de) 2012-05-24 2013-11-28 Technische Universität Bergakademie Freiberg Träger mit einstellbarer Biegesteifigkeit

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5206557A (en) * 1990-11-27 1993-04-27 Mcnc Microelectromechanical transducer and fabrication method
KR100363247B1 (ko) * 1995-10-28 2003-02-14 삼성전자 주식회사 진동구조물및그것의고유진동수제어방법
EP0783124B1 (fr) * 1995-12-15 2002-04-17 Texas Instruments Incorporated Améliorations concernant les modulateurs de lumière spatiaux
US5914553A (en) * 1997-06-16 1999-06-22 Cornell Research Foundation, Inc. Multistable tunable micromechanical resonators
US6291922B1 (en) * 1999-08-25 2001-09-18 Jds Uniphase, Inc. Microelectromechanical device having single crystalline components and metallic components
US6351580B1 (en) * 2000-03-27 2002-02-26 Jds Uniphase Corporation Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements

Also Published As

Publication number Publication date
FR2818825A1 (fr) 2002-06-28
US20040070310A1 (en) 2004-04-15
JP2004527385A (ja) 2004-09-09
WO2002050990A1 (fr) 2002-06-27
EP1344310A1 (fr) 2003-09-17

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20060831