FR2816866B3 - Dispositif de sciage par fil - Google Patents

Dispositif de sciage par fil

Info

Publication number
FR2816866B3
FR2816866B3 FR0114622A FR0114622A FR2816866B3 FR 2816866 B3 FR2816866 B3 FR 2816866B3 FR 0114622 A FR0114622 A FR 0114622A FR 0114622 A FR0114622 A FR 0114622A FR 2816866 B3 FR2816866 B3 FR 2816866B3
Authority
FR
France
Prior art keywords
sawing device
wire sawing
wire
sawing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR0114622A
Other languages
English (en)
Other versions
FR2816866A3 (fr
Inventor
Charles Hauser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Switzerland SARL
Original Assignee
HCT Shaping Systems SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HCT Shaping Systems SA filed Critical HCT Shaping Systems SA
Publication of FR2816866A3 publication Critical patent/FR2816866A3/fr
Application granted granted Critical
Publication of FR2816866B3 publication Critical patent/FR2816866B3/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23DPLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/003Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
    • B23D57/0053Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of drives for saw wires; of wheel mountings; of wheels
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00Cutting
    • Y10T83/929Tool or tool with support
    • Y10T83/9292Wire tool
FR0114622A 2000-11-20 2001-11-12 Dispositif de sciage par fil Expired - Lifetime FR2816866B3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH02256/00A CH694182A5 (fr) 2000-11-20 2000-11-20 Dispositif de sciage par fil.

Publications (2)

Publication Number Publication Date
FR2816866A3 FR2816866A3 (fr) 2002-05-24
FR2816866B3 true FR2816866B3 (fr) 2002-10-04

Family

ID=4568243

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0114622A Expired - Lifetime FR2816866B3 (fr) 2000-11-20 2001-11-12 Dispositif de sciage par fil

Country Status (4)

Country Link
US (1) US6550364B2 (fr)
JP (1) JP2002210645A (fr)
CH (1) CH694182A5 (fr)
FR (1) FR2816866B3 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030170948A1 (en) * 2002-03-07 2003-09-11 Memc Electronic Materials, Inc. Method and apparatus for slicing semiconductor wafers
GB2414204B (en) * 2004-05-18 2006-04-12 David Ainsworth Hukin Abrasive wire sawing
JP4818848B2 (ja) * 2006-08-28 2011-11-16 コマツNtc株式会社 ワイヤソー
DE102007019566B4 (de) * 2007-04-25 2012-11-29 Siltronic Ag Drahtführungsrolle für Drahtsäge
WO2009102630A1 (fr) * 2008-02-11 2009-08-20 Memc Electronic Materials, Inc. Faisceau de scie à fil renforcé par des nanotubes de carbone utilisé dans un découpage de lingots en tranches par scie à fil
CN102398314B (zh) * 2010-09-17 2014-05-21 上海日进机床有限公司 金刚线切片机
EP2586554A1 (fr) * 2011-10-27 2013-05-01 Applied Materials Switzerland Sàrl Dispositif de scie à fil avec deux grilles de fils indépendantes et son procédé de fonctionnement

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5181503A (en) * 1991-06-26 1993-01-26 W. F. Meyers Company, Inc. Stone slab saw
JP2516717B2 (ja) * 1991-11-29 1996-07-24 信越半導体株式会社 ワイヤソ―及びその切断方法
US6067976A (en) * 1994-01-10 2000-05-30 Tokyo Seimitsu Co., Ltd. Wafer cut method with wire saw apparatus and apparatus thereof
CH690845A5 (de) * 1994-05-19 2001-02-15 Tokyo Seimitsu Co Ltd Verfahren zum Positionieren eines Werkstücks und Vorrichtung hierfür.
JP3427956B2 (ja) * 1995-04-14 2003-07-22 信越半導体株式会社 ワイヤーソー装置
US5944007A (en) * 1996-02-08 1999-08-31 Tokyo Rope Mfg. Co., Ltd. Wire type slicing machine and method
CZ283541B6 (cs) * 1996-03-06 1998-04-15 Trimex Tesla, S.R.O. Způsob řezání ingotů z tvrdých materiálů na desky a pila k provádění tohoto způsobu
DE19739966A1 (de) * 1997-09-11 1999-03-18 Wacker Siltronic Halbleitermat Drahtsäge und Verfahren zum Abtrennen von Formkörpern
CH692485A5 (fr) * 1998-02-13 2002-07-15 Hct Shaping Systems Sa Dispositif de sciage par fil.

Also Published As

Publication number Publication date
FR2816866A3 (fr) 2002-05-24
CH694182A5 (fr) 2004-08-31
US20020100354A1 (en) 2002-08-01
JP2002210645A (ja) 2002-07-30
US6550364B2 (en) 2003-04-22

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