FR2809541B1 - Forme de micropoint forme par faisceau laser et procede de marquage de micropoints - Google Patents

Forme de micropoint forme par faisceau laser et procede de marquage de micropoints

Info

Publication number
FR2809541B1
FR2809541B1 FR0006641A FR0006641A FR2809541B1 FR 2809541 B1 FR2809541 B1 FR 2809541B1 FR 0006641 A FR0006641 A FR 0006641A FR 0006641 A FR0006641 A FR 0006641A FR 2809541 B1 FR2809541 B1 FR 2809541B1
Authority
FR
France
Prior art keywords
micropoints
micropoint
marking
shape
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0006641A
Other languages
English (en)
Other versions
FR2809541A1 (fr
Inventor
Tciichirou Chiba
Ryuusuke Komura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Komatsu Ltd
Original Assignee
Komatsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Ltd filed Critical Komatsu Ltd
Priority to FR0006641A priority Critical patent/FR2809541B1/fr
Priority to DE10025835A priority patent/DE10025835B4/de
Priority claimed from DE10025835A external-priority patent/DE10025835B4/de
Publication of FR2809541A1 publication Critical patent/FR2809541A1/fr
Application granted granted Critical
Publication of FR2809541B1 publication Critical patent/FR2809541B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/544Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544Marks applied to semiconductor devices or parts
    • H01L2223/54406Marks applied to semiconductor devices or parts comprising alphanumeric information
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544Marks applied to semiconductor devices or parts
    • H01L2223/54493Peripheral marks on wafers, e.g. orientation flats, notches, lot number
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
FR0006641A 1999-11-22 2000-05-24 Forme de micropoint forme par faisceau laser et procede de marquage de micropoints Expired - Fee Related FR2809541B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0006641A FR2809541B1 (fr) 2000-05-24 2000-05-24 Forme de micropoint forme par faisceau laser et procede de marquage de micropoints
DE10025835A DE10025835B4 (de) 1999-11-22 2000-05-25 Mikropunktmarkierungsverfahren

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0006641A FR2809541B1 (fr) 2000-05-24 2000-05-24 Forme de micropoint forme par faisceau laser et procede de marquage de micropoints
DE10025835A DE10025835B4 (de) 1999-11-22 2000-05-25 Mikropunktmarkierungsverfahren

Publications (2)

Publication Number Publication Date
FR2809541A1 FR2809541A1 (fr) 2001-11-30
FR2809541B1 true FR2809541B1 (fr) 2005-06-10

Family

ID=26005824

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0006641A Expired - Fee Related FR2809541B1 (fr) 1999-11-22 2000-05-24 Forme de micropoint forme par faisceau laser et procede de marquage de micropoints

Country Status (1)

Country Link
FR (1) FR2809541B1 (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5984515A (ja) * 1982-11-08 1984-05-16 Toshiba Corp レ−ザ光による半導体基板へのマ−キング方法
JP2658351B2 (ja) * 1989-02-03 1997-09-30 日本電気株式会社 レーザマーキング装置
JPH10284359A (ja) * 1997-04-11 1998-10-23 Mitsubishi Electric Corp ウエハの認識装置及びウエハの認識方法
JP3191918B2 (ja) * 1997-11-25 2001-07-23 株式会社小松製作所 微小ドットマークが刻印されてなる半導体ウェハ
JPH11156563A (ja) * 1997-11-25 1999-06-15 Komatsu Ltd レーザ光による微小マーキング装置とそのマーキング方法

Also Published As

Publication number Publication date
FR2809541A1 (fr) 2001-11-30

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20160129