FR2807162B1 - Sonde d'analyse de surface pour un microscope a force atomique et microscope a force atomique la comportant - Google Patents

Sonde d'analyse de surface pour un microscope a force atomique et microscope a force atomique la comportant

Info

Publication number
FR2807162B1
FR2807162B1 FR0004158A FR0004158A FR2807162B1 FR 2807162 B1 FR2807162 B1 FR 2807162B1 FR 0004158 A FR0004158 A FR 0004158A FR 0004158 A FR0004158 A FR 0004158A FR 2807162 B1 FR2807162 B1 FR 2807162B1
Authority
FR
France
Prior art keywords
strip
atomic force
force microscope
sample
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR0004158A
Other languages
English (en)
Other versions
FR2807162A1 (fr
Inventor
Axel Buguin
Pascal Silberzan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institut Curie
Original Assignee
Institut Curie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0004158A priority Critical patent/FR2807162B1/fr
Application filed by Institut Curie filed Critical Institut Curie
Priority to AU2001248664A priority patent/AU2001248664A1/en
Priority to PCT/IB2001/000529 priority patent/WO2001073791A1/fr
Priority to EP01921696A priority patent/EP1269480B1/fr
Priority to AT01921696T priority patent/ATE496308T1/de
Priority to DE60143884T priority patent/DE60143884D1/de
Priority to US10/240,242 priority patent/US6862923B2/en
Publication of FR2807162A1 publication Critical patent/FR2807162A1/fr
Application granted granted Critical
Publication of FR2807162B1 publication Critical patent/FR2807162B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/863—Atomic force probe
FR0004158A 2000-03-31 2000-03-31 Sonde d'analyse de surface pour un microscope a force atomique et microscope a force atomique la comportant Expired - Lifetime FR2807162B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR0004158A FR2807162B1 (fr) 2000-03-31 2000-03-31 Sonde d'analyse de surface pour un microscope a force atomique et microscope a force atomique la comportant
PCT/IB2001/000529 WO2001073791A1 (fr) 2000-03-31 2001-03-30 Microscope a force atomique
EP01921696A EP1269480B1 (fr) 2000-03-31 2001-03-30 Microscope a force atomique
AT01921696T ATE496308T1 (de) 2000-03-31 2001-03-30 Rasterkraftmikroskop
AU2001248664A AU2001248664A1 (en) 2000-03-31 2001-03-30 Atomic force microscope
DE60143884T DE60143884D1 (de) 2000-03-31 2001-03-30 Rasterkraftmikroskop
US10/240,242 US6862923B2 (en) 2000-03-31 2001-03-30 Atomic force microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0004158A FR2807162B1 (fr) 2000-03-31 2000-03-31 Sonde d'analyse de surface pour un microscope a force atomique et microscope a force atomique la comportant

Publications (2)

Publication Number Publication Date
FR2807162A1 FR2807162A1 (fr) 2001-10-05
FR2807162B1 true FR2807162B1 (fr) 2002-06-28

Family

ID=8848749

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0004158A Expired - Lifetime FR2807162B1 (fr) 2000-03-31 2000-03-31 Sonde d'analyse de surface pour un microscope a force atomique et microscope a force atomique la comportant

Country Status (7)

Country Link
US (1) US6862923B2 (fr)
EP (1) EP1269480B1 (fr)
AT (1) ATE496308T1 (fr)
AU (1) AU2001248664A1 (fr)
DE (1) DE60143884D1 (fr)
FR (1) FR2807162B1 (fr)
WO (1) WO2001073791A1 (fr)

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JP2005512018A (ja) * 2001-03-29 2005-04-28 ジョージア テック リサーチ コーポレイション 性能が最適化されたマイクロ干渉計
US7116430B2 (en) * 2002-03-29 2006-10-03 Georgia Technology Research Corporation Highly-sensitive displacement-measuring optical device
US7518737B2 (en) * 2002-03-29 2009-04-14 Georgia Tech Research Corp. Displacement-measuring optical device with orifice
US7440117B2 (en) * 2002-03-29 2008-10-21 Georgia Tech Research Corp. Highly-sensitive displacement-measuring optical device
US7485847B2 (en) * 2004-12-08 2009-02-03 Georgia Tech Research Corporation Displacement sensor employing discrete light pulse detection
US7146282B1 (en) * 2005-05-06 2006-12-05 Wisconsin Alumni Research Foundation Mechanical force detection of magnetic fields using heterodyne demodulation
US20070103697A1 (en) * 2005-06-17 2007-05-10 Degertekin Fahrettin L Integrated displacement sensors for probe microscopy and force spectroscopy
US8220318B2 (en) * 2005-06-17 2012-07-17 Georgia Tech Research Corporation Fast microscale actuators for probe microscopy
EP1938334A2 (fr) * 2005-08-19 2008-07-02 BEYDER, Arthur Oscillateur et procédé permettant de réaliser un microscope à force atomique et d'autres applications
US7395698B2 (en) * 2005-10-25 2008-07-08 Georgia Institute Of Technology Three-dimensional nanoscale metrology using FIRAT probe
US7752898B2 (en) * 2005-10-28 2010-07-13 Georgia Tech Research Corporation Devices for probe microscopy
US7797757B2 (en) * 2006-08-15 2010-09-14 Georgia Tech Research Corporation Cantilevers with integrated actuators for probe microscopy
US8719960B2 (en) * 2008-01-31 2014-05-06 The Board Of Trustees Of The University Of Illinois Temperature-dependent nanoscale contact potential measurement technique and device
WO2010022285A1 (fr) 2008-08-20 2010-02-25 The Board Of Trustees Of The University Of Illinois Dispositif de mesure calorimétrique
US8387443B2 (en) * 2009-09-11 2013-03-05 The Board Of Trustees Of The University Of Illinois Microcantilever with reduced second harmonic while in contact with a surface and nano scale infrared spectrometer
US8484760B2 (en) 2009-11-24 2013-07-09 International Business Machines Corporation Device comprising a cantilever and scanning system
US9057706B2 (en) 2011-02-25 2015-06-16 University Of Western Australia Optical cantilever based analyte detection
US9835591B2 (en) 2011-02-25 2017-12-05 Panorama Synergy Ltd Optical cantilever based analysis
US20130205455A1 (en) * 2012-02-07 2013-08-08 University Of Western Australia System and method of performing atomic force measurements
CN102279288B (zh) * 2011-06-30 2013-03-13 中国科学院苏州纳米技术与纳米仿生研究所 采用原子力显微镜测量样品界面势垒的装置以及方法
US8533861B2 (en) 2011-08-15 2013-09-10 The Board Of Trustees Of The University Of Illinois Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy
US8914911B2 (en) 2011-08-15 2014-12-16 The Board Of Trustees Of The University Of Illinois Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy
US10976238B2 (en) * 2019-01-30 2021-04-13 Xi'an Jiaotong University Measurement apparatus for micro- and nano-scale material and measurement method thereof

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US5241861A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
JP3063351B2 (ja) * 1992-02-04 2000-07-12 株式会社ニコン 原子間力顕微鏡用プローブ、原子間力顕微鏡、原子間力検出方法、原子間力顕微鏡用プローブの製造方法
US5448515A (en) * 1992-09-02 1995-09-05 Mitsubishi Denki Kabushiki Kaisha Magnetic thin film memory and recording/reproduction method therefor
US5461907A (en) * 1993-03-23 1995-10-31 Regents Of The University Of California Imaging, cutting, and collecting instrument and method
US5513518A (en) * 1994-05-19 1996-05-07 Molecular Imaging Corporation Magnetic modulation of force sensor for AC detection in an atomic force microscope
US5753814A (en) * 1994-05-19 1998-05-19 Molecular Imaging Corporation Magnetically-oscillated probe microscope for operation in liquids
US5515719A (en) * 1994-05-19 1996-05-14 Molecular Imaging Corporation Controlled force microscope for operation in liquids
US5983712A (en) * 1994-05-19 1999-11-16 Molecular Imaging Corporation Microscope for compliance measurement
US5670712A (en) * 1994-08-15 1997-09-23 The Regents Of The University Of California Method and apparatus for magnetic force control of a scanning probe
US5900729A (en) * 1997-03-20 1999-05-04 International Business Machines Corporation Magnetic force microscopy probe with integrated coil
US5804710A (en) * 1997-06-05 1998-09-08 International Business Machines Corporation Atomic force microscope system with multi-directional voice coil actuator for controlling the stylus
US5856617A (en) * 1997-09-02 1999-01-05 International Business Machines Corporation Atomic force microscope system with cantilever having unbiased spin valve magnetoresistive strain gauge
JPH11108941A (ja) * 1997-10-06 1999-04-23 Nikon Corp 磁気状態観察装置および方法、磁気記録装置、ならびに、カンチレバー
JP3235786B2 (ja) * 1998-06-30 2001-12-04 技術研究組合オングストロームテクノロジ研究機構 走査プローブの力制御方法
US6064201A (en) * 1998-07-13 2000-05-16 Chartered Semiconductor Manufacturing Ltd. Method and apparatus to image metallic patches embedded in a non-metal surface
EP1197726A1 (fr) * 2000-10-04 2002-04-17 Eidgenössische Technische Hochschule Zürich Palpeur à plusieurs usages et levier pour cela

Also Published As

Publication number Publication date
FR2807162A1 (fr) 2001-10-05
EP1269480A1 (fr) 2003-01-02
WO2001073791A1 (fr) 2001-10-04
DE60143884D1 (de) 2011-03-03
US6862923B2 (en) 2005-03-08
AU2001248664A1 (en) 2001-10-08
EP1269480B1 (fr) 2011-01-19
ATE496308T1 (de) 2011-02-15
US20030167830A1 (en) 2003-09-11

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