FR2804628B1 - Procede pour la determination de conditions abrasives optimales - Google Patents

Procede pour la determination de conditions abrasives optimales

Info

Publication number
FR2804628B1
FR2804628B1 FR0101825A FR0101825A FR2804628B1 FR 2804628 B1 FR2804628 B1 FR 2804628B1 FR 0101825 A FR0101825 A FR 0101825A FR 0101825 A FR0101825 A FR 0101825A FR 2804628 B1 FR2804628 B1 FR 2804628B1
Authority
FR
France
Prior art keywords
determining optimal
abrasive conditions
optimal abrasive
conditions
determining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0101825A
Other languages
English (en)
Other versions
FR2804628A1 (fr
Inventor
Anthony C Gaeta
Paul Wei
Gwo Shin Swei
Thomas G Kinisky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Abrasives Inc
Original Assignee
Norton Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Norton Co filed Critical Norton Co
Publication of FR2804628A1 publication Critical patent/FR2804628A1/fr
Application granted granted Critical
Publication of FR2804628B1 publication Critical patent/FR2804628B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
FR0101825A 2000-02-04 2001-02-02 Procede pour la determination de conditions abrasives optimales Expired - Fee Related FR2804628B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/499,109 US6280288B1 (en) 2000-02-04 2000-02-04 Process for determining optimum grinding conditions

Publications (2)

Publication Number Publication Date
FR2804628A1 FR2804628A1 (fr) 2001-08-10
FR2804628B1 true FR2804628B1 (fr) 2004-12-10

Family

ID=23983847

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0101825A Expired - Fee Related FR2804628B1 (fr) 2000-02-04 2001-02-02 Procede pour la determination de conditions abrasives optimales

Country Status (6)

Country Link
US (1) US6280288B1 (fr)
JP (1) JP2001246532A (fr)
BR (1) BR0100356A (fr)
DE (1) DE10104777A1 (fr)
FR (1) FR2804628B1 (fr)
GB (1) GB2361656B (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7160173B2 (en) * 2002-04-03 2007-01-09 3M Innovative Properties Company Abrasive articles and methods for the manufacture and use of same
FR2860743B1 (fr) * 2003-10-14 2006-01-13 Snecma Moteurs Procede de polissage automatise de pieces mecaniques en titane ou alliage de titane
US7270592B2 (en) * 2004-08-12 2007-09-18 D4D Technologies, Llc Milling machine
JP4764693B2 (ja) * 2005-09-29 2011-09-07 信越半導体株式会社 半導体ウェーハの製造方法及び両頭研削装置
DE102014225697A1 (de) 2014-12-12 2016-06-16 Zf Friedrichshafen Ag Verfahren zum Bestimmen einer Belastungsgrenze eines einzurichtenden Schleifprozesses und Schleifwerkzeug

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6146248A (en) * 1997-05-28 2000-11-14 Lam Research Corporation Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher
US6224465B1 (en) * 1997-06-26 2001-05-01 Stuart L. Meyer Methods and apparatus for chemical mechanical planarization using a microreplicated surface
US5888838A (en) * 1998-06-04 1999-03-30 International Business Machines Corporation Method and apparatus for preventing chip breakage during semiconductor manufacturing using wafer grinding striation information
EP1068928A3 (fr) * 1999-02-11 2003-08-13 Applied Materials, Inc. Procédés de polissage mécano-chimique et composants

Also Published As

Publication number Publication date
US6280288B1 (en) 2001-08-28
GB0102730D0 (en) 2001-03-21
JP2001246532A (ja) 2001-09-11
FR2804628A1 (fr) 2001-08-10
GB2361656A (en) 2001-10-31
BR0100356A (pt) 2001-10-02
GB2361656B (en) 2002-04-10
DE10104777A1 (de) 2001-08-09

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20091030