FR2799403A1 - Industrial polishing cloth with mechanical and chemical properties has treated cotton backing layer with cotton flock surface stuck to it - Google Patents

Industrial polishing cloth with mechanical and chemical properties has treated cotton backing layer with cotton flock surface stuck to it Download PDF

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Publication number
FR2799403A1
FR2799403A1 FR9912842A FR9912842A FR2799403A1 FR 2799403 A1 FR2799403 A1 FR 2799403A1 FR 9912842 A FR9912842 A FR 9912842A FR 9912842 A FR9912842 A FR 9912842A FR 2799403 A1 FR2799403 A1 FR 2799403A1
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France
Prior art keywords
cotton
polishing cloth
cloth according
adhesive
undercoat
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Granted
Application number
FR9912842A
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French (fr)
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FR2799403B1 (en
Inventor
Lucien Grisel
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PROCEDES ET EQUIPEMENTS POUR L
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PROCEDES ET EQUIPEMENTS POUR L
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Priority to FR9912842A priority Critical patent/FR2799403B1/en
Publication of FR2799403A1 publication Critical patent/FR2799403A1/en
Application granted granted Critical
Publication of FR2799403B1 publication Critical patent/FR2799403B1/en
Anticipated expiration legal-status Critical
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B5/00—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts
    • B32B5/22—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by the presence of two or more layers which are next to each other and are fibrous, filamentary, formed of particles or foamed
    • B32B5/24—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by the presence of two or more layers which are next to each other and are fibrous, filamentary, formed of particles or foamed one layer being a fibrous or filamentary layer
    • B32B5/26—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by the presence of two or more layers which are next to each other and are fibrous, filamentary, formed of particles or foamed one layer being a fibrous or filamentary layer another layer next to it also being fibrous or filamentary
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B5/00—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/02—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising animal or vegetable substances, e.g. cork, bamboo, starch
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2262/00—Composition or structural features of fibres which form a fibrous or filamentary layer or are present as additives
    • B32B2262/06—Vegetal fibres
    • B32B2262/062—Cellulose fibres, e.g. cotton
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2317/00—Animal or vegetable based
    • B32B2317/10—Natural fibres, e.g. wool, cotton

Abstract

The polishing cloth (10) comprises a textile complex made from a backing layer (12) of graded cotton treated with a colored or plain primer, and a surface layer (16) of milled cotton flock with an average fibre length of 0.1 - 0.4 mm, stuck to the backing layer by an intermediate layer of adhesive (14). The weight of the backing layer is about 155 g/sq m, and that of the cotton flock about 30 g/sq m. The cloth can be attached to a polisher by an adhesive coating (18), by a magnetic layer (20) attached to the backing by an adhesive (22), or by a supple plastic layer (24) sandwiched between two adhesive coatings (26, 28).

Description

Tissu de polissage mécanique et mécano-chimique. Domaine technique de l'invention L'invention est relative à un tissu de polissage mécanique mécano- chimique, comprenant un complexe textile plat composé d'une sous-couche imperméable servant d'élément de support, et d'un revêtement superficiel en matériau spongieux actif venant en contact avec la pièce à polir. Mechanical and chemical mechanical polishing cloth. TECHNICAL FIELD OF THE INVENTION The invention relates to a mechanical chemical mechanical polishing cloth, comprising a flat textile complex composed of an impermeable undercoat serving as a support element, and a surface coating of spongy material. active coming into contact with the workpiece.

tel tissu de polissage est généralement appliqué sur une polisseuse, et peut avoir des applications diverses, notamment dans la métallographie, la géologie, la microélectronique pour la préparation de substrats semi-conducteurs, la mécanique. L'effet mécanique de friction du complexe textile sur l'objet à polir peut être combiné avec l'action chimique d'une solution de polissage liquide pâteuse, laquelle est projetée sur l'objet en imbibant le complexe textile lors du fonctionnement en rotation de la polisseuse. L'enlèvement superficiel de la matière necessite en plus une certaine pression d'application du complexe textile sur l'objet. Etat de la technique brevet français 7322367 décrit un complexe textile pour le polissage de semi conducteurs, et comprenant un corps spongieux en feutre surmonté d'une couche active perméable destinée à frotter contre la surface à polir en laissant passer le liquide provenant du feutre. La couche active perméable est formée par des fibres polyester, de polyamide ou de polypropylène. Le feutre est fixe sur une sous- couche imperméable réalisée en matière plastique, par exemple du chlorure de polyvinyle. Les performances de polissage d'un tel complexe textile restent néanmoins limitées, et nécessitent des remplacements fréquents. such a polishing cloth is generally applied to a polisher, and can have various applications, in particular in metallography, geology, microelectronics for the preparation of semiconductor substrates, mechanics. The mechanical friction effect of the textile complex on the object to be polished can be combined with the chemical action of a pasty liquid polishing solution, which is sprayed onto the object by soaking the textile complex during the rotation operation of the polisher. The surface removal of the material also requires a certain pressure to apply the textile complex to the object. STATE OF THE ART French patent 7322367 describes a textile complex for the polishing of semiconductors, and comprising a sponge-like felt body surmounted by a permeable active layer intended to rub against the surface to be polished by letting the liquid coming from the felt pass. The permeable active layer is formed by polyester, polyamide or polypropylene fibers. The felt is fixed on an impermeable underlay made of plastic, for example polyvinyl chloride. The polishing performance of such a textile complex nevertheless remains limited, and requires frequent replacement.

Objet de l'invention L'objet de l'invention consiste à réaliser un tissu à complexe textile plat permettant d'obtenir un polissage mécanique et/ou mécano-chimique optimum. OBJECT OF THE INVENTION The object of the invention consists in producing a fabric with a flat textile complex making it possible to obtain optimum mechanical and / or mechanical-chemical polishing.

tissu selon l'invention est caractérisé en ce que la sous-couche est à base de coton calibré et traité par apprêtage, - le revêtement superficiel est formé par un flock de coton broye et collé sur la sous-couche au moyen d'une couche intermédiaire adhésive, la longueur moyenne fibres de coton du flock étant comprise entre 0,1 mm et 0,4mm. fabric according to the invention is characterized in that the undercoat is based on cotton calibrated and treated by finishing, - the surface coating is formed by a flock of ground cotton and bonded to the undercoat by means of a layer adhesive intermediate, the average cotton fiber length of the flock being between 0.1 mm and 0.4 mm.

Selon mode de réalisation préférentiel de l'invention, le coton de la sous-couche est apprêté au moyen d'une émulsion acrylique pouvant être pigmentée ou non pigmentée. Le poids du coton de la sous-couche est de l'ordre 155g/m2, et la couche intermédiaire adhésive est à base d'esters de polyuréthane réticulé avec un polyisocianate. Le flock de coton possède un poids de l'ordre de 30g/m2. According to a preferred embodiment of the invention, the cotton of the sublayer is prepared by means of an acrylic emulsion which can be pigmented or non-pigmented. The weight of the cotton in the sublayer is around 155 g / m2, and the adhesive intermediate layer is based on polyurethane esters crosslinked with a polyisocianate. The cotton flock has a weight of around 30g / m2.

fixation du complexe textile sur un support d'une polisseuse s'effectue au moyen d'un revêtement adhésif autocollant, ou par attraction magnétique. Description sommaire des dessins D'autres avantages et caractéristiques ressortiront plus clairement de description va suivre d'un mode de réalisation de l'invention donné à titre d'exemple non limitatif, et représenté à la figure unique illustrant une vue schématique en coupe complexe textile pouvant être appliqué à différents supports. fixation of the textile complex on a support of a polisher is carried out by means of a self-adhesive adhesive coating, or by magnetic attraction. Brief description of the drawings Other advantages and characteristics will emerge more clearly from the following description of an embodiment of the invention given by way of nonlimiting example, and represented in the single figure illustrating a schematic view in complex textile section. can be applied to different substrates.

Description d'un mode de réalisation préférentiel référence à la figure 1, un tissu de polissage 10 mécanique et mécano-chimique comprend un complexe textile plat, composé d'une sous-couche 1 à base de coton calibré imperméable, d'une couche intermédiaire 14 de colle, et d'un revêtement superficiel 16 en matériau spongieux actif. Description of a preferred embodiment with reference to FIG. 1, a mechanical and mechanical-chemical polishing cloth 10 comprises a flat textile complex, composed of an underlayer 1 based on waterproof calibrated cotton, of an intermediate layer 14 of glue, and a surface coating 16 of active sponge material.

coton de la sous-couche 12 fait l'objet d'un traitement d'apprêtage au moyen d'une émulsion acrylique pouvant être pigmentée. Le poids du coton de l'ordre 155g/m2. Cotton of the underlay 12 is subjected to a finishing treatment by means of an acrylic emulsion which can be pigmented. The weight of cotton of the order of 155g / m2.

couche intermédiaire 14 adhésive est formée par revêtement continu d'esters de polyuréthane, déposée sur la sous-couche 12 avec un grammage voisin de gog/m2. L'ester de polyuréthane est réticulé avantageusement avec un polyisocianate, de manière à obtenir un effet de collage optimum, une bonne resistance au lavage et au nettoyage à sec. adhesive intermediate layer 14 is formed by continuous coating of polyurethane esters, deposited on the underlayer 12 with a grammage close to gog / m2. The polyurethane ester is advantageously crosslinked with a polyisocianate, so as to obtain an optimum bonding effect, good resistance to washing and dry cleaning.

zone spongieuse active du revêtement superficiel 16 vient en contact avec la pièce à polir, et est formée par un flock de coton broyé et calibré. La longueur moyenne des fibres de coton est comprise entre O,imm et 0,4mm, et est de préférence égale à 0,2mm. Le flock de coton est collé sur le coton imperméabilisé de la sous-couche 12 par la couche intermédiaire 14 adhésive de polyuréthane. Le grammage du flock de coton est de l'ordre de 30g/m2. Le tissu de polissage 10 peut être conformé selon un disque, ou tout autre configuration , et est destiné à être fixé sur un support mobile rigide ou semi-rigide, par exemple le plateau d'une polisseuse. La fixation du tissu de polissage 10 sur le support intervient de différentes manières en fonction des utilisations: soit directement par collage par un revêtement adhésif 18 réparti sur la face inférieure du coton imperméabilisé de la sous-couchel2; soit par attraction magnétique au moyen d'un revêtement magnétique 20 assemblé à la face inférieure de la sous-couche 12 par un adhésif 22; soit par une feuille souple 24 en chlorure de polyvinyle ou matériau similaire, pris en sandwich entre deux revêtements adhésifs 26, 28, l'ensemble présentant une certaine rigidité. active sponge area of the surface coating 16 comes into contact with the part to be polished, and is formed by a flock of ground and calibrated cotton. The average length of the cotton fibers is between O, imm and 0.4 mm, and is preferably equal to 0.2 mm. The cotton flock is bonded to the waterproof cotton of the under-layer 12 by the intermediate layer 14 of polyurethane adhesive. The grammage of the cotton flock is around 30g / m2. The polishing cloth 10 can be shaped according to a disc, or any other configuration, and is intended to be fixed on a rigid or semi-rigid movable support, for example the plate of a polisher. The fixing of the polishing cloth 10 on the support takes place in different ways depending on the uses: either directly by gluing with an adhesive coating 18 distributed on the underside of the waterproof cotton of the undercoat2; either by magnetic attraction by means of a magnetic coating 20 assembled to the underside of the underlayer 12 by an adhesive 22; or by a flexible sheet 24 of polyvinyl chloride or similar material, sandwiched between two adhesive coatings 26, 28, the assembly having a certain rigidity.

La matière spongieuse active du revêtement superficiel 16 est apte à retenir toutes sortes de produits pâteux ou liquides pour assurer le polissage différents matériaux. The active sponge material of the surface coating 16 is capable of retaining all kinds of pasty or liquid products to ensure the polishing of different materials.

L'utilisation d'un tel tissu de polissage 10 mécanique et mécano-chimique peut avoir des applications diverses, notamment dans la métallographie pour préparation d'échantillons à observer au microscope, la géologie, la microélectronique pour la préparation de substrats semi-conducteurs, la mécanique.The use of such a mechanical and mechanical-chemical polishing cloth 10 can have various applications, in particular in metallography for the preparation of samples to be observed under a microscope, geology, microelectronics for the preparation of semiconductor substrates, the mecanic.

Claims (1)

RevendicationsClaims 1. Tissu de polissage mécanique et mécano-chimique, comprenant un complexe textile plat composé d'une sous-couche (12) imperméable servant d'élément de support, et d'un revêtement (16) superficiel en matériau spongieux actif venant en contact avec la pièce à polir, caractérisé en ce que - la sous-couche (12) est à base de coton calibré et traité par apprêtage, le revêtement (16) superficiel est formé par un flock de coton broyé collé sur sous-couche (12) au moyen d'une couche intermédiaire (14) adhésive, la longueur moyenne des fibres de coton du flock étant comprise entre 1 mm et 4mm. Tissu de polissage selon la revendication 1, caractérisé en ce que le coton de la sous-couche (12) est apprêté au moyen d'une émulsion acrylique pouvant être pigmentée ou non pigmentée, Tissu de polissage selon la revendication 1 ou 2, caractérisé en ce que le poids coton de la sous-couche (12) est de l'ordre de 155g/m2. Tissu de polissage selon la revendication 1, caractérisé en ce que couche intermédiaire (14) adhésive est à base d'esters de polyuréthane. 5. Tissu de polissage selon la revendication 4, caractérisé en ce que l'ester de polyuréthane est réticulé avec un polyisocianate. 6. Tissu de polissage selon l'une des revendications 1 à 5, caractérisé en ce que le flock de coton possede un poids de l'ordre de 30g/m2. 7. Tissu de polissage selon l'une des revendications 1 à 6, caractérise en ce que la fixation du complexe textile sur un support d'une polisseuse s'effectue par collage au moyen revêtement adhésif (18). 8. Tissu de polissage selon l'une des revendications 1 à 6, caractérise en ce que la fixation du complexe textile sur un support d'une polisseuse s'effectue par l'intermédiaire revêtement magnétique (20) assemblé à la face inferieure de la sous-couche (12) par un adhésif (22). 9. Tissu de polissage selon l'une des revendications 1 à 6, caractérisé en ce que la fixation du complexe textile sur un support d'une polisseuse s'effectue par l'intermédiaire d'une feuille souple (24) en chlorure de polyvinyle pris en sandwich entre deux revêtements adhésifs (26, 28).1. Mechanical and chemical mechanical polishing fabric, comprising a flat textile complex composed of an impermeable undercoat (12) serving as a support element, and a surface coating (16) made of active spongy material coming into contact with the piece to be polished, characterized in that - the undercoat (12) is based on calibrated cotton and treated by dressing, the surface coating (16) is formed by a flock of ground cotton bonded to undercoat (12 ) by means of an adhesive intermediate layer (14), the average length of the cotton fibers of the flock being between 1 mm and 4 mm. Polishing cloth according to claim 1, characterized in that the cotton of the undercoat (12) is finished by means of an acrylic emulsion which can be pigmented or not pigmented, Polishing cloth according to claim 1 or 2, characterized in the cotton weight of the underlay (12) is around 155g / m2. Polishing cloth according to claim 1, characterized in that the adhesive intermediate layer (14) is based on polyurethane esters. 5. Polishing cloth according to claim 4, characterized in that the polyurethane ester is crosslinked with a polyisocianate. 6. Polishing cloth according to one of claims 1 to 5, characterized in that the cotton flock has a weight of the order of 30g / m2. 7. Polishing cloth according to one of claims 1 to 6, characterized in that the fixing of the textile complex on a support of a polisher is carried out by bonding using adhesive coating (18). 8. Polishing cloth according to one of claims 1 to 6, characterized in that the fixing of the textile complex to a support of a polisher is carried out by means of magnetic coating (20) assembled on the lower face of the undercoat (12) with an adhesive (22). 9. Polishing cloth according to one of claims 1 to 6, characterized in that the fixing of the textile complex on a support of a polisher is carried out by means of a flexible sheet (24) of polyvinyl chloride sandwiched between two adhesive coatings (26, 28).
FR9912842A 1999-10-08 1999-10-08 MECHANICAL AND MECHANICAL CHEMICAL POLISHING FABRIC Expired - Fee Related FR2799403B1 (en)

Priority Applications (1)

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FR9912842A FR2799403B1 (en) 1999-10-08 1999-10-08 MECHANICAL AND MECHANICAL CHEMICAL POLISHING FABRIC

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Application Number Priority Date Filing Date Title
FR9912842A FR2799403B1 (en) 1999-10-08 1999-10-08 MECHANICAL AND MECHANICAL CHEMICAL POLISHING FABRIC

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FR2799403B1 FR2799403B1 (en) 2002-01-25

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004021855A1 (en) 2002-09-05 2004-03-18 3M Innovative Properties Company Flocked substrates for use as scouring materials

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2063961A1 (en) * 1969-10-13 1971-07-16 Radiotechnique Compelec Mechanico-chemical grinder for semi-con-ducting panels
US5482756A (en) * 1990-03-29 1996-01-09 Minnesota Mining And Manufacturing Company Nonwoven surface finishing articles reinforcing with a polymer backing

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2063961A1 (en) * 1969-10-13 1971-07-16 Radiotechnique Compelec Mechanico-chemical grinder for semi-con-ducting panels
US5482756A (en) * 1990-03-29 1996-01-09 Minnesota Mining And Manufacturing Company Nonwoven surface finishing articles reinforcing with a polymer backing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004021855A1 (en) 2002-09-05 2004-03-18 3M Innovative Properties Company Flocked substrates for use as scouring materials

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