FR2792065B1 - INSTALLATION AND METHOD FOR OBSERVING TWO IDENTICAL SPECIMENS - Google Patents

INSTALLATION AND METHOD FOR OBSERVING TWO IDENTICAL SPECIMENS

Info

Publication number
FR2792065B1
FR2792065B1 FR9904485A FR9904485A FR2792065B1 FR 2792065 B1 FR2792065 B1 FR 2792065B1 FR 9904485 A FR9904485 A FR 9904485A FR 9904485 A FR9904485 A FR 9904485A FR 2792065 B1 FR2792065 B1 FR 2792065B1
Authority
FR
France
Prior art keywords
observing
installation
identical specimens
specimens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9904485A
Other languages
French (fr)
Other versions
FR2792065A1 (en
Inventor
Romain Deplats
Bruno Benteo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National dEtudes Spatiales CNES
Original Assignee
Centre National dEtudes Spatiales CNES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National dEtudes Spatiales CNES filed Critical Centre National dEtudes Spatiales CNES
Priority to FR9904485A priority Critical patent/FR2792065B1/en
Publication of FR2792065A1 publication Critical patent/FR2792065A1/en
Application granted granted Critical
Publication of FR2792065B1 publication Critical patent/FR2792065B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
FR9904485A 1999-04-09 1999-04-09 INSTALLATION AND METHOD FOR OBSERVING TWO IDENTICAL SPECIMENS Expired - Fee Related FR2792065B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9904485A FR2792065B1 (en) 1999-04-09 1999-04-09 INSTALLATION AND METHOD FOR OBSERVING TWO IDENTICAL SPECIMENS

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9904485A FR2792065B1 (en) 1999-04-09 1999-04-09 INSTALLATION AND METHOD FOR OBSERVING TWO IDENTICAL SPECIMENS

Publications (2)

Publication Number Publication Date
FR2792065A1 FR2792065A1 (en) 2000-10-13
FR2792065B1 true FR2792065B1 (en) 2001-07-13

Family

ID=9544245

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9904485A Expired - Fee Related FR2792065B1 (en) 1999-04-09 1999-04-09 INSTALLATION AND METHOD FOR OBSERVING TWO IDENTICAL SPECIMENS

Country Status (1)

Country Link
FR (1) FR2792065B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2896061B1 (en) * 2012-09-14 2023-06-28 Delmic Ip B.V. Integrated optical and charged particle inspection apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW208757B (en) * 1992-01-09 1993-07-01 Samsung Electronics Co Ltd
JP3141732B2 (en) * 1995-07-05 2001-03-05 株式会社日立製作所 Charged particle beam equipment

Also Published As

Publication number Publication date
FR2792065A1 (en) 2000-10-13

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20141231