FR2790267B1 - Procede de depot d'une couche de diamant sur un metal refractaire de transition et piece revetue d' une telle couche - Google Patents

Procede de depot d'une couche de diamant sur un metal refractaire de transition et piece revetue d' une telle couche

Info

Publication number
FR2790267B1
FR2790267B1 FR9902483A FR9902483A FR2790267B1 FR 2790267 B1 FR2790267 B1 FR 2790267B1 FR 9902483 A FR9902483 A FR 9902483A FR 9902483 A FR9902483 A FR 9902483A FR 2790267 B1 FR2790267 B1 FR 2790267B1
Authority
FR
France
Prior art keywords
layer
transitional
depositing
refractory metal
part coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9902483A
Other languages
English (en)
Other versions
FR2790267A1 (fr
Inventor
Werner Hanni
Andre Perret
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre Suisse dElectronique et Microtechnique SA CSEM
Original Assignee
Centre Suisse dElectronique et Microtechnique SA CSEM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Suisse dElectronique et Microtechnique SA CSEM filed Critical Centre Suisse dElectronique et Microtechnique SA CSEM
Priority to FR9902483A priority Critical patent/FR2790267B1/fr
Publication of FR2790267A1 publication Critical patent/FR2790267A1/fr
Application granted granted Critical
Publication of FR2790267B1 publication Critical patent/FR2790267B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
FR9902483A 1999-02-25 1999-02-25 Procede de depot d'une couche de diamant sur un metal refractaire de transition et piece revetue d' une telle couche Expired - Fee Related FR2790267B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9902483A FR2790267B1 (fr) 1999-02-25 1999-02-25 Procede de depot d'une couche de diamant sur un metal refractaire de transition et piece revetue d' une telle couche

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9902483A FR2790267B1 (fr) 1999-02-25 1999-02-25 Procede de depot d'une couche de diamant sur un metal refractaire de transition et piece revetue d' une telle couche

Publications (2)

Publication Number Publication Date
FR2790267A1 FR2790267A1 (fr) 2000-09-01
FR2790267B1 true FR2790267B1 (fr) 2001-05-11

Family

ID=9542634

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9902483A Expired - Fee Related FR2790267B1 (fr) 1999-02-25 1999-02-25 Procede de depot d'une couche de diamant sur un metal refractaire de transition et piece revetue d' une telle couche

Country Status (1)

Country Link
FR (1) FR2790267B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60221253T2 (de) * 2002-10-14 2008-04-10 Adamant Technologies S.A. Verfahren zum Herstellung von rohrförmigen Hohlkörpern mit innenseitiger Diamantbeschichtung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59184791A (ja) * 1983-04-01 1984-10-20 Mitsubishi Metal Corp ダイヤモンドの気相合成法
JPH0774449B2 (ja) * 1987-10-15 1995-08-09 住友電気工業株式会社 ダイヤモンド被覆水素脆性金属の製造方法
JPH02267284A (ja) * 1989-04-05 1990-11-01 Noritake Co Ltd 気相合成法による多結晶質ダイヤモンド系物体およびその製法
US5264071A (en) * 1990-06-13 1993-11-23 General Electric Company Free standing diamond sheet and method and apparatus for making same
JP2977619B2 (ja) * 1991-01-17 1999-11-15 三菱電機株式会社 ダイヤモンド膜形成方法
US5314652A (en) * 1992-11-10 1994-05-24 Norton Company Method for making free-standing diamond film
FR2733255B1 (fr) * 1995-04-21 1997-10-03 France Etat Procede de fabrication d'une piece metallique recouverte de diamant et piece metallique obtenue au moyen d'un tel procede

Also Published As

Publication number Publication date
FR2790267A1 (fr) 2000-09-01

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20051031

D3 Decision to revoke the decision of lapse
TP Transmission of property
ST Notification of lapse

Effective date: 20131031