FR2788708B3 - Appareil et son procede de traitement des surfaces de substrats semi-conducteurs - Google Patents
Appareil et son procede de traitement des surfaces de substrats semi-conducteursInfo
- Publication number
- FR2788708B3 FR2788708B3 FR9900977A FR9900977A FR2788708B3 FR 2788708 B3 FR2788708 B3 FR 2788708B3 FR 9900977 A FR9900977 A FR 9900977A FR 9900977 A FR9900977 A FR 9900977A FR 2788708 B3 FR2788708 B3 FR 2788708B3
- Authority
- FR
- France
- Prior art keywords
- semiconductor substrates
- treating surfaces
- treating
- substrates
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/102—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9900977A FR2788708B3 (fr) | 1999-01-26 | 1999-01-26 | Appareil et son procede de traitement des surfaces de substrats semi-conducteurs |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9900977A FR2788708B3 (fr) | 1999-01-26 | 1999-01-26 | Appareil et son procede de traitement des surfaces de substrats semi-conducteurs |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2788708A1 FR2788708A1 (fr) | 2000-07-28 |
| FR2788708B3 true FR2788708B3 (fr) | 2001-05-04 |
Family
ID=9541341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR9900977A Expired - Fee Related FR2788708B3 (fr) | 1999-01-26 | 1999-01-26 | Appareil et son procede de traitement des surfaces de substrats semi-conducteurs |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2788708B3 (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7984566B2 (en) * | 2003-10-27 | 2011-07-26 | Staples Wesley A | System and method employing turbofan jet engine for drying bulk materials |
| US7980000B2 (en) | 2006-12-29 | 2011-07-19 | Applied Materials, Inc. | Vapor dryer having hydrophilic end effector |
| RU2484358C1 (ru) * | 2011-12-19 | 2013-06-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Санкт-Петербургский государственный горный университет" | Устройство для устранения скоплений жидкости или газа из проблемных участков газонефтепроводов |
-
1999
- 1999-01-26 FR FR9900977A patent/FR2788708B3/fr not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| FR2788708A1 (fr) | 2000-07-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |