FR2783352B1 - Disque formant couvercle pour chambre de gravure de plaquettes de circuits integres - Google Patents

Disque formant couvercle pour chambre de gravure de plaquettes de circuits integres

Info

Publication number
FR2783352B1
FR2783352B1 FR9811574A FR9811574A FR2783352B1 FR 2783352 B1 FR2783352 B1 FR 2783352B1 FR 9811574 A FR9811574 A FR 9811574A FR 9811574 A FR9811574 A FR 9811574A FR 2783352 B1 FR2783352 B1 FR 2783352B1
Authority
FR
France
Prior art keywords
circuit board
integrated circuit
lid forming
forming disc
engraving chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9811574A
Other languages
English (en)
Other versions
FR2783352A1 (fr
Inventor
Gregor Cernesson
Silva Paisana Jose Da
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR9811574A priority Critical patent/FR2783352B1/fr
Publication of FR2783352A1 publication Critical patent/FR2783352A1/fr
Application granted granted Critical
Publication of FR2783352B1 publication Critical patent/FR2783352B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
FR9811574A 1998-09-16 1998-09-16 Disque formant couvercle pour chambre de gravure de plaquettes de circuits integres Expired - Fee Related FR2783352B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9811574A FR2783352B1 (fr) 1998-09-16 1998-09-16 Disque formant couvercle pour chambre de gravure de plaquettes de circuits integres

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9811574A FR2783352B1 (fr) 1998-09-16 1998-09-16 Disque formant couvercle pour chambre de gravure de plaquettes de circuits integres

Publications (2)

Publication Number Publication Date
FR2783352A1 FR2783352A1 (fr) 2000-03-17
FR2783352B1 true FR2783352B1 (fr) 2000-12-15

Family

ID=9530509

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9811574A Expired - Fee Related FR2783352B1 (fr) 1998-09-16 1998-09-16 Disque formant couvercle pour chambre de gravure de plaquettes de circuits integres

Country Status (1)

Country Link
FR (1) FR2783352B1 (fr)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05335263A (ja) * 1992-05-29 1993-12-17 Kokusai Electric Co Ltd プラズマ処理装置
US5980194A (en) * 1996-07-15 1999-11-09 Applied Materials, Inc. Wafer position error detection and correction system

Also Published As

Publication number Publication date
FR2783352A1 (fr) 2000-03-17

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20090529